公开(公告)号：US10134564B2

公开(公告)日：2018-11-20

申请号：US15527562

申请日：2015-11-26

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Taiga Okumura ,  Takashi Ohshima ,  Yuusuke Oominami ,  Minami Shouji ,  Akiko Hisada ,  Akio Yoneyama

IPC: H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

Abstract: Provided is a charged particle beam device including a charged particle optical column that irradiates a specimen with a primary charged particle beam, and a specimen base rotating unit that is capable of rotating the specimen base in a state of an angle formed by a surface of the specimen base and an optical axis of the primary charged particle beam being inclined to a non-perpendicular angle, in which the specimen base is configured to include a detecting element that detects a charged particle scattered or transmitted inside the specimen, and transmitted charged particle images of the specimen corresponding to each angle is acquired by irradiating the specimen in a state of the specimen base rotating unit being rotated at a plurality of different angles.