公开(公告)号：US11482398B2

公开(公告)日：2022-10-25

申请号：US17028488

申请日：2020-09-22

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Haruyuki Ishii ,  Atsushi Uemoto ,  Tatsuya Asahata

IPC: H01J37/20 ,  H01J37/28

Abstract: The focused ion beam apparatus includes: an electron beam column; a focused ion beam column; a sample stage; a coordinate acquisition unit configured to acquire, when a plurality of irradiation positions to which the focused ion beam is to be applied are designated on a sample, plane coordinates of each of the irradiation positions; a movement amount calculation unit configured to calculate, based on the plane coordinates, a movement amount by which the sample stage is to be moved to a eucentric height so that the eucentric height matches an intersection position at which the electron beam and the focused ion beam match each other at each of the irradiation positions; and a sample stage movement control unit configured to move, based on the movement amount, the sample stage to the eucentric height at each of the irradiation positions.

公开(公告)号：US11133149B2

公开(公告)日：2021-09-28

申请号：US17028381

申请日：2020-09-22

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshihiro Mochizuki ,  Haruyuki Ishii ,  Atsushi Uemoto

IPC: H01J37/22 ,  H01J37/20 ,  H01J37/10

Abstract: A focused ion beam apparatus (100) includes: a focused ion beam lens column (20); a sample table (51); a sample stage (50); a memory (6M) configured to store in advance three-dimensional data on the sample table and an irradiation axis of the focused ion beam, the three-dimensional data being associated with stage coordinates of the sample stage; a display (7); and a display controller (6A) configured to cause the display to display a virtual positional relationship between the sample table (51v) and the irradiation axis (20Av) of the focused ion beam, which is exhibited when the sample stage is operated to move the sample table to a predetermined position, based on the three-dimensional data on the sample table and the irradiation axis of the focused ion beam.