公开(公告)号：US20100295898A1

公开(公告)日：2010-11-25

申请号：US12780304

申请日：2010-05-14

申请人： Hirofumi SAKAI ,  Toru SHINOHARA

发明人： Hirofumi SAKAI ,  Toru SHINOHARA

IPC分类号： B41J2/145

CPC分类号： H05B33/10 ,  B41J2/16517 ,  B41J2/1721 ,  B41J3/28 ,  B41J3/543 ,  G02F1/133516

摘要： A droplet discharge device includes a plurality of discharge heads configured and arranged to discharge droplets toward a plurality of pattern film formation regions disposed on a substrate with the pattern film formation regions including at least one narrow pattern film formation region that is narrower than the other pattern film formation regions. A number of the discharge heads corresponding to the narrow pattern film formation region is greater than a number of the discharge heads corresponding to one of the pattern film formation regions having an area that is larger than that of the narrow pattern film formation region.

摘要翻译： 液滴喷射装置包括多个排出头，其被构造和布置成将液滴朝向设置在基板上的多个图案膜形成区域排出，其中图案膜形成区域包括至少一个比其他图案窄的图案成膜区域 成膜区。 对应于窄图案膜形成区域的多个排出头大于与具有比窄图案膜形成区域的面积大的图案膜形成区域中的一个的排出头的数量。

公开(公告)号：US20120295509A1

公开(公告)日：2012-11-22

申请号：US13562869

申请日：2012-07-31

申请人： Hirofumi SAKAI ,  Toru SHINOHARA

发明人： Hirofumi SAKAI ,  Toru SHINOHARA

IPC分类号： H05B33/10 ,  B05D5/00

CPC分类号： H05B33/10 ,  B41J2/16517 ,  B41J2/1721 ,  B41J3/28 ,  B41J3/543 ,  G02F1/133516

摘要： A pattern film formation method includes: discharging liquid from at least one first discharge head toward a first pattern film formation region on a substrate; and discharging liquid from a plurality of second discharge heads toward a second pattern film formation region that is narrower than the first pattern film formation region. A number of the second discharge heads is greater than a number of the at least one first discharge head.

摘要翻译： 图案成膜方法包括：将液体从至少一个第一排出头朝向基板上的第一图案膜形成区域排出; 并将液体从多个第二排出头朝向比第一图案成膜区域窄的第二图案膜形成区域排出。 多个第二排出头大于至少一个第一排放头的数量。

公开(公告)号：US20090244134A1

公开(公告)日：2009-10-01

申请号：US12401251

申请日：2009-03-10

申请人： Toru SHINOHARA

发明人： Toru SHINOHARA

IPC分类号： B41J29/38 ,  G03F1/00

CPC分类号： B41J2/2139 ,  B41J3/28 ,  B41J3/407

摘要： A liquid droplet discharging apparatus includes a substrate having a plurality of film formation regions; a plurality of nozzles discharging droplets of a liquid, the nozzles being positioned facing the substrate and moved relatively with respect to the substrate to perform a scanning operation so as to discharge the droplets in the film formation regions during the scanning operation; a first moving mechanism moving the substrate relatively with the nozzles in a first direction; a plurality of driving units provided, each corresponding to one of the nozzles; a nozzle driving section generating a plurality of driving signals to supply one of the driving signals changing amounts of the droplets to be discharged to the driving units so as to allow the droplets to be discharged from the nozzles; and a control section controlling the first moving mechanism to allow the scanning operation to be performed a plurality of times over a same film formation region and controlling the nozzle driving section to allow a predetermined amount of the liquid to be discharged as droplets in the same film formation region during the plurality of times of the scanning operations and to change the driving signal applied to the driving units corresponding to nozzles positioned over the film formation region among the nozzles in each of the scanning operations.

摘要翻译： 液滴喷射装置包括具有多个成膜区域的基板; 多个喷嘴排出液体的液滴，喷嘴相对于基板相对定位并进行扫描操作，以便在扫描操作期间排出成膜区域中的液滴; 第一移动机构，在第一方向上使喷嘴相对移动; 设置有多个驱动单元，每个驱动单元对应于一个所述喷嘴; 喷嘴驱动部，其产生多个驱动信号，以将驱动信号中的一个向所述驱动部提供要排出的液滴的量，以允许所述液滴从所述喷嘴排出; 以及控制部，其控制第一移动机构，以允许在相同的成膜区域上多次执行扫描操作，并且控制喷嘴驱动部分，以允许预定量的液体作为液滴排放在同一膜中 并且在每个扫描操作中，在喷嘴之间改变施加到对应于位于成膜区域上的喷嘴的驱动单元的驱动信号的驱动信号。

公开(公告)号：US20100104740A1

公开(公告)日：2010-04-29

申请号：US12578982

申请日：2009-10-14

申请人： Toru SHINOHARA

发明人： Toru SHINOHARA

IPC分类号： B05D5/06 ,  G01F11/08

CPC分类号： B41J2/15 ,  B41J2/2128 ,  B41J19/142 ,  B41J2202/09 ,  H01L27/3211 ,  H01L51/0005 ,  H01L51/56

摘要： A method for discharging a liquid body includes discharging the liquid body to a plurality of discharged regions provided to a substrate from a plurality of nozzles each of which discharges the liquid body as a droplet and that are disposed in a linear manner as a nozzle line while the nozzle line and the substrate are relatively moved in a main scan direction approximately perpendicular to an arrangement direction of the nozzle line. Each of the plurality of the discharged regions is composed of a first discharged region and a second discharged region. An area of the first discharged region is different from an area of the second discharged region. In the discharging the liquid body, a discharge condition of the liquid body to the first discharged region is set to be different from a discharge condition of the liquid body to the second discharged region.

摘要翻译： 一种排出液体的方法包括：从多个喷嘴将液体排放到设置于基板的多个排出区域，每个喷嘴以液滴的形式排出液体，并以线性方式设置为喷嘴线，同时 喷嘴线和基板在大致垂直于喷嘴线的排列方向的主扫描方向上相对移动。 多个放电区域中的每一个由第一放电区域和第二放电区域构成。 第一放电区域的区域与第二放电区域的区域不同。 在排出液体时，液体向第一排出区域的排出状态被设定为不同于液体向第二排出区域的排出状态。

公开(公告)号：US20100099325A1

公开(公告)日：2010-04-22

申请号：US12562801

申请日：2009-09-18

申请人： Toru SHINOHARA

发明人： Toru SHINOHARA

IPC分类号： H01J9/22 ,  B41J2/04 ,  B05D5/06

CPC分类号： B41J2/14233 ,  B41J2/145 ,  G02B5/201 ,  H01L27/3211 ,  H01L51/0005 ,  H01L51/56

摘要： A method for discharging a liquid body includes: discharging the liquid body to a discharged region from a plurality of nozzles while a plurality of droplet discharge heads having a nozzle line having the plurality of nozzles that discharge the liquid body as droplets and are arranged in a linear manner, and a substrate including a plurality of discharged regions having a nearly rectangular shape are relatively moved in a main scan direction that is nearly orthogonal to an arrangement direction of the droplet discharge heads. In the method, the plurality of discharged regions are composed of a first discharged region and a second discharged region. The first discharged region is disposed on the substrate to set a long side thereof along a certain direction, and the second discharged region has a smaller area than the first discharged region and is disposed to set a long side thereof nearly orthogonal to the long side of the first discharged region. Further, the first discharged region is disposed to set the long side thereof along the main scan direction in the discharging.

摘要翻译： 一种用于排出液体的方法包括：将具有多个喷嘴的喷嘴线排放到多个喷嘴的排出区域的多个液滴喷射头，并将液体排出液体 并且包括具有近似矩形形状的多个排出区域的基板在与液滴喷射头的排列方向几乎正交的主扫描方向上相对移动。 在该方法中，多个放电区域由第一放电区域和第二放电区域构成。 第一放电区域设置在基板上沿着一定方向设置其长边，并且第二放电区域具有比第一放电区域更小的面积，并且设置成将其长边几乎与 第一个排放地区。 此外，第一放电区域设置成在放电中沿主扫描方向设置其长边。

公开(公告)号：US20090202284A1

公开(公告)日：2009-08-13

申请号：US12356154

申请日：2009-01-20

申请人： Toru SHINOHARA

发明人： Toru SHINOHARA

IPC分类号： B41J13/00

CPC分类号： B41J3/28 ,  B41J3/4073 ,  B41J11/0085

摘要： A placing table includes a placing surface on which a substrate is placed; a suction unit which sucks the substrate to the placing surface; a separation unit which separates the substrate from the placing surface; and a rotation unit, being a part of the placing surface and rotating about a vertical axis with respect to the placing surface. In the table, the suction unit sucks the substrate to the placing surface at the rotation unit and the separation unit separates the substrate from a part of the placing surface excluding the rotation unit if the rotation unit is rotated.

摘要翻译： 放置台包括其上放置基板的放置表面; 抽吸单元，其将所述基板吸附到所述放置表面; 分离单元，其将所述基板与所述放置表面分离; 以及作为所述放置表面的一部分并且相对于所述放置表面围绕垂直轴线旋转的旋转单元。 在表中，抽吸单元将旋转单元将基板吸附到放置表面，并且如果旋转单元旋转，分离单元将基板与除旋转单元之外的放置表面的一部分分离。

公开(公告)号：US20090085967A1

公开(公告)日：2009-04-02

申请号：US12234200

申请日：2008-09-19

申请人： Eijiro FUJIMORI ,  Takayuki IMAI ,  Toru SHINOHARA

发明人： Eijiro FUJIMORI ,  Takayuki IMAI ,  Toru SHINOHARA

IPC分类号： B41J2/165

CPC分类号： B41J2/16508

摘要： A capping fixture is adapted to be coupled to a droplet discharge device including a droplet discharge head aligned on a unit plate of a carriage. The capping fixture includes a base panel, a head cap portion and an elastic member. The head cap portion is disposed on the base panel at a position corresponding to the droplet discharge head to hermetically seal the droplet discharge head when the capping fixture is coupled to the carriage of the droplet discharge device. The elastic member elastically couples the head cap portion with the base panel so that the head cap portion is movable within a prescribed distance in a direction substantially perpendicular to the base panel.

摘要翻译： 封盖固定件适于联接到包括在滑架的单元板上对准的液滴喷射头的液滴喷射装置。 封盖固定件包括底板，头盖部分和弹性部件。 头帽部分在与液滴喷射头相对应的位置处设置在基板上，以在封盖固定件联接到液滴喷射装置的托架时气密地密封液滴喷射头。 弹性构件将头盖部分与底板弹性联接，使得头盖部分能够在基本上垂直于底板的方向上在规定的距离内移动。