公开(公告)号：US09915677B2

公开(公告)日：2018-03-13

申请号：US13537637

申请日：2012-06-29

申请人： Hikaru Akada

发明人： Hikaru Akada

IPC分类号： G01P5/12 ,  G01P13/04

CPC分类号： G01P5/12 ,  G01P13/045

摘要： A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.

公开(公告)号：US20120084059A1

公开(公告)日：2012-04-05

申请号：US13238214

申请日：2011-09-21

申请人： Hikaru AKADA

发明人： Hikaru AKADA

IPC分类号： G06F15/00

CPC分类号： H01L21/67225 ,  H01L21/67253 ,  H01L21/67265 ,  H01L21/67276 ,  H01L21/67745

摘要： The present invention holds a sensor substrate including a sensor part for collecting information about a module and a power receiving coil for supplying power to the sensor part, on a holding member; moves the holding member forward to deliver the sensor substrate to the module; supplies power to a power transmitting coil provided at a base of the holding member to form a magnetic field, and causes the power transmitting coil and the power receiving coil to resonate in the magnetic field to supply power from the power transmitting coil to the power receiving coil; and acquires data about the module by the sensor part.

摘要翻译： 本发明保持传感器基板，其包括用于收集关于模块的信息的传感器部分和用于向传感器部分供电的受电线圈; 向前移动保持构件以将传感器基板传送到模块; 向设置在保持部件的基部的电力传输线圈供电，形成磁场，并使电力传输线圈和受电线圈在磁场中共振，将电力传输线圈供电至电力接收 线圈 并且通过传感器部件获取关于模块的数据。

公开(公告)号：US09268739B2

公开(公告)日：2016-02-23

申请号：US13700251

申请日：2011-05-31

申请人： Hikaru Akada

发明人： Hikaru Akada

IPC分类号： H01L21/67 ,  G06F17/00 ,  H02J17/00

CPC分类号： G06F17/00 ,  H01L21/67253 ,  H02J7/025 ,  H02J17/00 ,  H02J50/10 ,  H02J50/12 ,  H02J50/40 ,  H02J50/80 ,  H02J50/90

摘要： A method that acquires data on a processing module of a substrate processing apparatus using a sensor substrate efficiently and highly precisely is provided. The method includes: holding a sensor substrate by a first holding member, the sensor substrate having a sensor section for acquiring data on the processing modules and a first power supply section with a rechargeable electricity storage section for supplying electric power to the sensor section; advancing the first holding member to transfer the sensor substrate to a processing module; acquiring data on the processing module by the sensor section of the sensor substrate; and causing the first holding member to receive the sensor substrate, whose electric charge is consumed, from the processing module and retract, and with that state, charging the first power supply section of the sensor substrate in a non-contact manner by a second power supply section that moves together with the base.

摘要翻译： 提供了一种使用传感器基板高效且高精度地获取基板处理装置的处理模块上的数据的方法。 该方法包括：通过第一保持构件保持传感器基板，传感器基板具有用于获取处理模块数据的传感器部分和具有用于向传感器部分供电的可再充电电力存储部分的第一电源部分; 推进第一保持构件以将传感器基板传送到处理模块; 通过传感器基板的传感器部分获取处理模块上的数据; 并且使所述第一保持构件从所述处理模块接收其消耗电荷的所述传感器基板并缩回，并且在该状态下，通过第二电力以非接触方式对所述传感器基板的所述第一电源部进行充电 供应部分与基座一起移动。

公开(公告)号：US20130006547A1

公开(公告)日：2013-01-03

申请号：US13537637

申请日：2012-06-29

申请人： Hikaru AKADA

发明人： Hikaru AKADA

IPC分类号： G01P13/00 ,  G06F19/00

CPC分类号： G01P5/12 ,  G01P13/045

摘要： A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.

摘要翻译： 一种基板处理装置的数据采集方法，用于获取基板表面上的多个测量区域中的气流方向的数据，包括：将具有多对传感器的感测基板装载在装载器上，其中每对 传感器包括第一传感器和第二传感器，其被配置为获取感测基板的表面上的气流的矢量数据; 通过第一传感器获取第一线性方向上的气流的矢量数据; 通过第二传感器获取沿第一线性方向倾斜的第二线性方向的气流的矢量数据; 以及基于与所述相应传感器对相关联的起始点组合所述气体电流矢量; 以及从与所述相应传感器对相关联的起始点计算气流方向。

公开(公告)号：US20130080099A1

公开(公告)日：2013-03-28

申请号：US13700251

申请日：2011-05-31

申请人： Hikaru Akada

发明人： Hikaru Akada

IPC分类号： G06F17/00 ,  H02J17/00

CPC分类号： G06F17/00 ,  H01L21/67253 ,  H02J7/025 ,  H02J17/00 ,  H02J50/10 ,  H02J50/12 ,  H02J50/40 ,  H02J50/80 ,  H02J50/90

摘要： A method that acquires data on a processing module of a substrate processing apparatus using a sensor substrate efficiently and highly precisely is provided. The method includes: holding a sensor substrate by a first holding member, the sensor substrate having a sensor section for acquiring data on the processing modules and a first power supply section with a rechargeable electricity storage section for supplying electric power to the sensor section; advancing the first holding member to transfer the sensor substrate to a processing module; acquiring data on the processing module by the sensor section of the sensor substrate; and causing the first holding member to receive the sensor substrate, whose electric charge is consumed, from the processing module and retract, and with that state, charging the first power supply section of the sensor substrate in a non-contact manner by a second power supply section that moves together with the base.

摘要翻译： 提供了一种使用传感器基板高效且高精度地获取基板处理装置的处理模块上的数据的方法。 该方法包括：通过第一保持构件保持传感器基板，传感器基板具有用于获取处理模块数据的传感器部分和具有用于向传感器部分供电的可再充电电力存储部分的第一电源部分; 推进第一保持构件以将传感器基板传送到处理模块; 通过传感器基板的传感器部分获取处理模块上的数据; 并且使所述第一保持构件从所述处理模块接收其消耗电荷的所述传感器基板并缩回，并且在该状态下，通过第二电力以非接触方式对所述传感器基板的所述第一电源部进行充电 供应部分与基座一起移动。