公开(公告)号：US20100020332A1

公开(公告)日：2010-01-28

申请号：US12459751

申请日：2009-07-07

申请人： Hans-Artur Boesser ,  Siegfried Peter Kluge ,  Joerg Lenz ,  Gerhard Joseph Nickel

发明人： Hans-Artur Boesser ,  Siegfried Peter Kluge ,  Joerg Lenz ,  Gerhard Joseph Nickel

IPC分类号： G01B11/14

CPC分类号： G01B9/02027 ,  G01B9/02021 ,  G01B11/03 ,  G01B21/042 ,  G01B2290/25 ,  G01B2290/60 ,  G01B2290/70

摘要： An interferometric device for position measurement of an element moveable in a plane is disclosed. A laser light source measures the position of the moveable element and emits the required measuring light. A beam splitter splits the measuring light into a first partial beam path and a second partial beam path, which each impinge on a reflecting surface of the moveable element via an interferometer. Herein, at least the beam splitter, which splits the measuring light into a first partial beam path and a second partial beam path, and the beam splitter, which directs the third partial beam path onto an etalon via an interferometer, have a respective beam trap associated with them, which traps the light returning from the respective interferometers.

摘要翻译： 公开了一种用于在平面中可移动的元件的位置测量的干涉测量装置。 激光源测量可移动元件的位置并发射所需的测量光。 分束器将测量光分成第一部分光束路径和第二局部光束路径，每个光束路径经由干涉仪撞击可移动元件的反射表面。 这里，至少将测量光分成第一部分光束路径和第二部分光束路径的分束器以及将第三部分光束路径经由干涉仪引导到标准具上的分束器具有相应的光束捕获器 与它们相关联，其捕获从各个干涉仪返回的光。

公开(公告)号：US08351049B2

公开(公告)日：2013-01-08

申请号：US12459751

申请日：2009-07-07

申请人： Hans-Artur Boesser ,  Siegfried Peter Kluge ,  Joerg Lenz ,  Gerhard Joseph Nickel

发明人： Hans-Artur Boesser ,  Siegfried Peter Kluge ,  Joerg Lenz ,  Gerhard Joseph Nickel

IPC分类号： G01B11/02

CPC分类号： G01B9/02027 ,  G01B9/02021 ,  G01B11/03 ,  G01B21/042 ,  G01B2290/25 ,  G01B2290/60 ,  G01B2290/70

摘要： An interferometric device for position measurement of an element moveable in a plane is disclosed. A laser light source measures the position of the moveable element and emits the required measuring light. A beam splitter splits the measuring light into a first partial beam path and a second partial beam path, which each impinge on a reflecting surface of the moveable element via an interferometer. Herein, at least the beam splitter, which splits the measuring light into a first partial beam path and a second partial beam path, and the beam splitter, which directs the third partial beam path onto an etalon via an interferometer, have a respective beam trap associated with them, which traps the light returning from the respective interferometers.

摘要翻译： 公开了一种用于在平面中可移动的元件的位置测量的干涉测量装置。 激光源测量可移动元件的位置并发射所需的测量光。 分束器将测量光分成第一部分光束路径和第二局部光束路径，每个光束路径经由干涉仪撞击可移动元件的反射表面。 这里，至少将测量光分成第一部分光束路径和第二部分光束路径的分束器以及将第三部分光束路径经由干涉仪引导到标准具上的分束器具有相应的光束捕获器 与它们相关联，其捕获从各个干涉仪返回的光。