摘要:
The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
摘要翻译:本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。 该方法包括使八氯环戊烯与KF连续反应,并纯化粗八氟环戊烯。 在反应步骤中,平行安装两个带有KF的过滤器,并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。 在纯化步骤中,除去沸点低于八氟环戊烯的有机物,分离沸点高于八氟环戊烯的金属成分和有机物,以回收作为气体的八氟环戊烯。 气态八氟环戊烯组合物含有99.995体积%以上的C 5 C 5 N 8 N 8,50体积ppm以下的氮,5重量%的氧 体积ppm以下的水,5体积ppm以下的水,5重量ppm以下的金属成分。
摘要:
The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
摘要翻译:本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。 该方法包括使八氯环戊烯与KF连续反应,并纯化粗八氟环戊烯。 在反应步骤中,平行安装两个带有KF的过滤器,并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。 在纯化步骤中,除去沸点低于八氟环戊烯的有机物,分离沸点高于八氟环戊烯的金属成分和有机物,以回收作为气体的八氟环戊烯。 气态八氟环戊烯组合物含有99.995体积%以上的C 5 C 5 N 8 N 8,50体积ppm以下的氮,5重量%的氧 体积ppm以下的水,5体积ppm以下的水,5重量ppm以下的金属成分。
摘要:
The invention is a method for continuously preparing highly pure octafluorocyclopentene for use in dry-etching processes. The method includes reacting octachlorocyclopentene with KF in a continuous manner, and purifying crude octafluorocyclopentene. In the reacting step, two KF-charged filters are installed in parallel and allowed to communicate with a reactor containing octachlorocyclopentene in an alternating manner to produce crude octafluorocyclopentene. In the purifying step, organics having lower boiling points than octafluorocyclopentene are removed, and metal ingredients and organics having boiling points higher than octafluorocyclopentene are separated to recover octafluorocyclopentene as a gas. The gaseous octafluorocyclopentene composition contains C5F8 in an amount of 99.995 vol % or higher, nitrogen in an amount of 50 vol ppm or less, oxygen in an amount of 5 vol ppm or less, water in an amount of 5 vol ppm or less, and metal ingredients in an amount of 5 wt ppb or less.
摘要翻译:本发明是用于连续制备用于干蚀刻工艺的高纯度八氟环戊烯的方法。 该方法包括使八氯环戊烯与KF连续反应,并纯化粗八氟环戊烯。 在反应步骤中,平行安装两个带有KF的过滤器,并使其与含有八氯环戊烯的反应器以交替方式连通以产生粗制八氟环戊烯。 在纯化步骤中,除去沸点低于八氟环戊烯的有机物,分离沸点高于八氟环戊烯的金属成分和有机物,以回收作为气体的八氟环戊烯。 气态八氟环戊烯组合物含有99.995体积%以上的C 5 C 5 N 8 N 8,50体积ppm以下的氮,5重量%的氧 体积ppm以下的水,5体积ppm以下的水,5重量ppm以下的金属成分。
摘要:
A remote controller having an echo function is disclosed, which comprises an echo circuit which includes an echo IC and an echo volume switch, with the echo IC being designed to amplify and circulate voice signals for generating echo, and with the echo circuit being connected with the microphone driving unit, the voice amplifier and the mixer circuit, respectively. In the remote controller, a user's voice and an external sound from an audio apparatus are outputted based on an echo effect when a user practices language or singing.