公开(公告)号：US20190157053A1

公开(公告)日：2019-05-23

申请号：US15902837

申请日：2018-02-22

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Ryoichi ISOMURA ,  Yuusaku SAKKA ,  Kouhei SATOU ,  Takashi UEMURA ,  Satoshi YAMAMOTO ,  Hiromichi KAWASAKI

IPC: H01J37/32 ,  H01L21/677 ,  H01J37/18 ,  H01J37/34 ,  H01L21/67 ,  H01L21/687

Abstract: There is provided a vacuum processing apparatus in which at least one of the processing units includes a lower member and an upper member mounted on the lower member to be attachable and detachable that configure the vacuum container, a turning shaft member which is attached to an outer circumferential part of the base plate between the work space and the vacuum container, and has a turning shaft that moves from above the base plate when the turning shaft is connected to the lower member and the lower member turns around the connected part, and a maintenance member including an arm which is disposed above the turning shaft member and turns in a horizontal direction as the upper member is suspended, and in which the lower member is configured to be fixable at the position at a predetermined angle within a range of an angle at which the lower member is capable of turning around the shaft, and to be vertically movable as the arm of the maintenance member fixes the position above a center portion of the lower member of which the position is fixed within a range of the angle at which the lower member is capable of turning, and the upper member is suspended.