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1.发明授权公开(公告)号：US09052182B2
公开(公告)日：2015-06-09
申请号：US13169448
申请日：2011-06-27
申请人： Hideki Mishima , Shingo Kuroki
发明人： Hideki Mishima , Shingo Kuroki
CPC分类号： G01B5/28 , G01B21/042
摘要： A stylus abrasion detection method includes obtaining a measurement curve of a standard specimen in which an unevenness that changes periodically is formed on a surface, by causing a stylus to trace along the surface of the standard specimen, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and using the displacement for obtaining the measurement curve; performing a frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis; and displaying the abrasion amount calculated by the abrasion amount calculation.
摘要翻译： 一种触针磨损检测方法，其特征在于，通过使触针沿着标准试样的表面进行跟踪，得到在表面上形成周期性变化的不均匀性的标准试样的测定曲线，检测触针的方向位移 垂直于跟踪方向，并使用位移获得测量曲线; 对测量曲线进行频率分析; 从频率分析的结果计算触针的磨损量; 并显示通过磨损量计算计算出的磨损量。
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公开(公告)号：US20100018298A1
公开(公告)日：2010-01-28
申请号：US12510401
申请日：2009-07-28
CPC分类号： G01B5/0004 , G01B5/20 , G01B5/28
摘要： A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.
摘要翻译： 表面纹理测量仪器包括：测量装置，其包括用于检测工件的表面纹理的检测器和用于在测量方向上移动检测器的X轴移动机构; 能够调节安装有测量装置的工作台的仰角位置和倾斜角的仰角倾斜调节器; 安装工件的阶段; 以及控制测量装置和仰角倾斜调节器的控制器。 控制器包括：测量控制器，控制X轴移动机构进行工件的初步测量和主要测量; 计算单元，其从所述检测器获取所述初步测量结果，并获得所述工件在所述测量方向上倾斜的工件的倾斜角度; 以及基于获得的倾斜角度来调整台的倾斜角度的定位控制器。
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3.发明申请公开(公告)号：US20120010826A1
公开(公告)日：2012-01-12
申请号：US13169448
申请日：2011-06-27
申请人： Hideki MISHIMA , Shingo KUROKI
发明人： Hideki MISHIMA , Shingo KUROKI
CPC分类号： G01B5/28 , G01B21/042
摘要： A stylus abrasion detection method includes obtaining a measurement curve of a standard specimen in which an unevenness that changes periodically is formed on a surface, by causing a stylus to trace along the surface of the standard specimen, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and using the displacement for obtaining the measurement curve; performing a frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis; and displaying the abrasion amount calculated by the abrasion amount calculation.
摘要翻译： 一种触针磨损检测方法，其特征在于，通过使触针沿着标准试样的表面进行跟踪，得到在表面上形成周期性变化的不均匀性的标准试样的测定曲线，检测触针的方向位移 垂直于跟踪方向，并使用位移获得测量曲线; 对测量曲线进行频率分析; 从频率分析的结果计算触针的磨损量; 并显示通过磨损量计算计算出的磨损量。
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4.发明授权公开(公告)号：US06745616B1
公开(公告)日：2004-06-08
申请号：US09690590
申请日：2000-10-18
申请人： Minoru Katayama , Hideki Mishima , Toshihiro Kanematsu , Hiroomi Honda , Hiroyuki Hidaka , Kazushige Ishibashi
发明人： Minoru Katayama , Hideki Mishima , Toshihiro Kanematsu , Hiroomi Honda , Hiroyuki Hidaka , Kazushige Ishibashi
IPC分类号： B23Q1709
CPC分类号： G01B21/30 , G01B5/0004
摘要： In advance to measuring texture of the workpiece by a surface texture measuring machine (1), a workpiece orientation adjustment stage (10) is manually moved by the surface texture measuring machine (1) in accordance with calculated orientation correction amount of the workpiece, thus adjusting orientation of the workpiece. Since it is only necessary for an operator to operate respective adjustment means until reaching a displayed correction amount, operation thereof can be facilitated and orientation thereof can be highly accurately adjusted without impairing operability.
摘要翻译： 通过表面纹理测量机（1）预先测量工件的质地，通过表面纹理测量机（1）根据计算出的工件的取向校正量手动地移动工件定向调节台（10），从而 调整工件的取向。 由于操作者仅需要操作相应的调节装置直到达到显示的校正量，所以可以使操作方便，并且可以高精度地调整其取向而不损害可操作性。
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公开(公告)号：US20050273309A1
公开(公告)日：2005-12-08
申请号：US11143599
申请日：2005-06-03
CPC分类号： G06F17/5036
摘要： A plurality of elements constituting a semiconductor integrated circuit to be designed are each converted to a device model which merges an electric model exhibiting electric characteristics of the element and a thermal model exhibiting thermal characteristics of the element, and a thermal resistor is inserted between the elements where heat exchange occurs, thereby electric and thermal circuits are formed. Then circuit and heat equations are formulated with respect to the electric and thermal circuits, and then the equations are solved together to acquire electric and thermal characteristics of each element in the circuit. As a result, it becomes possible to achieve high-precision device characteristics which precisely reflect the temperature variation of each element in the circuit during simulation.
摘要翻译： 构成要设计的半导体集成电路的多个元件分别被转换为将表示该元件的电特性的电气模型和表现该元件的热特性的热模型合并的元件模型，并且在该元件之间插入热电阻器 发生热交换，从而形成电路和热电路。 然后针对电路和热回路制定电路和热方程，然后将这些方程组合在一起，以获得电路中每个元件的电和热特性。 结果，可以实现精确地反映模拟期间电路中每个元件的温度变化的高精度器件特性。
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公开(公告)号：US08276435B2
公开(公告)日：2012-10-02
申请号：US12510401
申请日：2009-07-28
CPC分类号： G01B5/0004 , G01B5/20 , G01B5/28
摘要： A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.
摘要翻译： 表面纹理测量仪器包括：测量装置，其包括用于检测工件的表面纹理的检测器和用于在测量方向上移动检测器的X轴移动机构; 能够调节安装有测量装置的工作台的仰角位置和倾斜角的仰角倾斜调节器; 安装工件的阶段; 以及控制测量装置和仰角倾斜调节器的控制器。 控制器包括：测量控制器，控制X轴移动机构进行工件的初步测量和主要测量; 计算单元，其从所述检测器获取所述初步测量结果，并获得所述工件在所述测量方向上倾斜的工件的倾斜角度; 以及基于获得的倾斜角度来调整台的倾斜角度的定位控制器。
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公开(公告)号：US06510363B1
公开(公告)日：2003-01-21
申请号：US09549613
申请日：2000-04-14
IPC分类号： G06F1900
摘要： A surface texture measuring apparatus allowing effects of vibration disturbance to be removed and a highly accurate measurement to be achieved. The surface texture measuring apparatus is further provided with a small surface texture measuring apparatus, which detects the amount of vibration of a workpiece while maintaining a detecting device in contact with the surface of the workpiece without moving the device along the workpiece. The main surface texture measuring apparatus conducts measurement with a high accuracy based on the detected unevenness value of the surface of the workpiece and on the amount of vibration detected by the small surface texture measuring apparatus.
摘要翻译： 允许去除振动干扰的影响的表面纹理测量装置和实现高精度的测量。 表面纹理测量装置还设置有小表面纹理测量装置，其在保持检测装置与工件的表面接触而不沿着工件移动的同时检测工件的振动量。 主表面纹理测量装置基于检测到的工件表面的不均匀度和由小表面纹理测量装置检测到的振动量，以高精度进行测量。
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公开(公告)号：US06357286B1
公开(公告)日：2002-03-19
申请号：US09553313
申请日：2000-04-20
IPC分类号： G01B528
摘要： A surface texture measuring apparatus that ensures detection of surface texture of a workpiece even when the surface has a steep unevenness. A detecting device having a stylus is moved in the X axis direction along the surface of the workpiece, and displacement in the Z axis direction is converted into electric signals to detect unevenness of the surface of the workpiece. When the surface has a steep unevenness and the amount of displacement in the Z axis direction reaches or exceeds a threshold, a Z axis detected value and an X axis detected value obtained at that moment are output. The moving speed of the detecting device is decreased when the surface has a steep unevenness, while the moving speed is increased when the surface does not have a steep unevenness, making it possible to improve following characteristics and to reduce measurement time.
摘要翻译： 一种表面纹理测量装置，即使当表面具有陡峭的不平坦度时，也能够确保工件的表面纹理的检测。 具有触针的检测装置沿X轴方向沿着工件的表面移动，并且Z轴方向上的位移被转换成电信号以检测工件的表面的不均匀性。 当表面具有陡峭的不均匀性并且Z轴方向的位移量达到或超过阈值时，输出在该时刻获得的Z轴检测值和X轴检测值。 当表面具有陡峭的不平坦度时，检测装置的移动速度降低，而当表面不具有陡峭的不平坦度时，移动速度增加，从而可以提高跟随特性并减少测量时间。
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