公开(公告)号：US5475766A

公开(公告)日：1995-12-12

申请号：US941197

申请日：1992-09-04

申请人： Hideo Tsuchiya ,  Toshiyuki Watanabe ,  Masao Takanashi ,  Masayuki Hideshima

发明人： Hideo Tsuchiya ,  Toshiyuki Watanabe ,  Masao Takanashi ,  Masayuki Hideshima

IPC分类号： G01N21/88 ,  G01N21/956 ,  G06T7/00 ,  G06K9/00 ,  G06T5/00

CPC分类号： G06T7/001 ,  G01N21/8851 ,  G01N21/95607 ,  G06T2207/30121 ,  G06T2207/30148

摘要： A pattern inspection apparatus for comparing/collating a test target pattern with a corresponding design pattern to detect the presence/absence of a defect which is present in the test target pattern includes a bit pattern generating circuit for developing the data of the design pattern into bits, a corner pattern detector for scanning a corner pattern detection window having a predetermined range with respect to reference pattern data as a reference of a pattern obtained by bit development performed by the bit pattern generating circuit to extract a contour pattern, and detecting a corner pattern to be subjected to corner rounding processing on the basis of the extracted contour pattern, a memory for storing predetermined change information corresponding to the corner detected by the corner pattern detector, a graphic pattern synthesizing circuit for changing a graphic pattern in accordance with the information in the memory, and a comparing circuit for comparing reference pattern data, obtained by rounding processing performed on the basis of the reference pattern data and the feature of the corresponding pattern, with test pattern data obtained from the test target pattern, and further includes a pattern correcting circuit constituted by an excessive rounding detector for detecting and correcting an inadequate excessive rounding operation, and a pattern changing circuit for changing the pattern data in accordance with the excessive rounding detection result.

摘要翻译： 用于将测试目标图案与相应的设计模式进行比较/整理以检测存在于测试目标图案中的缺陷的存在/不存在的图案检查装置包括位图形生成电路，用于将设计图案的数据显影为位 ，用于扫描具有相对于参考图案数据的预定范围的角图案检测窗口的拐角图案检测器，作为通过位图案生成电路进行的位展开而获得的图案的参考，以提取轮廓图案，以及检测拐角图案 基于所提取的轮廓图案进行转角加工处理;存储器，用于存储与由拐角图案检测器检测到的拐角对应的预定变化信息;图形图形合成电路，用于根据所述轮廓图案中的信息改变图形; 存储器和用于比较参考图案数据的比较电路 a，通过根据参考图案数据和相应图案的特征进行舍入处理获得的测试图案数据从测试对象图案获得，并且还包括图案校正电路，其由过度舍入检测器构成，用于检测和 校正不适当的过度舍入操作，以及用于根据过度舍入检测结果改变模式数据的模式改变电路。