专利检索 ap:("HEMLOCK SEMICONDUCTOR CORPORATION") AND inv:"Arvid Neil Arvidson" 第 1 页

1.

发明授权
Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods 有权

公开(公告)号：US09909231B2

公开(公告)日：2018-03-06

申请号：US14559331

申请日：2014-12-03

申请人： HEMLOCK SEMICONDUCTOR CORPORATION

发明人： Arvid Neil Arvidson , Terence Lee Horstman , Michael John Molnar , Chris Tim Schmidt , Roger Dale Spencer, Jr.

IPC分类号： C30B15/02 , C30B15/00 , C30B29/06 , C30B11/00 , C30B15/04 , B07B1/46 , B07B13/04

CPC分类号： C30B15/002 , B07B1/4654 , B07B13/04 , C30B11/001 , C30B11/003 , C30B15/02 , C30B15/04 , C30B29/06 , Y10T117/1056

摘要： A method for recharging a crucible with polycrystalline silicon comprises adding flowable chips to a crucible used in a Czochralski-type process. Flowable chips are polycrystalline silicon particles made from polycrystalline silicon prepared by a chemical vapor deposition process, and flowable chips have a controlled particle size distribution, generally nonspherical morphology, low levels of bulk impurities, and low levels of surface impurities. Flowable chips can be added to the crucible using conventional feeder equipment, such as vibration feeder systems and canister feeder systems.