公开(公告)号：US20120084059A1

公开(公告)日：2012-04-05

申请号：US13238214

申请日：2011-09-21

申请人： Hikaru AKADA

发明人： Hikaru AKADA

IPC分类号： G06F15/00

CPC分类号： H01L21/67225 ,  H01L21/67253 ,  H01L21/67265 ,  H01L21/67276 ,  H01L21/67745

摘要： The present invention holds a sensor substrate including a sensor part for collecting information about a module and a power receiving coil for supplying power to the sensor part, on a holding member; moves the holding member forward to deliver the sensor substrate to the module; supplies power to a power transmitting coil provided at a base of the holding member to form a magnetic field, and causes the power transmitting coil and the power receiving coil to resonate in the magnetic field to supply power from the power transmitting coil to the power receiving coil; and acquires data about the module by the sensor part.

摘要翻译： 本发明保持传感器基板，其包括用于收集关于模块的信息的传感器部分和用于向传感器部分供电的受电线圈; 向前移动保持构件以将传感器基板传送到模块; 向设置在保持部件的基部的电力传输线圈供电，形成磁场，并使电力传输线圈和受电线圈在磁场中共振，将电力传输线圈供电至电力接收 线圈 并且通过传感器部件获取关于模块的数据。

公开(公告)号：US20130006547A1

公开(公告)日：2013-01-03

申请号：US13537637

申请日：2012-06-29

申请人： Hikaru AKADA

发明人： Hikaru AKADA

IPC分类号： G01P13/00 ,  G06F19/00

CPC分类号： G01P5/12 ,  G01P13/045

摘要： A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.

摘要翻译： 一种基板处理装置的数据采集方法，用于获取基板表面上的多个测量区域中的气流方向的数据，包括：将具有多对传感器的感测基板装载在装载器上，其中每对 传感器包括第一传感器和第二传感器，其被配置为获取感测基板的表面上的气流的矢量数据; 通过第一传感器获取第一线性方向上的气流的矢量数据; 通过第二传感器获取沿第一线性方向倾斜的第二线性方向的气流的矢量数据; 以及基于与所述相应传感器对相关联的起始点组合所述气体电流矢量; 以及从与所述相应传感器对相关联的起始点计算气流方向。