公开(公告)号：US20230213402A1

公开(公告)日：2023-07-06

申请号：US17928007

申请日：2020-06-02

申请人： Hermosa Optics Inc.

发明人： Yen-Chih CHEN

IPC分类号： G01L9/08 ,  H10N30/076 ,  H10N30/077 ,  H10N30/04

CPC分类号： G01L9/08 ,  H10N30/076 ,  H10N30/077 ,  H10N30/04

摘要： A method of manufacturing a porous pressure sensor, comprising: providing a substrate; forming a piezoelectric film on an upper surface of the substrate; performing a porosification process on the piezoelectric film, such as performing a wet etching process or a heat treatment process to form a porous pressure sensing layer; and forming a first electrode and a second electrode on two opposite sides of the upper surface of the porous pressure sensing layer, respectively. The present application is also directed to a pressure sensors manufactured by the method of manufacturing the porous pressure sensor.