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公开(公告)号：US07483122B2
公开(公告)日：2009-01-27
申请号：US11984192
申请日：2007-11-14
CPC分类号： G03F7/7025 , G02B17/0657 , G03F7/70233
摘要： A projection optical system is a catoptric system in which a field of view region and an imaging region are located spaced from an optical axis, in which a numerical aperture of light reaching each point on an image plane is substantially uniform regardless of an image height and a direction. An aperture stop for defining the numerical aperture of the projection optical system is provided, and the aperture stop is provided with an aperture portion in a predetermined shape in which the numerical aperture of light reaching each point within a predetermined region is substantially uniform over the predetermined region, that is, in a shape in which dimensions concerning two directions perpendicular to each other are different from each other. A predetermined shape of the aperture portion is defined so as to compensate for the effect of non-uniformity of the numerical aperture of light reaching each point within a predetermined region due to a partial optical system arranged between the aperture stop and an image plane not satisfying a desired projective relationship.
摘要翻译： 投影光学系统是其中视野区域和成像区域与光轴间隔开的反射系统，其中到达图像平面上的每个点的光的数值孔径与图像高度无关，并且 一个方向 提供用于限定投影光学系统的数值孔径的孔径光阑，并且孔径光阑设置有预定形状的开口部分，其中到达预定区域内的各点的光的数值孔径在预定的范围内基本均匀 即相对于彼此垂直的两个方向的尺寸彼此不同的形状。 限定孔径部分的预定形状，以补偿由于设置在孔径光阑和不能满足的光阑的图像之间的部分光学系统而在预定区域内到达各点的光的数值孔径的不均匀性的影响 期望的投射关系。
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公开(公告)号：US20060012767A1
公开(公告)日：2006-01-19
申请号：US11158096
申请日：2005-06-22
IPC分类号： G03B27/54
CPC分类号： G03F7/7025 , G02B17/0657 , G03F7/70233
摘要： A projection optical system is a catoptric system in which a field of view region and an imaging region are located spaced from an optical axis, in which a numerical aperture of light reaching each point on an image plane is substantially uniform regardless of an image height and a direction. An aperture stop for defining the numerical aperture of the projection optical system is provided, and the aperture stop is provided with an aperture portion in a predetermined shape in which the numerical aperture of light reaching each point within a predetermined region is substantially uniform over the predetermined region, that is, in a shape in which dimensions concerning two directions perpendicular to each other are different from each other. A predetermined shape of the aperture portion is defined so as to compensate for the effect of non-uniformity of the numerical aperture of light reaching each point within a predetermined region due to a partial optical system arranged between the aperture stop and an image plane not satisfying a desired projective relationship.
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公开(公告)号：US20080079924A1
公开(公告)日：2008-04-03
申请号：US11984192
申请日：2007-11-14
IPC分类号： G03B27/72
CPC分类号： G03F7/7025 , G02B17/0657 , G03F7/70233
摘要： A projection optical system is a catoptric system in which a field of view region and an imaging region are located spaced from an optical axis, in which a numerical aperture of light reaching each point on an image plane is substantially uniform regardless of an image height and a direction. An aperture stop for defining the numerical aperture of the projection optical system is provided, and the aperture stop is provided with an aperture portion in a predetermined shape in which the numerical aperture of light reaching each point within a predetermined region is substantially uniform over the predetermined region, that is, in a shape in which dimensions concerning two directions perpendicular to each other are different from each other. A predetermined shape of the aperture portion is defined so as to compensate for the effect of non-uniformity of the numerical aperture of light reaching each point within a predetermined region due to a partial optical system arranged between the aperture stop and an image plane not satisfying a desired projective relationship.
摘要翻译： 投影光学系统是其中视野区域和成像区域与光轴间隔开的反射系统，其中到达图像平面上的每个点的光的数值孔径与图像高度无关，并且 一个方向 提供用于限定投影光学系统的数值孔径的孔径光阑，并且孔径光阑设置有预定形状的开口部分，其中到达预定区域内的各点的光的数值孔径在预定的范围内基本均匀 即相对于彼此垂直的两个方向的尺寸彼此不同的形状。 限定孔径部分的预定形状，以补偿由于设置在孔径光阑和不能满足的光阑的图像之间的部分光学系统而在预定区域内到达各点的光的数值孔径的不均匀性的影响 期望的投射关系。
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4.发明授权Projection optical system, exposure apparatus, and exposure method in which a reflective projection optical system has a non-circular aperture stop 有权投影光学系统，曝光装置和曝光方法，其中反射投影光学系统具有非圆形孔径光阑公开(公告)号：US07312851B2
公开(公告)日：2007-12-25
申请号：US11158096
申请日：2005-06-22
CPC分类号： G03F7/7025 , G02B17/0657 , G03F7/70233
摘要： A projection optical system is a catoptric system in which a field of view region and an imaging region are located spaced from an optical axis, in which a numerical aperture of light reaching each point on an image plane is substantially uniform regardless of an image height and a direction. An aperture stop for defining the numerical aperture of the projection optical system is provided, and the aperture stop is provided with an aperture portion in a predetermined shape in which the numerical aperture of light reaching each point within a predetermined region is substantially uniform over the predetermined region, that is, in a shape in which dimensions concerning two directions perpendicular to each other are different from each other. A predetermined shape of the aperture portion is defined so as to compensate for the effect of non-uniformity of the numerical aperture of light reaching each point within a predetermined region due to a partial optical system arranged between the aperture stop and an image plane not satisfying a desired projective relationship.
摘要翻译： 投影光学系统是其中视野区域和成像区域与光轴间隔开的反射系统，其中到达图像平面上的每个点的光的数值孔径与图像高度无关，并且 一个方向 提供用于限定投影光学系统的数值孔径的孔径光阑，并且孔径光阑设置有预定形状的开口部分，其中到达预定区域内的各点的光的数值孔径在预定的范围内基本均匀 即相对于彼此垂直的两个方向的尺寸彼此不同的形状。 限定孔径部分的预定形状，以补偿由于设置在孔径光阑和不能满足的光阑的图像之间的局部光学系统而在预定区域内到达各点的光的数值孔径的不均匀性的影响 期望的投射关系。
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5.发明授权Catoptric reduction projection optical system and exposure apparatus and method using same 失效缩小投影光学系统和曝光装置及其使用方法公开(公告)号：US06302548B2
公开(公告)日：2001-10-16
申请号：US09760891
申请日：2001-01-17
申请人： Tomowaki Takahashi , Yutaka Suenaga
发明人： Tomowaki Takahashi , Yutaka Suenaga
IPC分类号： G02B510
CPC分类号： G03F7/70058 , G02B17/0657 , G03F7/70233 , G03F7/7025 , G03F7/70275
摘要： A catoptric reduction projection optical system (5) is provided with a first catoptric optical system (10) that images an object (R) in first (object) plane (OP) into a second plane (12) and forming an intermediate image (II) therein, and a second catoptric optical system (20) that images the intermediate image in the second plane onto a third (image) plane (IP), thereby forming a reduced image of the object in the first (object) plane onto the third (image) plane. The first catoptric optical system comprises a first mirror pair comprising two reflective mirrors (M1, M2). The second catoptric optical system comprises a second mirror pair comprising a convex mirror (M3) and a concave mirror (M4). The system also preferably satisfied a number of design conditions.
摘要翻译： 折射减少投影光学系统（5）设置有将第一（物体）平面（OP）中的物体（R）成像为第二平面（12）并形成中间图像（II）的第一反射光学系统（10） ）和第二反射光学系统（20），其将第二平面中的中间图像成像到第三（图像）平面（IP）上，从而在第一（对象）平面中形成对象的缩小图像到第三 （图像）飞机。 第一反射光学系统包括包括两个反射镜（M1，M2）的第一镜对。 第二反射光学系统包括包括凸面镜（M3）和凹面镜（M4）的第二镜对。 该系统还优选地满足多个设计条件。
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公开(公告)号：US06109756A
公开(公告)日：2000-08-29
申请号：US400173
申请日：1999-09-21
申请人： Tomowaki Takahashi
发明人： Tomowaki Takahashi
CPC分类号： G03F7/70233 , G02B17/0657 , G03F7/7025
摘要： A catoptric reduction projection optical system (8), exposure apparatus (EX) including same, and a method using same for forming in a second plane (WP) a reduced image of an object (R) in a first plane (RP). The projection optical system includes, in order along a folded optical path on in optical axis (AX), from the first plane to the second plane, a first mirror (M1) having a concavely shaped reflecting surface and a first vertex, a second mirror (M2) having a second vertex, a third mirror (M3) having a convexly shaped reflecting surface and a third vertex, a single aperture stop (AS), and a fourth mirror (M4) having a concavely shaped reflecting surface and a fourth vertex. The projection optical system also preferable satisfies a number of design conditions.
摘要翻译： 折射减小投影光学系统（8），包括它们的曝光装置（EX）以及使用它们在第二平面（WP）中形成第一平面（RP）中的物体（R）的缩小图像的方法。 投影光学系统沿着光轴（AX）上的折叠光路从第一平面到第二平面依次包括具有凹形反射表面和第一顶点的第一反射镜（M1），第二反射镜 （M2），具有凸形反射面的第三反射镜（M3）和第三顶点，单孔径光阑（AS）和具有凹形反射面和第四顶点的第四反射镜（M4） 。 投影光学系统也优选满足多个设计条件。
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公开(公告)号：US6097537A
公开(公告)日：2000-08-01
申请号：US286376
申请日：1999-04-05
申请人： Tomowaki Takahashi , Junichi Misawa
发明人： Tomowaki Takahashi , Junichi Misawa
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225 , G03F7/70275
摘要： A catadioptric optical system (10, 110) capable of forming an image of an object. The system comprises a first optical axis (Z.sub.1) having a first end (12) and a second end (14), with a concave mirror (M.sub.C) arranged at the first end. A second surface (P.sub.2) orthogonal to the first optical axis is provided at the second end. A reflective surface (M) is arranged between the concave mirror and the second surface. A first imaging optical system (A) comprising a first plurality of lenses (L.sub.1 -L.sub.4) is arranged between the reflective surface and the concave mirror. A second imaging optical system (B) comprising a second plurality of lenses (L.sub.5 -L.sub.9) is arranged between the reflective surface and the second surface. The system further includes a second optical axis (Z.sub.2) intersecting the first optical axis at the reflective surface and having a first surface (P.sub.1) disposed along and orthogonal to the secondary optical axis. The first surface is divided into first and second regions (30 and 32) by a line of intersection Q.sub.1, between the first surface and a plane containing the first optical axis and the second optical axis. The object is arranged in one of the first and second regions of the first surface. The image is formed in one of first and second regions (36 and 38) of the second surface formed by a line of intersection Q.sub.2 between the second surface and a plane containing the first optical axis and the second optical axis. Alternatively, the first and second regions of the first and second surface are formed by a line of intersection between the first and second surface and a plane orthogonal to the first optical axis that includes the second optical axis. Also, an intermediate image (C) of the object is formed in the vicinity of the reflective surface. The system also preferably satisfies a number of design conditions.
摘要翻译： 能够形成物体的图像的反折射光学系统（10,110）。 该系统包括具有第一端（12）和第二端（14）的第一光轴（Z1），在第一端设有凹面镜（MC）。 在第二端设置与第一光轴正交的第二表面（P2）。 反射面（M）布置在凹面镜和第二表面之间。 包括第一多个透镜（L1-L4）的第一成像光学系统（A）布置在反射表面和凹面镜之间。 包括第二多个透镜（L5-L9）的第二成像光学系统（B）布置在反射表面和第二表面之间。 该系统还包括在反射表面处与第一光轴相交的第二光轴（Z2），并且具有沿第二光轴并且与第二光轴正交的第一表面（P1）。 第一表面通过相交线Q1在第一表面和包含第一光轴和第二光轴的平面之间分成第一和第二区域（30和32）。 物体被布置在第一表面的第一和第二区域中的一个中。 图像形成在由第二表面和包含第一光轴和第二光轴的平面之间的相交线Q2形成的第二表面的第一和第二区域（36和38）之一中。 或者，第一和第二表面的第一和第二区域由第一和第二表面之间的交叉线和与包括第二光轴的第一光轴正交的平面形成。 此外，物体的中间图像（C）形成在反射面附近。 该系统还优选满足多个设计条件。
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公开(公告)号：US5999333A
公开(公告)日：1999-12-07
申请号：US987852
申请日：1997-12-09
申请人： Tomowaki Takahashi
发明人： Tomowaki Takahashi
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225 , G03F7/70358
摘要： To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plane. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.
摘要翻译： 使用比常规分束器小的分束光学系统，并且在凹面，反射镜和图像平面之间设置更长的光路。 来自物体表面的光束穿过第一会聚组进入分束器，并且由分束器反射的光束被凹入的反射镜反射以在凹面内的物体表面上形成图案的图像， 反光镜。 来自图案图像的光束通过分束器，然后通过图像平面上的第三会聚组形成图案的图像。
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公开(公告)号：US5808805A
公开(公告)日：1998-09-15
申请号：US429970
申请日：1995-04-27
申请人： Tomowaki Takahashi
发明人： Tomowaki Takahashi
CPC分类号： G02B17/0892 , G02B17/08 , G03F7/70225 , G03F7/70358
摘要： To use a beam splitting optical system smaller than the conventional beam splitters and to set a longer optical path between a concave, reflective mirror and an image plane. A light beam from an object surface travels through a first converging group to enter a beam splitter, and a light beam reflected by the beam splitter is reflected by a concave, reflective mirror to form an image of patterns on the object surface inside the concave, reflective mirror. A light beam from the image of the patterns passes through the beam splitter and thereafter forms an image of the patterns through a third converging group on an image plane.
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公开(公告)号：US4770511A
公开(公告)日：1988-09-13
申请号：US741276
申请日：1985-06-03
CPC分类号： G02B15/22
摘要： A zoom lens has, in succession from the object side, a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power and a fourth lens group of positive refractive power. The first lens group, the third lens group and the fourth lens group are movable toward the object side for a magnification change from the wide angle end to the telephoto end. The focusing up to a short distance object is made possible by moving the second lens group along the optic axis from the position of its telephoto end toward the object side and moving the third lens group along the optic axis from the position of its telephoto end. The zoom lens satisfies the following condition:-0.5
摘要翻译： 变焦透镜从物体侧连续地具有正屈光力的第一透镜组，负折光力的第二透镜组，正折光力的第三透镜组和正折射光焦度的第四透镜组。 第一透镜组，第三透镜组和第四透镜组可以朝向物体侧移动，以从广角端到望远端的倍率变化。 通过将第二透镜组从其远摄端朝向物体侧的位置沿着光轴移动并且沿着其远摄端的位置沿着光轴移动第三透镜组，使聚焦到短距离物体成为可能。 变焦镜头满足以下条件：-0.5
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