IN-LIQUID-SUBSTANCE DETECTION SENSOR
    1.
    发明申请
    IN-LIQUID-SUBSTANCE DETECTION SENSOR 有权
    液体物质检测传感器

    公开(公告)号:US20090320574A1

    公开(公告)日:2009-12-31

    申请号:US12555894

    申请日:2009-09-09

    IPC分类号: G01N29/02

    摘要: An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.

    摘要翻译: 实现尺寸减小和检测精度提高的液体内物质检测传感器包括压电基板,设置在压电基板的一个主表面上的至少两个SAW器件,每个具有限定感测部分的至少一个IDT电极,外部电极 设置在压电基板的另一个主表面上,并且通过延伸穿过压电基板的通孔电连接到SAW器件,设置在压电基板的一个主表面上以便包围SAW器件的通道限定元件和区域 将所述SAW器件彼此连接,由此限定通道的侧壁,以及保护构件,其与所述压电基板的所述一个主表面接合,并且所述通道限定构件插入其间,从而密封所述通道,所述保护构件具有至少两个 通道与通道相通。