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公开(公告)号：US12111453B1
公开(公告)日：2024-10-08
申请号：US18424711
申请日：2024-01-26
Applicant: Harbin Institute of Technology
Inventor： Jian Liu , Chenguang Liu , Chongliang Zou , Zijie Hua
CPC classification number: G02B21/0032 , G02B21/0036 , G02B21/006 , G02B21/0068 , G02B21/18
Abstract: Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately. Difference values of scattering signals under separate illumination of the radially polarized signal light and the azimuthally polarized signal light are analyzed, and super-resolution detection imaging can be performed on the three-dimensional distribution information of defects such as subsurface scratches, and abrasion.
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2.发明公开公开(公告)号：US20240310613A1
公开(公告)日：2024-09-19
申请号：US18424711
申请日：2024-01-26
Applicant: Harbin Institute of Technology
Inventor： Jian Liu , Chenguang Liu , Chongliang Zou , Zijie Hua
CPC classification number: G02B21/0032 , G02B21/0036 , G02B21/006 , G02B21/0068 , G02B21/18
Abstract: Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately. Difference values of scattering signals under separate illumination of the radially polarized signal light and the azimuthally polarized signal light are analyzed, and super-resolution detection imaging can be performed on the three-dimensional distribution information of defects such as subsurface scratches, and abrasion.
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