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公开(公告)号：US20190234811A9
公开(公告)日：2019-08-01
申请号：US15551152
申请日：2016-02-15
申请人： TSI, Incorporated
发明人： Frederick R. Quant , Jugar Agarwal , Siva Iyer
CPC分类号： G01K13/02 , F01D17/085 , G01K1/14 , G01K2013/024 , G01P5/12
摘要： There is disclosed a handheld air flow velocity measurement probe that includes a bridge circuit assembly having an airflow velocity sensor that is a resistance temperature detector (RTD) and a digitally controlled resistive element to dynamically adjust and maintain the resistance of the velocity sensor within the overheat temperature predefined range. The velocity measurement also uses a separate temperature sensor to sense the temperature of the air or gas flow. A humidity sensor is also included remote from the other sensors to measure humidity in the gas flow to be measured. All of the above described components are housed at a probe tip instead of a base as in most standard handheld probes and the digital interface at the probe tip allows the user to replace a bulky, expensive telescoping antenna with stackable extender scheme.
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公开(公告)号：US20170227389A1
公开(公告)日：2017-08-10
申请号：US15495268
申请日：2017-04-24
发明人： Ryosuke DOI , Hiroshi NAKANO , Keiji HANZAWA
CPC分类号： G01F1/692 , B81B7/0016 , B81C1/00825 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01P5/12 , H01L21/565 , H01L28/20 , H01L2224/05553 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/49171 , H01L2924/10158 , H01L2924/181 , H01L2924/1815 , H01L2924/00012 , H01L2924/00014 , H01L2924/00
摘要： A thermal airflow sensor includes a semiconductor device, a protective film a bonding wire, and a resin. The resin covers over a part of the semiconductor device so that the bonding wire is covered with the resin and the region including a thin-wall portion is exposed. The protective film is not covered with the resin and has an outer peripheral edge located outside the thin-wall portion.
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公开(公告)号：US20160282162A1
公开(公告)日：2016-09-29
申请号：US14778397
申请日：2014-01-29
CPC分类号： G01F1/6847 , G01F1/6842 , G01F1/692 , G01F1/696 , G01F5/00 , G01P5/12
摘要： In order to provide a thermal flow meter capable of preventing adherence of contaminants to an air flow sensing portion, the thermal flow meter (300) of the invention includes a bypass passage for flowing a measurement target gas (30) received from a main passage (124) and an air flow sensing portion (602) for measuring a flow rate of the measurement target gas (30) by performing heat transfer with the measurement target gas (30) flowing through the bypass passage through a heat transfer surface (437). The air flow sensing portion (602) is provided to be exposed to an exposed surface (402) arranged along a flow direction of the measurement target gas (30) inside the bypass passage is embedded, the mount support surface (402) has a stage (407) formed to surround a periphery of the air flow sensing portion (602), and an inner portion surrounded by the stage protrudes more than an outer portion of the stage.
摘要翻译： 为了提供能够防止污染物与气流感测部分的粘附的热流量计，本发明的热流量计（300）包括用于使从主通道接收的测量目标气体（30）流动的旁路通道（ 124）和用于通过使流过旁通通路的测量对象气体（30）通过传热面（437）进行传热来测量测量对象气体（30）的流量的气流感测部（602）。 空气流动检测部分602被设置为暴露于沿旁路通道内部的测量目标气体30的流动方向布置的暴露表面402，安装支撑表面402具有一个阶段 （407），其形成为围绕所述气流感测部（602）的周边，并且由所述台围绕的内部部分比所述台的外部突出。
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4.发明申请DATA ACQUISITION METHOD OF SUBSTRATE PROCESSING APPARATUS AND SENSING SUBSTRATE 有权基板处理装置和传感基板的数据采集方法公开(公告)号：US20130006547A1
公开(公告)日：2013-01-03
申请号：US13537637
申请日：2012-06-29
申请人： Hikaru AKADA
发明人： Hikaru AKADA
CPC分类号： G01P5/12 , G01P13/045
摘要： A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.
摘要翻译： 一种基板处理装置的数据采集方法，用于获取基板表面上的多个测量区域中的气流方向的数据，包括：将具有多对传感器的感测基板装载在装载器上，其中每对 传感器包括第一传感器和第二传感器，其被配置为获取感测基板的表面上的气流的矢量数据; 通过第一传感器获取第一线性方向上的气流的矢量数据; 通过第二传感器获取沿第一线性方向倾斜的第二线性方向的气流的矢量数据; 以及基于与所述相应传感器对相关联的起始点组合所述气体电流矢量; 以及从与所述相应传感器对相关联的起始点计算气流方向。
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公开(公告)号：US08143689B2
公开(公告)日：2012-03-27
申请号：US11597280
申请日：2006-09-19
IPC分类号： H01L31/058
CPC分类号： G01F1/6845 , G01P5/12 , G01P13/025
摘要： A sensor device for sensing air flow speed at the exterior of an aircraft, comprising a substrate having an upper side on which is mounted a diaphragm over an aperture or recess in the substrate, the diaphragm being thermally and electrically insulative, and mounting on its upper surface a heating element comprising a layer of resistive material, and wherein electrical connections to the heating element are buried in the diaphragm and/or the substrate, and provide electrical terminals at the lower side of the substrate. The heating element is exposed to the environment, but the remaining electrical parts of the device are not exposed.
摘要翻译： 一种用于感测飞行器外部的空气流速的传感器装置，包括具有上侧的基板，在基板上的孔或凹部上安装有隔膜，所述隔膜具有热和电绝缘性，并且安装在其上部 表面包括电阻材料层的加热元件，并且其中与所述加热元件的电连接被掩埋在所述隔膜和/或所述基板中，并且在所述基板的下侧提供电端子。 加热元件暴露于环境中，但是该设备的其余电气部分不暴露。
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公开(公告)号：US20110167902A1
公开(公告)日：2011-07-14
申请号：US13071257
申请日：2011-03-24
申请人： Dan GRABOI , Finn SVEEN , John GARRIOTT
发明人： Dan GRABOI , Finn SVEEN , John GARRIOTT
摘要： A constant temperature anemometer is disclosed. The anemometer includes electrically conductive pins including a first set of pins and a second set of pins. A conductor is coupled to the electrically coupled pins. A current source is configured to provide a current through the conductor between the first set of pins. A voltage sensor is configured to measure the voltage across the conductor between the second set of pins. The current source and voltage sensor are configured to maintain a constant resistance of the conductor between the first set of pins.
摘要翻译： 公开了一种恒温风速计。 风速计包括导电销，其包括第一组销和第二组销。 导体耦合到电耦合的引脚。 电流源被配置为在第一组引脚之间提供通过导体的电流。 电压传感器被配置为测量第二组引脚之间的导体两端的电压。 电流源和电压传感器被配置为在第一组引脚之间保持导体的恒定电阻。
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公开(公告)号：US20110132398A1
公开(公告)日：2011-06-09
申请号：US12901475
申请日：2010-10-08
CPC分类号： G01P5/12 , G01F1/6845 , G01F1/6888 , G01F1/69 , G01F1/696 , G01F1/698 , G01F1/6983 , G01F15/006 , G01F15/12
摘要： An apparatus and method for adaptive materials arranged in a variety of orientations and with a wide range of attachment configurations to induce structural vibrations at extremely high frequencies. These mechanical vibrations cause fouling agents to become detached and accordingly “clean” an otherwise dirty element or wire of a hot-wire anemometer, planar or curvilinear sensor surface, or display surfaces. They also can be made to vibrate at such frequencies with such intensities that local droplets of water are either shaken off or instantaneously cavitate, thereby allowing the elements to be used in all weather conditions.
摘要翻译： 一种用于自适应材料的装置和方法，其布置成各种取向并且具有宽范围的附接构造以在极高频率下引起结构振动。 这些机械振动会使污垢剂变得分离，因此“清洁”热丝风速计，平面或曲线传感器表面或显示表面的另外脏的元件或线。 它们也可以在这样的频率下以这样的强度振动，使得局部水滴被挥动或瞬时空化，从而允许元件在所有天气条件下使用。
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公开(公告)号：US07950291B2
公开(公告)日：2011-05-31
申请号：US12455917
申请日：2009-06-09
申请人： Timothy A. Vogel
发明人： Timothy A. Vogel
IPC分类号： G01L1/00
CPC分类号： G01P5/12 , B64D43/02 , G01P1/02 , Y10T16/558 , Y10T16/95
摘要： An instrument housing comprising a first portion having a wedge form, a third portion having a wedge form, a second portion between the first portion and the third portion, a first hinge portion between the first portion and the second portion, the first hinge portion extending normal to a major axis A-A, a second hinge portion between the second portion and the third portion, the second hinge portion extending normal to a major axis A-A, and the second portion having a portion for receiving an instrument.
摘要翻译： 一种仪器壳体，包括具有楔形的第一部分，具有楔形的第三部分，在第一部分和第三部分之间的第二部分，在第一部分和第二部分之间的第一铰链部分，第一铰链部分延伸 垂直于长轴AA的第二铰链部分，第二部分和第三部分之间的第二铰链部分，第二铰链部分垂直于长轴AA延伸，第二部分具有用于接收仪器的部分。
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公开(公告)号：US07946167B2
公开(公告)日：2011-05-24
申请号：US12540143
申请日：2009-08-12
申请人： Dan Graboi , Finn Sveen , John Garriott
发明人： Dan Graboi , Finn Sveen , John Garriott
IPC分类号： G01F1/68
摘要： A constant temperature hot-conductor anemometer includes a set of electrically conductive pins including a pair of inner pins and a pair of outer pins. A conductor is electrically and mechanically coupled to the pins. A current source is coupled to the inner pins. The current source is configured to provide a current through the conductor between the inner pins. A voltage sensor is coupled to the outer pins and configured to measure a voltage across the conductor between the outer pins. The current source and voltage sensor are configured to maintain a constant resistance of the conductor between the inner pins. In an example, a second set of pins, a second conductor and a second circuit are also used to measure dynamic temperature of a fluid and also to calibrate resistances at a known ambient temperature.
摘要翻译： 恒温热导体风速计包括一组导电销，包括一对内销和一对外销。 电导体和机械地连接到引脚上。 电流源耦合到内部引脚。 电流源被配置为在内部引脚之间提供通过导体的电流。 电压传感器耦合到外部引脚并被配置成测量外部引脚之间的导体两端的电压。 电流源和电压传感器被配置为保持内部引脚之间的导体的恒定电阻。 在一个示例中，第二组引脚，第二导体和第二电路也用于测量流体的动态温度，并且还用于在已知的环境温度下校准电阻。
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公开(公告)号：US20100306964A1
公开(公告)日：2010-12-09
申请号：US12455917
申请日：2009-06-09
申请人： Timothy A. Vogel
发明人： Timothy A. Vogel
IPC分类号： E05D5/02
CPC分类号： G01P5/12 , B64D43/02 , G01P1/02 , Y10T16/558 , Y10T16/95
摘要： An instrument housing comprising a first portion having a wedge form, a third portion having a wedge form, a second portion between the first portion and the third portion, a first hinge portion between the first portion and the second portion, the first hinge portion extending normal to a major axis A-A, a second hinge portion between the second portion and the third portion, the second hinge portion extending normal to a major axis A-A, and the second portion having a portion for receiving an instrument.
摘要翻译： 一种仪器壳体，包括具有楔形的第一部分，具有楔形的第三部分，在第一部分和第三部分之间的第二部分，在第一部分和第二部分之间的第一铰链部分，第一铰链部分延伸 垂直于长轴AA的第二铰链部分，第二部分和第三部分之间的第二铰链部分，第二铰链部分垂直于长轴AA延伸，第二部分具有用于接收仪器的部分。
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