公开(公告)号：US20190006146A1

公开(公告)日：2019-01-03

申请号：US15991034

申请日：2018-05-29

Applicant: Shimadzu Corporation

Inventor： Hiroshi SAKAMAE

IPC: H01J37/256 ,  G01N23/2252

CPC classification number: H01J37/256 ,  G01N23/2252 ,  G01N2223/402 ,  G01N2223/418 ,  G01N2223/605 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/24571 ,  H01J2237/2485 ,  H01J2237/2561

Abstract: An EDS 5 acquires first spectrum data by detecting an X-ray generated from a sample. A WDS 6 acquires second spectrum data by detecting the X-ray generated from the sample. A phase distribution map generation processing unit 11 generates a phase distribution map of a substance of the sample in a measurement region, on the basis of the first spectrum data acquired with respect to each pixel in the measurement region on a sample surface. A composition information acquisition processing unit 13 acquires element composition information of each phase, on the basis of the second spectrum data acquired with respect to a position on the sample corresponding to a representative pixel in the measurement region corresponding to each of the phases of the phase distribution map.

公开(公告)号：US20150213997A1

公开(公告)日：2015-07-30

申请号：US14684607

申请日：2015-04-13

Applicant: Carl Zeiss Microscopy, LLC

Inventor： Billy W. Ward ,  John A. Notte, IV ,  Louis S. Farkas, III ,  Randall G. Percival ,  Raymond Hill ,  Klaus Edinger ,  Lars Markwort ,  Dirk Aderhold ,  Ulrich Mantz

IPC: H01J37/08 ,  H01J37/304 ,  H01J37/305 ,  H01J37/256 ,  H01J37/317

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J27/26 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/256 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/08 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/31701 ,  H01J2237/3174 ,  H01J2237/3175 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：US20140326874A1

公开(公告)日：2014-11-06

申请号：US14279957

申请日：2014-05-16

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Albrecht Glasmachers ,  Alexander Laue ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Doemer

IPC: H01J37/26 ,  H01J49/10 ,  H01J37/28 ,  H01J3/26

CPC classification number: H01J37/265 ,  H01J3/26 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J49/063 ,  H01J49/065 ,  H01J49/10 ,  H01J2237/05 ,  H01J2237/2449 ,  H01J2237/2527

Abstract: An apparatus for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion and a particle beam device having an apparatus such as this are disclosed. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.

Abstract translation: 公开了一种用于将离子的能量传输到至少一个气体颗粒和/或用于输送离子的装置和具有这样的装置的粒子束装置。 特别地，提供一种容器，其中布置有气体颗粒的气体，其中容器具有输送轴线。 此外，提供沿着输送轴线布置的至少一个第一多极单元和至少一个第二多极单元。 第一多极单元和第二多极单元由印刷电路板形成。 此外，提供了一种电子电路，其为每个多极单元提供电势，使得产生电位梯度，特别是沿输送轴。

公开(公告)号：US08618520B2

公开(公告)日：2013-12-31

申请号：US13547942

申请日：2012-07-12

Applicant: Mitsuo Tokuda ,  Muneyuki Fukuda ,  Yasuhiro Mitsui ,  Hidemi Koike ,  Satoshi Tomimatsu ,  Hiroyasu Shichi ,  Hideo Kashima ,  Kaoru Umemura

Inventor： Mitsuo Tokuda ,  Muneyuki Fukuda ,  Yasuhiro Mitsui ,  Hidemi Koike ,  Satoshi Tomimatsu ,  Hiroyasu Shichi ,  Hideo Kashima ,  Kaoru Umemura

IPC: G21K5/00

CPC classification number: H04L29/06 ,  G01N23/225 ,  H01J37/256 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/202 ,  H01J2237/31745 ,  H04L67/16 ,  H04L69/329

Abstract: An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.

公开(公告)号：US20130087706A1

公开(公告)日：2013-04-11

申请号：US13699975

申请日：2011-04-29

Applicant: Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

Inventor： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC: H01J37/244

CPC classification number: H01J37/244 ,  H01J37/023 ,  H01J37/228 ,  H01J37/256 ,  H01J37/26 ,  H01J2237/024 ,  H01J2237/2482

Abstract: The invention relates to a cathodoluminescence detection system comprising: a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting said radiation (108) onto analysis means, said collecting optic (112) being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means (316) for adapting the light radiation, placed downstream of the collecting optic (112) and designed to adapt said light radiation (108) at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means (316) is placed in an environment where the pressure is higher than the pressure in said vacuum chamber.

Abstract translation: 本发明涉及一种阴极发光检测系统，包括：收集光学元件（112），其从由带电粒子束照射的样品收集光辐射（108），并将所述辐射（108）反射到分析装置上，所述收集光学元件（112） 放置在称为真空室的室中，其中压力低于大气压; 以及用于使放置在聚光镜（112）下游的光辐射的装置（316），并被设计成使分析装置的入口处的所述光辐射（108）适应。 所述系统的特征在于，全部或部分适应装置（316）被置于压力高于所述真空室中的压力的​​环境中。

公开(公告)号：US08164058B2

公开(公告)日：2012-04-24

申请号：US12501822

申请日：2009-07-13

Applicant: Eiko Nakazawa ,  Masahiro Tomita ,  Hiroyuki Kobayashi

Inventor： Eiko Nakazawa ,  Masahiro Tomita ,  Hiroyuki Kobayashi

IPC: G21K7/00

CPC classification number: G01N23/2252 ,  H01J37/222 ,  H01J37/226 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2807

Abstract: It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.

Abstract translation: 本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域 在带电粒子束装置中，其代表是电子显微镜。 在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置 通过用带电粒子束照射检测X射线。

公开(公告)号：US20120025077A1

公开(公告)日：2012-02-02

申请号：US13247979

申请日：2011-09-28

Applicant: Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

Inventor： Hubert Mantz ,  Rainer Arnold ,  Michael Albiez

IPC: H01J37/26

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/222 ,  H01J37/244 ,  H01J37/256

Abstract: A particle beam system comprises a particle beam source 5 for generating a primary particle beam 13, an objective lens 19 for focusing the primary particle beam 13 in an object plane 23; a particle detector 17; and an X-ray detector 47 arranged between the objective lens and the object plane. The X-ray detector comprises plural semiconductor detectors, each having a detection surface 51 oriented towards the object plane. A membrane is disposed between the object plane and the detection surface of the semiconductor detector, wherein different semiconductor detectors have different membranes located in front, the different membranes differing with respect to a secondary electron transmittance.

Abstract translation: 粒子束系统包括用于产生一次粒子束13的粒子束源5，用于将一次粒子束13聚焦在物平面23中的物镜19; 粒子检测器17; 以及布置在物镜和物平面之间的X射线检测器47。 X射线检测器包括多个半导体检测器，每个半导体检测器具有朝向物体平面的检测表面51。 膜位于物体平面和半导体检测器的检测表面之间，其中不同的半导体检测器具有位于前面的不同的膜，不同的膜相对于二次电子透射率不同。

公开(公告)号：US08053724B2

公开(公告)日：2011-11-08

申请号：US12816218

申请日：2010-06-15

Applicant: Pranab Sabitru Naik ,  Christopher David Beling ,  Stevenson H. Y. Fung

Inventor： Pranab Sabitru Naik ,  Christopher David Beling ,  Stevenson H. Y. Fung

IPC: H01J37/256 ,  G01N23/22

CPC classification number: H01J37/256 ,  H01J2237/06391

Abstract: An instrumentation setup is provided to process electronic signals in a positron imager functioning in two different modes of operations for scanning both bulk and thin film materials. According to one part of an implementation, an instrumentation setup comprises an XY-rastering stepper motor apparatus coupled with LVDTs (Linear Variable Differential Transformers), and nuclear signal processing and high speed data acquisition sections. Imaging of bulk material samples may be enabled by scanning a positron point source across a surface of samples. In another part of the irnplenientation, the instrumentation setup may comprise an electromagnetic deflection control arrangement in conjunction with a guided monoenergetic positron beam together with nuclear signal processing and data acquisition arrangements. This part of the implementation may scan and produce images for thin film samples. The instrumentation setup is capable of producing high quality real-time S-parameter images.

Abstract translation: 提供了一种仪器设置来处理正电子成像器中的电子信号，该正电子成像器在两种不同的操作模式中工作，用于扫描体薄膜材料和薄膜材料。 根据实施方案的一部分，仪器设置包括与LVDT（线性可变差分变压器）耦合的XY扫描步进电机装置，以及核信号处理和高速数据采集部分。 散装材料样品的成像可以通过在样品表面上扫描正电子点源来实现。 在不平衡的另一部分中，仪器设置可以包括结合导向的单能正电子束和核信号处理和数据采集装置的电磁偏转控制装置。 这部分实现可以扫描和产生薄膜样品的图像。 仪器设置能够产生高质量的实时S参数图像。

公开(公告)号：US20110168889A1

公开(公告)日：2011-07-14

申请号：US13002448

申请日：2009-07-02

Applicant: Dov Shachal ,  Rafi De Picciotto

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: G01N23/04 ,  G01N23/00

CPC classification number: G01N23/22 ,  G01N2223/079 ,  G01N2223/08 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/208 ,  H01J2237/244 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US20110064191A1

公开(公告)日：2011-03-17

申请号：US12853998

申请日：2010-08-10

Applicant: Milos Toth ,  Michael R. Scheinfein ,  Eric Silver ,  David Narum

Inventor： Milos Toth ,  Michael R. Scheinfein ,  Eric Silver ,  David Narum

IPC: G01N23/083

CPC classification number: G01N23/20033 ,  H01J37/244 ,  H01J37/256 ,  H01J2237/2442

Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.

Abstract translation: 改进的微量热计式能量色散X射线光谱仪为低电子束能量下样品的实际高空间分辨率X射线成像提供了足够的能量分辨率和通量。 当与提供从样品中蚀刻层的能力的双光束系统一起使用时，该系统可用于三维x射线映射。 优选的系统使用具有广角开口的x射线光学器件来增加离开检测器的样品的X射线的分数，以及多个检测器以避免脉冲堆积。