公开(公告)号：US4722659A

公开(公告)日：1988-02-02

申请号：US863961

申请日：1986-05-16

申请人： Hazen L. Hoyt, III ,  John D. Sanders ,  Jon C. Goldman ,  William R. Mello

发明人： Hazen L. Hoyt, III ,  John D. Sanders ,  Jon C. Goldman ,  William R. Mello

IPC分类号： H01L21/00 ,  H01L21/67 ,  H01L21/677 ,  B65B21/02

CPC分类号： H01L21/67115 ,  H01L21/67 ,  H01L21/67769 ,  Y10S414/137 ,  Y10S414/14

摘要： Semiconductor wafers in plastic cassettes are loaded into (and later unloaded from) an input/output station serving a CVD furnace and thereafter the cassettes are non-manually transported by a programmable elevator to and from a flat-finder, a wafer transfer machine (where the wafers are transferred to a boat) and in-process storage. The boats are non-manually transported by a second programmable elevator to and from the wafer transfer machine, in-process boat storage and a boat loader (or process chamber directly). The cassettes can be loaded or unloaded while one or both of the elevators are operating. Up to eight human assisted steps are reduced to only two such steps.Furnaces having more than one processing chamber have a loading station, in-process cassettes and boat storage and boats dedicated to each processing chamber so that there is no cross contamination between processing chambers caused by the boats and the cassettes in which wafers are delivered to the process are the same cassettes in which process wafers are returned to the input/output station so that there is no cross contamination of the wafers caused by the cassettes.

摘要翻译： 将塑料盒中的半导体晶片装载到服务于CVD炉的输入/输出站（然后从其中卸载），此后，盒可以通过可编程电梯非平移式地从平板扫描器，晶片转印机（其中 晶片转移到船上）和过程中的存储。 船只通过第二可编程电梯非手动地运送到晶片转移机器，进程中的船舶存储器和船装载机（或直接处理室）中。 当一个或两个电梯正在操作时，盒可以装载或卸载。 最多八个人工辅助步骤仅减少到两个这样的步骤。 具有多于一个处理室的炉具有加载站，处理中的盒和船的存储和专用于每个处理室的船，使得由船形成的处理室和盒之间没有交叉污染，其中晶片被递送到 处理是相同的盒，其中处理晶片返回到输入/输出站，使得由盒引起的晶片不会交叉污染。

公开(公告)号：US4934767A

公开(公告)日：1990-06-19

申请号：US863960

申请日：1986-05-16

申请人： Hazen L. Hoyt, III ,  Jon C. Goldman ,  William R. Mello

发明人： Hazen L. Hoyt, III ,  Jon C. Goldman ,  William R. Mello

IPC分类号： B65G1/02 ,  H01L21/673

CPC分类号： H01L21/67769 ,  B65G1/02

摘要： Plastic cassettes carrying semiconductor wafers are loaded into and/or unloaded from an extended open drawer. The drawer is retractable to a closed position in a frame where the cassettes may be removed from or returned to the drawer by a programmable elevator. The frame may have several drawers and cassettes may be safely loaded into or unloaded from the open drawer while cassettes are being removed from or returned to a closed drawer.

摘要翻译： 携带半导体晶片的塑料盒装载到延伸的开放抽屉中和/或从其中卸载。 抽屉可伸缩到框架中的关闭位置，其中盒可以通过可编程电梯从抽屉中移除或返回到抽屉。 框架可以具有多个抽屉，并且盒子可以从打开的抽屉被安全地装载到或从打开的抽屉中卸载，同时盒子被从包装盒中取出或者返回到关闭的抽屉中。

公开(公告)号：US06535704B1

公开(公告)日：2003-03-18

申请号：US09717325

申请日：2000-11-20

申请人： Hazen L. Hoyt, III ,  Jian Wen

发明人： Hazen L. Hoyt, III ,  Jian Wen

IPC分类号： G03G1502

CPC分类号： G03G21/181 ,  G03G15/011 ,  G03G21/1853 ,  G03G2215/0497 ,  G03G2221/1603 ,  G03G2221/1615

摘要： An imaging system including a plurality of developing stations for developing an image on a sheet, a releasably removable image receiving module having at least one exposing unit and an image receiving substrate and a support structure for receiving the releasably removable image receiving module. The releasably removable image receiving module is configured to engage the support structure of the system such that the image receiving substrate of the module can be disposed in an operative relationship with the developing stations when the removable module is engaged with the support structure. This imaging system provides a method for upgrading, downgrading or modifying the imaging system that could be substantially performed by an end user. This imaging system may be embodied in a monocolor or multicolor printer, copier, facsimile machine or other electrophotographic based apparatus.

摘要翻译： 一种成像系统，包括用于在片材上显影图像的多个显影站，具有至少一个曝光单元和图像接收基板的可释放的图像接收模块以及用于接收可释放地移除的图像接收模块的支撑结构。 可拆卸的图像接收模块被配置为接合系统的支撑结构，使得当可拆卸模块与支撑结构接合时，模块的图像接收基板可以与显影站处于可操作的关系中。 该成像系统提供了用于升级，降级或修改成像系统的方法，该方法可以由最终用户基本上执行。 该成像系统可以实现在单色或多色打印机，复印机，传真机或其它电子照相的装置中。