公开(公告)号：US06643045B2

公开(公告)日：2003-11-04

申请号：US09973183

申请日：2001-10-10

申请人： Hiroyuki Fujita ,  Tarik Bourouina ,  Gilbert Reyne ,  Eric Lebrasseur ,  Hideo Muro

发明人： Hiroyuki Fujita ,  Tarik Bourouina ,  Gilbert Reyne ,  Eric Lebrasseur ,  Hideo Muro

IPC分类号： G02B2608

CPC分类号： G02B26/10 ,  G02B26/0858

摘要： A semiconductor scanner substrate includes a vibrating structure of a mirror supported by a beam projecting from a frame. Strain sensing piezoresistors are formed in a base region of the beam adjacent to the frame. Metal interconnections are formed in the frame to connect the piezoresistors in a bridge circuit for sensing bending deformation or in a bridge circuit for sensing twisting deformation. Two of the piezoresistors extend alongside the lateral edges of the beam in the longitudinal direction of the beam, and these resistors are connected as adjacent arms in the bridge circuit for sensing the twisting deformation accurately.