公开(公告)号：US11688592B2

公开(公告)日：2023-06-27

申请号：US17609519

申请日：2020-05-12

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Terunori Kawai ,  Yoshitaka Torii ,  Masami Shibayama ,  Hiroyuki Watanabe ,  Shinichi Yamashita

IPC: H01J9/12 ,  H01J43/08 ,  H01J43/18

CPC classification number: H01J43/08 ,  H01J9/12 ,  H01J43/18

Abstract: A photocathode including a substrate, a photoelectric conversion layer provided on the substrate and generating photoelectrons in response to incidence of light, and an underlayer provided between the substrate and the photoelectric conversion layer and containing beryllium, in which the underlayer has a first underlayer containing a nitride of beryllium.