Stylus abrasion detection method and surface property measurement device
    1.
    发明授权
    Stylus abrasion detection method and surface property measurement device 有权
    触针磨损检测方法和表面性质测量装置

    公开(公告)号:US09052182B2

    公开(公告)日:2015-06-09

    申请号:US13169448

    申请日:2011-06-27

    IPC分类号: G01B5/28 G01B21/04

    CPC分类号: G01B5/28 G01B21/042

    摘要: A stylus abrasion detection method includes obtaining a measurement curve of a standard specimen in which an unevenness that changes periodically is formed on a surface, by causing a stylus to trace along the surface of the standard specimen, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and using the displacement for obtaining the measurement curve; performing a frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis; and displaying the abrasion amount calculated by the abrasion amount calculation.

    摘要翻译: 一种触针磨损检测方法,其特征在于,通过使触针沿着标准试样的表面进行跟踪,得到在表面上形成周期性变化的不均匀性的标准试样的测定曲线,检测触针的方向位移 垂直于跟踪方向,并使用位移获得测量曲线; 对测量曲线进行频率分析; 从频率分析的结果计算触针的磨损量; 并显示通过磨损量计算计算出的磨损量。

    Position detector with irregularity detectable function and cable for use in the same
    2.
    发明授权
    Position detector with irregularity detectable function and cable for use in the same 有权
    具有不规则检测功能的位置检测器和用于其的电缆

    公开(公告)号:US06236325B1

    公开(公告)日:2001-05-22

    申请号:US09466874

    申请日:1999-12-20

    IPC分类号: G08B2100

    摘要: A position detector and cable for use in the same can be provided for reducing the space and cost as well as easing maintenance. A scale unit (1) generates an alarm signal (ALAM) for informing of an error when it occurs associated with generating position pulses (PA, PB and PZ). A signal cable (6) transfers the alarm signal (ALAM) to a connector (7). The connector (7) contains an alarm indicator (31) that lights on in response to the alarm signal (ALAM) output from the scale unit (1) when an irregularity occurs.

    摘要翻译: 可以提供用于其中的位置检测器和电缆,以减少空间和成本以及减轻维护。 刻度单元(1)产生用于在与发生位置脉冲(PA,PB和PZ)相关联的情况下通知错误的报警信号(ALAM)。 信号线(6)将报警信号(ALAM)传送到连接器(7)。 当发生不规则时,连接器(7)包含响应于从刻度单元(1)输出的报警信号(ALAM)点亮的报警指示器(31)。

    Method and apparatus for detecting origin of measurement
    3.
    发明授权
    Method and apparatus for detecting origin of measurement 有权
    用于检测测量原点的方法和装置

    公开(公告)号:US06342697B1

    公开(公告)日:2002-01-29

    申请号:US09398751

    申请日:1999-09-17

    IPC分类号: G01D534

    CPC分类号: H03M1/308

    摘要: An interpolation circuit generates two-phase square wave signals PA and PB from two-phase sinusoidal wave outputs ØA and ØB supplied from a photoelectric encoder. A gate signal generator slices a primary origin signal ØZ supplied from the photoelectric encoder with a predetermined reference level VRef to generate a gate signal Z. A first counter begins to count position pulses generated from the two-phase square wave signals PA and PB when the gate signal Z becomes active. A count value of the first counter is divided by two when the gate signal Z becomes non-active and the divided value is preset into a second counter. The second counter counts the position pulses generated from the two-phase square wave signals PA and PB. A comparator feeds an output origin signal PZ when a count value of the second counter reaches a predetermined offset value N.

    摘要翻译: 内插电路从光电编码器提供的两相正弦波输出ØA和ØB生成两相方波信号PA和PB。 门信号发生器切割从光电编码器提供的具有预定参考电平VRef的原始信号ØZ以产生门信号Z.当第二计数器开始计数从两相方波信号PA和PB产生的位置脉冲时 门信号Z变为有效。 当门信号Z变为非有效时,将第一计数器的计数值除以2,并将分频值预设为第二计数器。 第二计数器对从两相方波信号PA和PB产生的位置脉冲进行计数。 当第二计数器的计数值达到预定的偏移值N时,比较器馈送输出原点信号PZ。

    Two-dimensional optical encoder with three gratings in each dimension
    4.
    发明授权
    Two-dimensional optical encoder with three gratings in each dimension 失效
    具有三维光栅尺的二维光编码器

    公开(公告)号:US5204524A

    公开(公告)日:1993-04-20

    申请号:US848116

    申请日:1992-03-09

    IPC分类号: G01D5/36

    CPC分类号: G01D5/36

    摘要: A first grating is formed on a main scale, and a second and third gratings on an index scale. The first grating generally assumes a cruciform shape, and consists of a grating having grating lines arranged in the X-direction and another grating having grating lines arranged in the Y-direction. The second grating is formed in a square central area of the index scale, and consists of two gratings having grating lines arranged in the X-direction and divided at the center and another two gratings having grating lines arranged in the Y-direction and divided at the center. The third grating consists of four gratings having grating lines arranged in the X-direction with different phases and another four gratings having grating lines arranged in the Y-direction with different phases. A light-emitting element and eight photodetectors that are arranged corresponding to the respective gratings of the third grating are fixed to a movable member on which the index scale is attached. Light emitted from the light-emitting element passes though the second grating, reflected by the first grating, passes through the third grating, and finally detected by the photodetectors. Alternatively, the first grating may consist of rectangular portions arranged in the X- and Y-direction in a matrix form.

    摘要翻译: 第一光栅形成在主刻度上,第二光栅和第三光栅以指标标度形成。 第一光栅通常呈十字形,由具有沿X方向排列的光栅线的光栅和具有沿Y方向排列的光栅线的另一光栅组成。 第二光栅形成在索引刻度的正方形中心区域中,由两个光栅组成,其格栅线沿X方向排列并分成中心,另外两个光栅具有沿Y方向布置的光栅线,并分为 中心。 第三光栅由具有不同相位的沿X方向布置的光栅线的四个光栅组成,另外四个光栅具有沿Y方向排列的具有不同相位的光栅线。 对应于第三光栅的各个光栅排列的发光元件和八个光电检测器被固定到附着有指标的可动部件上。 从发光元件发射的光通过第二光栅,被第一光栅反射,穿过第三光栅,最后由光电检测器检测。 或者,第一光栅可以由以矩阵形式布置在X方向和Y方向上的矩形部分组成。

    Angular velocity sensor with displacement scale and sensor means
    5.
    发明授权
    Angular velocity sensor with displacement scale and sensor means 失效
    具有位移尺度和传感器装置的角速度传感器

    公开(公告)号:US5198663A

    公开(公告)日:1993-03-30

    申请号:US854008

    申请日:1992-03-19

    IPC分类号: G01C19/56

    CPC分类号: G01C19/56

    摘要: In one type of an angular velocity sensor, a constant vibration is applied in an X direction to one end of a vibrator which is fixed at another end and the vibrator vibrates in a Y direction perpendicular to the X direction by an action of Coriolis force caused by the angular velocity of the vibrator about the Z axis with an amplitude proportional to an angular velocity about a Z axis. An angular velocity sensor of this invention utilizes a photoelectric encoder for measurement of the vibration amplitude of the vibrator in the Y direction. The encoder includes a main scale mounted on the free end of the vibrator; an index scale mounted on a housing of the sensor to face the main scale; and a photoelectric element for sensing light reflected from the main scale and passing through the index scale. The angular velocity sensor utilizing the photoelectric encoder is less subject to influence of variation in the temperature in comparison with the conventional sensor utilizing piezoelectric elements and a higher precision can be attained.

    摘要翻译: 在一种类型的角速度传感器中,在X方向上施加恒定的振动,该振动器固定在另一端并且振动器通过科里奥利力的作用在垂直于X方向的Y方向上振动 通过围绕Z轴的振动器的角速度与Z轴的角速度成比例的振幅。 本发明的角速度传感器利用光电编码器来测量振动器在Y方向的振幅。 编码器包括安装在振动器的自由端上的主刻度; 安装在所述传感器的壳体上以与所述主秤相对的索引刻度; 以及光电元件,用于感测从主刻度尺反射并穿过指示标尺的光。 与使用压电元件的传统传感器相比,利用光电编码器的角速度传感器不受温度变化的影响,可以获得更高的精度。