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公开(公告)号：US12125176B2
公开(公告)日：2024-10-22
申请号：US17749331
申请日：2022-05-20
Applicant: Hitachi High-Tech Corporation
Inventor： Kosuke Fukuda , Masayoshi Ishikawa , Yasuhiro Yoshida , Hiroyuki Shindo
CPC classification number: G06T5/70 , G06T3/40 , G06T7/001 , G06T7/62 , G06T2207/10061 , G06T2207/20081 , G06T2207/30148 , G06T2207/30168
Abstract: An inspection apparatus includes an image distortion estimation unit that estimates a distortion amount between a reference image and an inspection image, an image distortion correction unit that corrects the inspection image and/or the reference image using an estimated distortion amount, and an inspection unit that performs inspection using a corrected inspection image and the reference image or the inspection image and a corrected reference image. The image distortion estimation unit estimates a distortion amount in which only distortion occurring in an entire image can be corrected by adjustment of a correction condition.
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公开(公告)号：US11899437B2
公开(公告)日：2024-02-13
申请号：US17907921
申请日：2020-03-30
Applicant: Hitachi High-Tech Corporation
Inventor： Fumihiro Sasajima , Masami Takano , Kazuhiro Ueda , Masayoshi Ishikawa , Yasuhiro Yoshida
IPC: G05B23/02
CPC classification number: G05B23/024 , G05B23/0264
Abstract: The present disclosure proposes a diagnostic system capable of properly identifying the cause of even an error for which multiple factors or multiple compound factors may be accountable. The diagnostic system according to the present disclosure is provided with a learning device for learning at least one of a recipe defining operations of an inspection device, log data describing states of the device, or specimen data describing characteristics of a specimen in association with error types of the device, and estimates the cause of the error by using the learning device (refer to FIG. 4).
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公开(公告)号：US11836906B2
公开(公告)日：2023-12-05
申请号：US17503438
申请日：2021-10-18
Applicant: Hitachi High-Tech Corporation
Inventor： Shinichi Shinoda , Yasutaka Toyoda , Shigetoshi Sakimura , Masayoshi Ishikawa , Hiroyuki Shindo , Hitoshi Sugahara
IPC: G06T7/00 , G06V10/772 , G06V10/774 , G06V10/98
CPC classification number: G06T7/0002 , G06V10/772 , G06V10/774 , G06V10/98 , G06T2207/20081
Abstract: An object of the present invention is to achieve both suppression of data amount of an image processing system that learns a collation image to be used for image identification using a discriminator and improvement of identification performance of the discriminator. In order to achieve the above object, there is proposed an image processing system including a discriminator that identifies an image using a collation image, the image processing system further including a machine learning engine that performs machine learning of collation image data required for image identification. The machine learning engine searches for a successfully identified image using an image for which identification has been failed, and adds information, obtained based on a partial image of the image for which identification has been failed and which has been selected by an input device to the successfully identified image obtained by the search to generate corrected collation image data.
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Patent Agency Ranking
公开(公告)号：US12174245B2
公开(公告)日：2024-12-24
申请号：US17634809
申请日：2019-09-06
Applicant: Hitachi High-Tech Corporation
Inventor： Kouichi Hayakawa , Masami Takano , Kazuhiro Ueda , Masayoshi Ishikawa , Yasuhiro Yoshida
Abstract: An objective of the present invention is to provide a system which can infer the cause of a recipe error and present a correction candidate for the recipe error. A recipe information presentation system or recipe error inference system according to the present invention: causes a learner to learn a correspondence between a recipe and an error originating from the recipe; and acquires from the learner an inference result as to whether the error occurs when a new recipe is used (refer to FIG. 1).
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公开(公告)号：US10937146B2
公开(公告)日：2021-03-02
申请号：US16252061
申请日：2019-01-18
Applicant: Hitachi High-Tech Corporation
Inventor： Shinichi Shinoda , Masayoshi Ishikawa , Yasutaka Toyoda , Yuichi Abe , Hiroyuki Shindo
Abstract: The image evaluation device includes a design data image generation unit that images design data; a machine learning unit that creates a model for generating a design data image from an inspection target image, using the design data image as a teacher and using the inspection target image corresponding to the design data image; a design data prediction image generation unit that predicts the design data image from the inspection target image, using the model created by the machine learning unit; a design data image generation unit that images the design data corresponding to the inspection target image; and a comparison unit that compares a design data prediction image generated by the design data prediction image generation unit and the design data image. As a result, it is possible to detect a systematic defect without using a defect image and generating misinformation frequently.
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公开(公告)号：US12141173B2
公开(公告)日：2024-11-12
申请号：US18024930
申请日：2020-09-17
Applicant: Hitachi High-Tech Corporation
Inventor： Yasuhiro Yoshida , Masayoshi Ishikawa , Fumihiro Sasajima , Masami Takano , Koichi Hayakawa
Abstract: An error cause estimation device comprising: a data pre-processing unit that uses data to be processed and generates training data that has an appropriate format for input to a machine learning model; and a model tree generation unit that generates error detection models that are training models for detecting errors and uses the training data as inputs therefor, and generates a model tree that expresses the relationship between error detection models by using a tree structure that has the error detection models as node therefor. Thus, it is possible to generate a training model that detects errors for each of a plurality of types of errors that occur, even when there has been no prior annotation of error causes.
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公开(公告)号：US20230402249A1
公开(公告)日：2023-12-14
申请号：US18318300
申请日：2023-05-16
Applicant: Hitachi High-Tech Corporation
Inventor： Yasuhiro YOSHIDA , Masayoshi Ishikawa , Toshinori Yamauchi , Kosuke Fukuda , Hiroyuki Shindo
CPC classification number: H01J37/222 , H01J37/28 , G06T7/001 , H01J2237/2817 , H01J2237/221 , G06T2207/20081
Abstract: A defect inspection apparatus includes: a feature value calculation unit calculating a feature value based on a captured image of a sample; an image information reduction unit generating a latent variable by reducing an information quantity of the feature value; a statistic value estimation unit estimating an image statistic value that can be taken by a normal image based on the latent variable; and a defect detection unit detecting a defect in an inspection image based on the image statistic value and the inspection image of the sample.
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公开(公告)号：US11189470B2
公开(公告)日：2021-11-30
申请号：US16287679
申请日：2019-02-27
Applicant: HITACHI HIGH-TECH CORPORATION
Inventor： Takeshi Ohmori , Hyakka Nakada , Naoyuki Kofuji , Masayoshi Ishikawa , Masaru Kurihara
IPC: G05B19/4155 , H01J37/32 , G06N5/02 , H01L21/67
Abstract: The efficiency of operation in a semiconductor processing apparatus is improved. In order to search an input parameter value to be set in a semiconductor processing apparatus for processing into a target processed shape, a predictive model indicating a relationship between an input parameter value and an output parameter value is generated based on the input parameter value and the output parameter value which is a measured value of a processing result processed by setting the input parameter value in the semiconductor processing apparatus. In this case, when the measured value of the processing result processed by the semiconductor processing apparatus is the defective data, the predictive model is generated based on the input parameter value causing defective data and defective substitute data obtained by substituting the measured value which is the defective data.
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