Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US20050173720A1

    公开(公告)日:2005-08-11

    申请号:US11104961

    申请日:2005-04-13

    IPC分类号: G02B3/00 G02F1/1335 H01L29/22

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US06992832B2

    公开(公告)日:2006-01-31

    申请号:US11104913

    申请日:2005-04-13

    IPC分类号: G02B27/10 G02F1/1335

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US20050202586A1

    公开(公告)日:2005-09-15

    申请号:US11104963

    申请日:2005-04-13

    IPC分类号: G02B3/00 G02F1/1335 H01L21/00

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US20060187379A1

    公开(公告)日:2006-08-24

    申请号:US11397818

    申请日:2006-04-04

    IPC分类号: G02F1/1335

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US06995916B2

    公开(公告)日:2006-02-07

    申请号:US11104938

    申请日:2005-04-13

    IPC分类号: G02B27/10

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US06989933B2

    公开(公告)日:2006-01-24

    申请号:US11104961

    申请日:2005-04-13

    IPC分类号: G02B27/10

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US06985298B2

    公开(公告)日:2006-01-10

    申请号:US11104963

    申请日:2005-04-13

    IPC分类号: G02B27/10

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector
    8.
    发明授权
    Production method of microlens array, liquid crystal display device and production method thereof, and projector 失效
    微透镜阵列的制造方法,液晶显示装置及其制造方法以及投影仪

    公开(公告)号:US06985297B2

    公开(公告)日:2006-01-10

    申请号:US11104962

    申请日:2005-04-13

    IPC分类号: G02B27/10

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    摘要翻译: 微透镜阵列的制造方法包括图案化工序,在透明基板上形成具有第一折射率的第一光学树脂层,在第一光学树脂的正面上形成以二维图案排列的多个微透镜平面 层; 形成平坦化的第二光学树脂层的平坦化工序; 提供其上预先形成有透明保护膜的支撑层的接合步骤; 以及以只有保护膜保留在第二光学树脂层上的方式去除支撑层的去除步骤。 平面化步骤是通过用具有第二折射率的树脂填充微透镜平面的不规则并平面化与树脂相对的微透镜平面的前表面以形成平坦化的第二光学树脂层,并且接合步骤是 通过将支撑层接合到平坦化的第二光学树脂层来执行。 利用该方法,可以制造出表面精度和平坦度优异的微透镜阵列,而不需要设置由玻璃制成的支撑层。

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US20050185282A1

    公开(公告)日:2005-08-25

    申请号:US11104913

    申请日:2005-04-13

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.

    Production method of microlens array, liquid crystal display device and production method thereof, and projector

    公开(公告)号:US20050180018A1

    公开(公告)日:2005-08-18

    申请号:US11104938

    申请日:2005-04-13

    IPC分类号: G02B3/00 G02F1/1335 G02B27/10

    摘要: A method of producing a microlens array includes a patterning step of forming a first optical resin layer having a first refractive index on a transparent substrate and forming a plurality of microlens planes arrayed in a two-dimensional pattern on the front surface of the first optical resin layer; a planarizing step of forming a planarized second optical resin layer; a joining step of providing a support layer on which a transparent protective film is previously formed; and a removing step of removing the support layer in such a manner that only the protective film remains on the second optical resin layer. The planarizing step is performed by filling irregularities of the microlens planes with a resin having a second refractive index and planarizing the front surface, opposed to the microlens planes, of the resin, to form the planarized second optical resin layer, and the joining step is performed by joining the support layer to the planarized second optical resin layer. With this method, a microlens array excellent in surface accuracy and flatness can be produced without the need of provision of a support layer made from glass.