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公开(公告)号：US09412397B1
公开(公告)日：2016-08-09
申请号：US14608586
申请日：2015-01-29
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Kazuki Sato , Hideo Mamiya
CPC分类号： G11B5/3123 , G11B5/17 , G11B5/3906 , G11B2005/0021
摘要： A magnetic write head has a plated coil with narrow pitch and is suitable for writing at high frequencies on magnetic media with high coercivity. The narrow pitch is obtained without such disadvantages as overplating that has adversely affected prior art attempts to produce such narrow pitches. The process that produces the magnetic write head is characterized by an RIE plasma etch using O2/N2 to etch plating trenches into a baked layer of photoresist with the ratio of gases being 5/45 sccm so that a dilute O2 concentration does not create unwanted side etching of the plating trenches. In addition, a Cu seed layer is coated with an insulating layer of Al2O3 which redeposits on the trench sidewalls to inhibit redeposition of any Cu from the seed layer and prevent outward growth of the plated Cu that would result in overplating.
摘要翻译： 磁写头具有窄间距的电镀线圈，适用于高矫顽磁性介质的高频写入。 获得窄的间距没有诸如对现有技术尝试产生这种窄间距产生不利影响的过度镀敷的缺点。 产生磁写头的过程的特征在于使用O 2 / N 2的RIE等离子体蚀刻将电镀沟槽蚀刻成光致抗蚀剂的烘烤层，其中气体比例为5/45sccm，使得稀的O 2浓度不会产生不期望的侧面 蚀刻电镀槽。 此外，Cu籽晶层涂覆有Al 2 O 3的绝缘层，其重新沉积在沟槽侧壁上以抑制任何Cu从种子层的再沉积，并防止导致过镀的镀覆Cu的向外生长。
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公开(公告)号：US09013964B2
公开(公告)日：2015-04-21
申请号：US14021365
申请日：2013-09-09
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuki Sato , Hironori Araki , Ryuji Fujii
CPC分类号： G11B13/08 , G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A return path section includes first and second yoke portions and first, second and third columnar portions. The first and second yoke portions and the first columnar portion are located on the same side in the direction of travel of the recording medium relative to a wave guide core. The second and third columnar portions are located on opposite sides of a plasmon generator and connected to a shield. The first yoke portion connects a main pole to the first columnar portion. The second yoke portion connects the first columnar portion to the second and third columnar portions. A coil is wound around the first columnar portion.
摘要翻译： 返回路径部分包括第一和第二轭部分以及第一，第二和第三柱状部分。 第一和第二磁轭部分和第一柱状部分位于记录介质相对于波导芯的行进方向的同一侧。 第二和第三柱状部分位于等离子体发生器的相对侧并且连接到屏蔽。 第一轭部将主极连接到第一柱状部。 第二轭部将第一柱状部分连接到第二和第三柱状部分。 线圈缠绕在第一柱状部分上。
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公开(公告)号：US20140305902A1
公开(公告)日：2014-10-16
申请号：US14315449
申请日：2014-06-26
发明人： Xuhui Jin , Hiroyuki Ito , Yoshitaka Sasaki , Shigeki Tanemura
IPC分类号： G02B6/10
CPC分类号： G02B6/105 , G02B2006/12173 , G02B2006/12176 , G11B5/314 , G11B5/4866 , G11B5/6088 , G11B2005/0021 , Y10T29/49032
摘要： A process sequence for forming a waveguide structure with a light polarization rotator section that converts transverse electric light from a TE light source to transverse magnetic light which is subsequently coupled to a plasmon generator (PG) is disclosed. The light polarization rotator section has a length determined by TE LD light wavelength, and the effective mode index of the two orthogonal fundamental modes, and a slope is formed in one side of the symmetric structure with a 45 degree angle with respect to a bottom surface. Offsets that narrow the cross-track width may be formed on the two sides of the light polarization rotator section to improve symmetry for higher TE to TM polarization conversion efficiency.
摘要翻译： 公开了一种用于形成具有将来自TE光源的横向电光转换成随后耦合到等离子体激元发生器（PG）的横向磁光的光偏振旋转部分的波导结构的处理顺序。 光偏振旋转部具有通过TE LD光波长确定的长度和两个正交基模的有效模式指数，并且在对称结构的一侧形成相对于底面成45度角的斜面 。 可以在光偏振旋转体部分的两侧形成使交叉轨道宽度变窄的偏移，以改善对TE的更高的TM偏振转换效率的对称性。
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公开(公告)号：US20160225391A1
公开(公告)日：2016-08-04
申请号：US14608586
申请日：2015-01-29
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Seiichiro Tomita , Kazuki Sato , Hideo Mamiya
CPC分类号： G11B5/3123 , G11B5/17 , G11B5/3906 , G11B2005/0021
摘要： A magnetic write head has a plated coil with narrow pitch and is suitable for writing at high frequencies on magnetic media with high coercivity. The narrow pitch is obtained without such disadvantages as overplating that has adversely affected prior art attempts to produce such narrow pitches. The process that produces the magnetic write head is characterized by an RIE plasma etch using O2/N2 to etch plating trenches into a baked layer of photoresist with the ratio of gases being 5/45 sccm so that a dilute O2 concentration does not create unwanted side etching of the plating trenches. In addition, a Cu seed layer is coated with an insulating layer of Al2O3 which redeposits on the trench sidewalls to inhibit redeposition of any Cu from the seed layer and prevent outward growth of the plated Cu that would result in overplating.
摘要翻译： 磁写头具有窄间距的电镀线圈，适用于高矫顽磁性介质的高频写入。 获得窄的间距没有诸如对现有技术尝试产生这种窄间距产生不利影响的过度镀敷的缺点。 产生磁写头的过程的特征在于使用O 2 / N 2的RIE等离子体蚀刻将电镀沟槽蚀刻成光致抗蚀剂的烘烤层，其中气体比例为5/45sccm，使得稀的O 2浓度不会产生不期望的侧面 蚀刻电镀槽。 此外，Cu籽晶层涂覆有Al 2 O 3的绝缘层，其重新沉积在沟槽侧壁上以抑制任何Cu从种子层的再沉积，并防止导致过镀的镀覆Cu的向外生长。
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公开(公告)号：US08873354B2
公开(公告)日：2014-10-28
申请号：US14303739
申请日：2014-06-13
发明人： Xuhui Jin , Hiroyuki Ito , Yoshitaka Sasaki , Shigeki Tanemura
CPC分类号： G02B6/105 , G02B2006/12173 , G02B2006/12176 , G11B5/314 , G11B5/4866 , G11B5/6088 , G11B2005/0021 , Y10T29/49032
摘要： A waveguide structure with a light polarization rotator section for converting transverse electric light from a TE light source to transverse magnetic light which is subsequently coupled to a plasmon generator (PG) is disclosed. Wavelengths above 800 nm are advantageously used to reduce resistive heating in the PG, and in adjacent cladding and write pole layers to improve the thermally assisted magnetic recording head lifetime. The light polarization rotator section has a length determined by TE LD light wavelength, and the effective mode index of the two orthogonal fundamental modes, and has curved portions to enable a greater length to accommodate longer TE light wavelengths without increasing the waveguide distance between the air bearing surface and back end of the device.
摘要翻译： 公开了一种具有光偏转旋转部分的波导结构，用于将TE光源的横向电光转换成后耦合到等离子体发生器（PG）的横向磁光。 高于800nm的波长有利地用于减少PG中的电阻加热，以及相邻的包层和写极层中的电阻加热，以改善热辅助磁记录头寿命。 光偏振旋转器部分具有由TE LD光波长确定的长度和两个正交基模的有效模式指数，并且具有弯曲部分以使得能够更长的长度以适应更长的TE光波长，而不增加空气之间的波导距离 轴承表面和后端。
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公开(公告)号：US20140112115A1
公开(公告)日：2014-04-24
申请号：US13654490
申请日：2012-10-18
发明人： Xuhui Jin , Hiroyuki Ito , Shigeki Tanemura , Dayu Zhou
CPC分类号： G11B5/314 , G11B5/3163 , G11B2005/0021
摘要： Three structures, and processes for manufacturing them, that improve the performance of a TAMR feature in a magnetic write head are disclosed. This improvement is achieved by making the separation between the edge plasmon generator and the plasmon shield less than the separation between the edge plasmon generator and the optical wave-guide.
摘要翻译： 公开了三种结构及其制造方法，其改进磁写头中的TAMR特征的性能。 这种改进通过使边缘等离子体发生器和等离子体屏蔽之间的分离小于边缘等离子体发生器和光波导之间的间隔来实现。
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公开(公告)号：US20140293761A1
公开(公告)日：2014-10-02
申请号：US14303739
申请日：2014-06-13
发明人： Xuhui Jin , Hiroyuki Ito , Yoshitaka Sasaki , Shigeki Tanemura
IPC分类号： G11B5/48
CPC分类号： G02B6/105 , G02B2006/12173 , G02B2006/12176 , G11B5/314 , G11B5/4866 , G11B5/6088 , G11B2005/0021 , Y10T29/49032
摘要： A waveguide structure with a light polarization rotator section for converting transverse electric light from a TE light source to transverse magnetic light which is subsequently coupled to a plasmon generator (PG) is disclosed. Wavelengths above 800 nm are advantageously used to reduce resistive heating in the PG, and in adjacent cladding and write pole layers to improve the thermally assisted magnetic recording head lifetime. The light polarization rotator section has a length determined by TE LD light wavelength, and the effective mode index of the two orthogonal fundamental modes, and has curved portions to enable a greater length to accommodate longer TE light wavelengths without increasing the waveguide distance between the air bearing surface and back end of the device.
摘要翻译： 公开了一种具有光偏转旋转部分的波导结构，用于将TE光源的横向电光转换成后耦合到等离子体发生器（PG）的横向磁光。 高于800nm的波长有利地用于减少PG中的电阻加热，以及相邻的包层和写极层中的电阻加热，以改善热辅助磁记录头寿命。 光偏振旋转器部分具有由TE LD光波长确定的长度和两个正交基模的有效模式指数，并且具有弯曲部分以使得能够更长的长度以适应更长的TE光波长，而不增加空气之间的波导距离 轴承表面和后端。
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公开(公告)号：US08787129B1
公开(公告)日：2014-07-22
申请号：US13785280
申请日：2013-03-05
发明人： Xuhui Jin , Hiroyuki Ito , Yoshitaka Sasaki , Shigeki Tanemura
IPC分类号： G11B11/00
CPC分类号： G02B6/105 , G02B2006/12173 , G02B2006/12176 , G11B5/314 , G11B5/4866 , G11B5/6088 , G11B2005/0021 , Y10T29/49032
摘要： A waveguide structure with a light polarization rotator section for converting transverse electric light from a TE light source to transverse magnetic light which is subsequently coupled to a plasmon generator (PG) is disclosed. Wavelengths above 800 nm are advantageously used to reduce resistive heating in the PG, and in adjacent cladding and write pole layers to improve the thermally assisted magnetic recording head lifetime. The light polarization rotator section has a length determined by TE LD light wavelength, and the effective mode index of the two orthogonal fundamental modes, and preferably has a symmetric structure including a sloped side with a 45 degree angle with respect to a bottom surface. A vertical side of the light polarization rotator section may be coplanar with sides of adjacent waveguide sections. Offsets to the cross-track width are used to improve symmetry for higher TE to TM polarization conversion efficiency.
摘要翻译： 公开了一种具有光偏转旋转部分的波导结构，用于将TE光源的横向电光转换成后耦合到等离子体发生器（PG）的横向磁光。 高于800nm的波长有利地用于减少PG中的电阻加热，以及相邻的包层和写极层中的电阻加热，以改善热辅助磁记录头寿命。 光偏振旋转部具有通过TE LD光波长确定的长度和两个正交基模的有效模式指数，并且优选地具有包括相对于底面具有45度角的倾斜侧的对称结构。 光偏振旋转器部分的垂直侧可以与相邻波导部分的侧面共面。 用于跨轨道宽度的偏移用于改善对称性，以实现更高的TE至TM偏振转换效率。
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公开(公告)号：US08773803B2
公开(公告)日：2014-07-08
申请号：US13654490
申请日：2012-10-18
发明人： Xuhui Jin , Hiroyuki Ito , Shigeki Tanemura , Dayu Zhou
IPC分类号： G11B5/02
CPC分类号： G11B5/314 , G11B5/3163 , G11B2005/0021
摘要： Three structures, and processes for manufacturing them, that improve the performance of a TAMR feature in a magnetic write head are disclosed. This improvement is achieved by making the separation between the edge plasmon generator and the plasmon shield less than the separation between the edge plasmon generator and the optical wave-guide.
摘要翻译： 公开了三种结构及其制造方法，其改进磁写头中的TAMR特征的性能。 这种改进通过使边缘等离子体发生器和等离子体屏蔽之间的分离小于边缘等离子体发生器和光波导之间的间隔来实现。
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10.发明授权公开(公告)号：US11056282B2
公开(公告)日：2021-07-06
申请号：US16149883
申请日：2018-10-02
摘要： A capacitor includes a dielectric structure formed of a sintered dielectric, and a first electrode and a second electrode each formed of a conductor. The dielectric structure includes a wall. The first electrode and the second electrode are insulated from each other by the wall. The wall has a height which is a dimension in a first direction, and a thickness which is a dimension in a second direction orthogonal to the first direction, the height being greater than the thickness. The wall has a non-straight shape when seen in the first direction. A manufacturing method for the capacitor includes forming the dielectric structure, and forming the first electrode and the second electrode simultaneously after the formation of the dielectric structure.
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