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公开(公告)号：US20090080085A1
公开(公告)日：2009-03-26
申请号：US11860309
申请日：2007-09-24
Applicant: Hako BOTMA
Inventor： Hako BOTMA
IPC: G02B27/10
CPC classification number: G02B27/144 , G02B17/004
Abstract: Apparatus and methods are used for controlling electromagnetic radiation pulse duration in a lithographic apparatus. A dividing element is arranged to divide an electromagnetic radiation pulse into a first portion and a second portion. A prism receives, refracts, and subsequently emits the first portion of the electromagnetic radiation pulse. A directing element is arranged to direct the first and second portions of the electromagnetic radiation pulse parallel to a common optical axis. The first portion combines with the second portion to form a combined radiation beam pulse. The combined radiation beam pulse has a longer pulse duration than the divided electromagnetic pulse and experiences no corresponding loss in intensity.
Abstract translation: 设备和方法用于控制光刻设备中的电磁辐射脉冲持续时间。 分隔元件布置成将电磁辐射脉冲分成第一部分和第二部分。 棱镜接收，折射并随后发射电磁辐射脉冲的第一部分。 引导元件布置成引导电磁辐射脉冲的第一和第二部分平行于共同的光轴。 第一部分与第二部分组合以形成组合的辐射束脉冲。 组合的辐射束脉冲具有比分割的电磁脉冲更长的脉冲持续时间，并且没有经历相应的强度损失。
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公开(公告)号：US20110149255A1
公开(公告)日：2011-06-23
申请号：US12893577
申请日：2010-09-29
IPC: G03B27/52
CPC classification number: G03F7/7085 , G03F7/70191 , G03F7/70525 , G03F7/70575
Abstract: A lithographic apparatus is provided with a sensor. The sensor comprises a frame that defines a space that is crossed multiple times by wire. Detection electronics are connected to the wire and configured to detect a change of temperature of the wire due to infrared radiation being incident upon the wire. The detection electronics are further configured to provide an output signal in the event that a change of temperature of the wire is detected.
Abstract translation: 光刻设备设置有传感器。 该传感器包括一个框架，该框架限定通过电线多次交叉的空间。 检测电子装置连接到导线并被配置为检测由于红外辐射入射在导线上的导线的温度变化。 检测电子设备还被配置为在检测到线的温度变化的情况下提供输出信号。
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