公开(公告)号：US12203867B1

公开(公告)日：2025-01-21

申请号：US18802309

申请日：2024-08-13

Applicant: Harbin Institute of Technology

Inventor： Jian Liu ,  Chenguang Liu ,  Zijie Hua ,  Kang Gu

IPC: G01N21/88 ,  G01R31/311

Abstract: Provided are a dark-field confocal microscopy measurement apparatus and method. The apparatus includes: a fractional vortex beam module configured to generate first fractional vortex beam and second fractional vortex beam; an optical scanning module configured to scan a sample by using the first fractional vortex beam and the second fractional vortex beam to obtain first signal return light and second signal return light respectively; a dark-field detection module configured to perform dark-field detection on the first signal return light and the second signal return light to obtain a first fractional-order dark-field image and a second fractional-order dark-field image respectively; a differential dark-field scattered image determining module configured to differentiate the first fractional-order dark-field image from the second fractional-order dark-field image to obtain a differential dark-field scattered image; and a defect determining module configured to process the differential dark-field scattered image to obtain a sample defect.