公开(公告)号：US12204081B1

公开(公告)日：2025-01-21

申请号：US18812680

申请日：2024-08-22

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Zijie Hua ,  Xiaoyu You

IPC: G02B21/00 ,  G02B21/26

Abstract: This application relates to the technical field of confocal microscopy measurement and provides a dark-field confocal microscopy measurement apparatus and method based on time-varying fractional-order vortex demodulation. The apparatus includes a time-varying modulated illumination module, an optical scanning module, a signal collection and demodulation module, a function generator, and a sample platform. The function generator is separately connected with. The time-varying modulated illumination module is configured to emit fractional-order vortex light to the optical scanning module. The optical scanning module is configured to transmit the fractional-order vortex light to the to-be-measured sample on the sample platform and transmit a reflected light signal to the signal collection and demodulation module. The signal collection and demodulation module is configured to collect the reflected light signal, and perform dark-field confocal detection on the reflected light signal based on a reference signal, to obtain measurement information of the to-be-measured sample.

公开(公告)号：US12196686B1

公开(公告)日：2025-01-14

申请号：US18813695

申请日：2024-08-23

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Zijie Hua ,  Xiaoyu You

IPC: G01N21/88 ,  G01N21/95 ,  G02B21/00 ,  G02B21/10

Abstract: This application provides a vortex dichroism dark-field confocal microscopy measurement apparatus based on spiral transformation. An opposite-order vortex beam generation module is configured to generate a mixed vortex beam, a sample scanning module is configured to irradiate a scanning position of a to-be-measured sample by using the mixed vortex beam, to obtain a sample reflection beam. A spiral transformation module is configured to spatially separate the sample reflection beam to obtain spatially separated beams. A multi-order detection module is configured to detect the spatially separated beams to obtain a vortex dichroism signal at the scanning position. When the scanning position of the to-be-measured sample is defect-free, the vortex dichroism signal is zero. Conversely, when defects are present at the scanning position, the vortex dichroism signal is non-zero. The positive and negative the vortex dichroism signal respectively correspond to the left-handed and right-handed chirality of the defects.

公开(公告)号：US12203867B1

公开(公告)日：2025-01-21

申请号：US18802309

申请日：2024-08-13

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Zijie Hua ,  Kang Gu

IPC: G01N21/88 ,  G01R31/311

Abstract: Provided are a dark-field confocal microscopy measurement apparatus and method. The apparatus includes: a fractional vortex beam module configured to generate first fractional vortex beam and second fractional vortex beam; an optical scanning module configured to scan a sample by using the first fractional vortex beam and the second fractional vortex beam to obtain first signal return light and second signal return light respectively; a dark-field detection module configured to perform dark-field detection on the first signal return light and the second signal return light to obtain a first fractional-order dark-field image and a second fractional-order dark-field image respectively; a differential dark-field scattered image determining module configured to differentiate the first fractional-order dark-field image from the second fractional-order dark-field image to obtain a differential dark-field scattered image; and a defect determining module configured to process the differential dark-field scattered image to obtain a sample defect.

公开(公告)号：US12111453B1

公开(公告)日：2024-10-08

申请号：US18424711

申请日：2024-01-26

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Chongliang Zou ,  Zijie Hua

IPC: G02B21/00 ,  G02B21/18

CPC classification number: G02B21/0032 ,  G02B21/0036 ,  G02B21/006 ,  G02B21/0068 ,  G02B21/18

Abstract: Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately. Difference values of scattering signals under separate illumination of the radially polarized signal light and the azimuthally polarized signal light are analyzed, and super-resolution detection imaging can be performed on the three-dimensional distribution information of defects such as subsurface scratches, and abrasion.

公开(公告)号：US12216264B2

公开(公告)日：2025-02-04

申请号：US18739866

申请日：2024-06-11

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Zijie Hua

IPC: G02B21/00 ,  G01N21/88 ,  G02B21/26

Abstract: Disclosed are a dark-field confocal microscopic measurement apparatus and method based on vortex dichroism. The apparatus includes an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module; an array vortex wave plate of the array vortex light generation module generates vortex light to illuminate a sample of the array vortex light illumination module; and the array dark-field confocal detection module extracts scattering signals, and identifies differences between scattering signals collected under the illumination of opposite-order vortex light. Three-dimensional distribution information of defects, such as subsurface scratches, abrasion, subsurface cracks, and bubbles, can be extracted by directly analyzing the scattering signals under the 1-order vortex illumination; and chirality information of the micro-nano material can be obtained by analyzing difference values of the scattering signals under the illumination of the opposite-order vortex light.

公开(公告)号：US20240329377A1

公开(公告)日：2024-10-03

申请号：US18739866

申请日：2024-06-11

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Zijie Hua

IPC: G02B21/00 ,  G01N21/88 ,  G02B21/26

CPC classification number: G02B21/0032 ,  G01N21/8806 ,  G02B21/26 ,  G01N2021/8822 ,  G01N2021/8848

Abstract: Disclosed are a dark-field confocal microscopic measurement apparatus and method based on vortex dichroism. The apparatus includes an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module; an array vortex wave plate of the array vortex light generation module generates vortex light to illuminate a sample of the array vortex light illumination module; and the array dark-field confocal detection module extracts scattering signals, and identifies differences between scattering signals collected under the illumination of opposite-order vortex light. Three-dimensional distribution information of defects, such as subsurface scratches, abrasion, subsurface cracks, and bubbles, can be extracted by directly analyzing the scattering signals under the 1-order vortex illumination; and chirality information of the micro-nano material can be obtained by analyzing difference values of the scattering signals under the illumination of the opposite-order vortex light.

公开(公告)号：US20240310613A1

公开(公告)日：2024-09-19

申请号：US18424711

申请日：2024-01-26

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Chongliang Zou ,  Zijie Hua

IPC: G02B21/00 ,  G02B21/18

CPC classification number: G02B21/0032 ,  G02B21/0036 ,  G02B21/006 ,  G02B21/0068 ,  G02B21/18

Abstract: Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately. Difference values of scattering signals under separate illumination of the radially polarized signal light and the azimuthally polarized signal light are analyzed, and super-resolution detection imaging can be performed on the three-dimensional distribution information of defects such as subsurface scratches, and abrasion.