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公开(公告)号：US20130037974A1
公开(公告)日：2013-02-14
申请号：US13633045
申请日：2012-10-01
发明人： Ichiro Nishikawa , Takeshi Kawano
CPC分类号： B01F3/04021 , B01F5/0451 , B01F5/0463 , B01F5/0615 , C23C16/4481
摘要： A liquid material vaporizer comprises a gas-liquid mixing section for mixing a liquid material and a carrier gas to generate a gas-liquid mixture, and a heating type vaporizing section for vaporizing the gas-liquid mixture from the gas-liquid mixing section and exhausting outside the gas generated by the vaporization with assistance of the carrier gas, wherein the vaporizing section is configured with an arrangement of one or a plurality of flat plates formed in a spiral shape by an inwardly twisting path. Such an arrangement provides an excellent liquid material vaporizer capable of, even if a liquid material composed of a plurality of materials having different boiling points is vaporized, preventing a residue from being generated, and performing the vaporization in a preferable manner.
摘要翻译： 液体蒸发器包括用于混合液体材料和载气以产生气液混合物的气液混合部分，以及用于从气液混合部分蒸发气液混合物的加热型蒸发部分， 在由载气辅助下通过汽化产生的气体外部，其中蒸发部分被构造成通过向内的扭转路径形成为螺旋形状的一个或多个平板的布置。 这种布置提供了一种优良的液体材料蒸发器，即使由具有不同沸点的多种材料组成的液体材料蒸发也能够防止产生残留物，并且以优选的方式进行蒸发。
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公开(公告)号：US08755679B2
公开(公告)日：2014-06-17
申请号：US13633045
申请日：2012-10-01
发明人： Ichiro Nishikawa , Takeshi Kawano
IPC分类号： F24H1/18
CPC分类号： B01F3/04021 , B01F5/0451 , B01F5/0463 , B01F5/0615 , C23C16/4481
摘要： A liquid material vaporizer comprises a gas-liquid mixing section for mixing a liquid material and a carrier gas to generate a gas-liquid mixture, and a heating type vaporizing section for vaporizing the gas-liquid mixture from the gas-liquid mixing section and exhausting outside the gas generated by the vaporization with assistance of the carrier gas, wherein the vaporizing section is configured with an arrangement of one or a plurality of flat plates formed in a spiral shape by an inwardly twisting path. Such an arrangement provides an excellent liquid material vaporizer capable of, even if a liquid material composed of a plurality of materials having different boiling points is vaporized, preventing a residue from being generated, and performing the vaporization in a preferable manner.
摘要翻译： 液体蒸发器包括用于混合液体材料和载气以产生气液混合物的气液混合部分，以及用于从气液混合部分蒸发气液混合物的加热型蒸发部分， 在由载气辅助下通过汽化产生的气体外部，其中蒸发部分被构造成通过向内的扭转路径形成为螺旋形状的一个或多个平板的布置。 这种布置提供了一种优良的液体材料蒸发器，即使由具有不同沸点的多种材料组成的液体材料蒸发也能够防止产生残留物，并且以优选的方式进行蒸发。
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