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公开(公告)号：US20170176162A1
公开(公告)日：2017-06-22
申请号：US15451772
申请日：2017-03-07
发明人： Ruijun Li , Zhenying Cheng , Chen Chen , Kuangchao Fan
CPC分类号： G01B5/016 , G01B5/012 , G01B11/007 , G01D5/26 , G01D5/30
摘要： A single sensor type three-dimensional micro/nano contact trigger measuring probe is provided which is characterized in respectively providing a probe unit and a measuring unit in the base. In the probe unit, the leaf spring is supported on the circular-ring base, a circular suspension plate is provided on the leaf spring, and beam splitter prisms and wedge block are fixedly provided on the circular suspension plate. The stylus and the circular suspension plate are fixedly connected in a ‘T” shape. The measuring unit projects the straight light emitted by a laser device through the beam splitter prisms and wedge block and then the straight light is focused on the four-quadrant detector. Measuring the offset of the probe by the four-quadrant detector, in such a manner that single sensor type three-dimensional micrometer contact trigger measurement is achieved.
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公开(公告)号：US10209049B2
公开(公告)日：2019-02-19
申请号：US15587380
申请日：2017-05-04
发明人： Ruijun Li , Zhenying Cheng , Chen Chen , Kuangchao Fan
摘要： A fabrication and monitoring device for micro probe ball tips includes a magnetic field generator, a 3-dimensional displacement adjusting mechanism, a wire supplier and an image monitoring system. The magnetic field generator includes a U-shaped electromagnet. The 3-dimensional displacement adjusting mechanism includes a 2-dimensional moving platform, a 1-dimensional moving platform, a guiding tube, and a sparking plug. The wire supplier includes a transmission wheel, a pressing roller, a wire feeding roller and a tungsten wire material supplier. The image monitoring system includes a micro objective, a third-generation infinite beam structure lens and a supporting frame. The present invention overcomes an eccentric problem of a tungsten ball and a tungsten rod, and also overcomes a sphericity problem caused by gravity, so as to improve sphericity, eccentric accuracy and enable monitoring of dynamic manufacturing process of the probe ball tips.
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公开(公告)号：US20170232543A1
公开(公告)日：2017-08-17
申请号：US15587380
申请日：2017-05-04
发明人： Ruijun Li , Zhenying Cheng , Chen Chen , Kuangchao Fan
摘要： A fabrication and monitoring device for micro probe ball tips includes a magnetic field generator, a 3-dimensional displacement adjusting mechanism, a wire supplier and an image monitoring system. The magnetic field generator includes a U-shaped electromagnet. The 3-dimensional displacement adjusting mechanism includes a 2-dimensional moving platform, a 1-dimensional moving platform, a guiding tube, and a sparking plug. The wire supplier includes a transmission wheel, a pressing roller, a wire feeding roller and a tungsten wire material supplier. The image monitoring system includes a micro objective, a third-generation infinite beam structure lens and a supporting frame. The present invention overcomes an eccentric problem of a tungsten ball and a tungsten rod, and also overcomes a sphericity problem caused by gravity, so as to improve sphericity, eccentric accuracy and enable monitoring of dynamic manufacturing process of the probe ball tips.
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公开(公告)号：US10288403B2
公开(公告)日：2019-05-14
申请号：US15451772
申请日：2017-03-07
发明人： Ruijun Li , Zhenying Cheng , Chen Chen , Kuangchao Fan
摘要： A single sensor type three-dimensional micro/nano contact trigger measuring probe is provided which is characterized in respectively providing a probe unit and a measuring unit in the base. In the probe unit, the leaf spring is supported on the circular-ring base, a circular suspension plate is provided on the leaf spring, and beam splitter prisms and wedge block are fixedly provided on the circular suspension plate. The stylus and the circular suspension plate are fixedly connected in a “T” shape. The measuring unit projects the straight light emitted by a laser device through the beam splitter prisms and wedge block and then the straight light is focused on the four-quadrant detector. Measuring the offset of the probe by the four-quadrant detector, in such a manner that single sensor type three-dimensional micrometer contact trigger measurement is achieved.
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