公开(公告)号：US20040183016A1

公开(公告)日：2004-09-23

申请号：US10815817

申请日：2004-04-02

Applicant: HITACHI, LTD.

Inventor： Tetsuya Sawahata ,  Mitsugu Sato

IPC: H01J037/256

CPC classification number: H01J37/256 ,  G01N23/2252 ,  H01J37/141 ,  H01J2237/2561

Abstract: According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.

Abstract translation: 根据本发明，在具有透镜系统的扫描电子显微镜中，新提供将物镜的电流设定为零或弱激励状态的第一低倍率模式， 将物镜的电流设定为与加速电压的平方根成比例地变化的值的倍率模式。 扫描电子显微镜具有在第一低倍率模式下进行正常的样本图像（二次电子图像）观察的结构，并且当执行X射线分析时，将第一低倍率模式切换到第二低倍率模式 。 结果，可以以低倍率模式进行样本图像（二次电子图像）观察和X射线分析。

公开(公告)号：US20030189172A1

公开(公告)日：2003-10-09

申请号：US10406455

申请日：2003-04-04

Applicant: HITACHI, LTD.

Inventor： Tetsuya Sawahata ,  Mitsugu Sato

IPC: H01J037/28 ,  G01N023/225

CPC classification number: H01J37/256 ,  G01N23/2252 ,  H01J37/141 ,  H01J2237/2561

Abstract: According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.

Abstract translation: 根据本发明，在具有透镜系统的扫描电子显微镜中，新提供将物镜的电流设定为零或弱激励状态的第一低倍率模式， 将物镜的电流设定为与加速电压的平方根成比例地变化的值的倍率模式。 扫描电子显微镜具有在第一低倍率模式下进行正常的样本图像（二次电子图像）观察的结构，并且当执行X射线分析时，将第一低倍率模式切换到第二低倍率模式 。 结果，可以以低倍率模式进行样本图像（二次电子图像）观察和X射线分析。