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公开(公告)号：US20050056093A1
公开(公告)日：2005-03-17
申请号：US10936809
申请日：2004-09-09
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/123 , G01P2015/0842
摘要： An acceleration sensor comprises an acceleration sensor element having a mass portion in the center, a thick frame surrounding the mass portion and a plurality of elastic support arms bridging the mass portion and the thick frame, and an upper regulation plate covering the acceleration sensor element and fixed on the thick frame with adhesive. The mass portion has, on the mass portion upper surface, connection portions connecting the mass portion with each of the arms, wired areas having lead wires on it and non-wired areas. The non-wired areas have a major area of the upper surface of the mass portion and are lower than the wired areas. The upper regulation plate has a first gap with the wired areas and a second gap with the non-wired areas, of which length is more than the sum of the first gap length, a lead wire thickness and 0.1 μm (preferably 1.0 μm). Even if contaminants adhere the mass portion upper surface, there is a large possibility of removing the contaminants from the upper surface when etching the non-wired areas, so that the vibration amplitude of the mass portion is scarcely lessened due to them.
摘要翻译： 加速度传感器包括：加速度传感器元件，其具有中心的质量部分，围绕质量部分的厚框架和桥接质量部分和厚框架的多个弹性支撑臂;以及覆盖加速度传感器元件的上调节板， 用粘合剂固定在厚框架上。 质量部分在质量部分上表面上具有将质量部分与每个臂连接的连接部分，其上具有引线的有线区域和非接线区域。 非接线区域具有质量部分的上表面的主要区域并且低于有线区域。 上调节板具有与布线区域的第一间隙和与非接线区域的第二间隙，其长度大于第一间隙长度，引线厚度和0.1μm（优选1.0μm）的总和。 即使污染物粘附质量部分上表面，当蚀刻非接线区域时，从上表面去除污染物的可能性很大，使得质量部分的振动振幅由于它们而几乎不减少。
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公开(公告)号：US07111514B2
公开(公告)日：2006-09-26
申请号：US10936809
申请日：2004-09-09
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/123 , G01P2015/0842
摘要： An acceleration sensor comprises an acceleration sensor element having a mass portion in the center, a thick frame surrounding the mass portion and a plurality of elastic support arms bridging the mass portion and the thick frame, and an upper regulation plate covering the acceleration sensor element and fixed on the thick frame with adhesive. The mass portion has, on the mass portion upper surface, connection portions connecting the mass portion with each of the arms, wired areas having lead wires on it and non-wired areas. The non-wired areas have a major area of the upper surface of the mass portion and are lower than the wired areas. The upper regulation plate has a first gap with the wired areas and a second gap with the non-wired areas, of which length is more than the sum of the first gap length, a lead wire thickness and 0.1 μm (preferably 1.0 μm). Even if contaminants adhere the mass portion upper surface, there is a large possibility of removing the contaminants from the upper surface when etching the non-wired areas, so that the vibration amplitude of the mass portion is scarcely lessened due to them.
摘要翻译： 加速度传感器包括：加速度传感器元件，其具有中心的质量部分，围绕质量部分的厚框架和桥接质量部分和厚框架的多个弹性支撑臂;以及覆盖加速度传感器元件的上调节板， 用粘合剂固定在厚框架上。 质量部分在质量部分上表面上具有将质量部分与每个臂连接的连接部分，其上具有引线的有线区域和非接线区域。 非接线区域具有质量部分的上表面的主要区域并且低于有线区域。 上调节板具有与布线区域的第一间隙和与非接线区域的第二间隙，其长度大于第一间隙长度，引线厚度和0.1μm（优选1.0μm）的总和。 即使污染物粘附质量部分上表面，当蚀刻非接线区域时，从上表面去除污染物的可能性很大，使得质量部分的振动振幅由于它们而几乎不减少。
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公开(公告)号：US06763719B2
公开(公告)日：2004-07-20
申请号：US10384645
申请日：2003-03-11
IPC分类号： G01P1512
CPC分类号： G01P15/123 , G01P15/18 , G01P2015/084
摘要： An ultra-small and slim semiconductor acceleration sensor with high sensitivity is provided. The acceleration sensor has a mass portion formed at a center part of a silicon semiconductor substrate, a frame formed on an edge part of the substrate, thin elastic support arms which are provided on top surfaces of the mass portion and the frame and connect the mass portion and the frame, and strain gauges constituted by a plurality of pairs of piezoresistors formed on top surfaces of the elastic support arms. A distance between a pair of Z-axis strain gauges provided on the top surface of the elastic support arm is made longer by 0.4L to 1.2L or shorter by 1.0L to 1.8L than a distance between a pair of X-axis strain gauges, whereby output of the Z-axis strain gauge is made at the same level as output of the X-axis strain gauge. Alternatively, an angle formed by the Z-axis strain gauge with an X-axis is made 10 to 30 degrees or 65 to 90 degrees, whereby the output of the Z-axis strain gauge is made at the same level as the output of the X-axis strain gauge.
摘要翻译： 提供了一种具有高灵敏度的超小型半导体加速度传感器。 加速度传感器具有形成在硅半导体基板的中心部分的质量部分，形成在基板的边缘部分上的框架，薄的弹性支撑臂设置在质量部分和框架的顶表面上并且连接质量 部分和框架，以及由形成在弹性支撑臂的顶表面上的多对压电电阻器构成的应变计。 设置在弹性支撑臂的顶表面上的一对Z轴应变计之间的距离比一对X轴应变计之间的距离长0.4L至1.2L或更短1.0L至1.8L 由此，Z轴应变计的输出与X轴应变计的输出相同。 或者，由Z轴应变计与X轴形成的角度为10〜30度或65〜90度，由此将Z轴应变计的输出设定为与 X轴应变仪。
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公开(公告)号：US06892578B2
公开(公告)日：2005-05-17
申请号：US10717476
申请日：2003-11-21
申请人： Masakatsu Saitoh , Shinji Furuichi , Takashi Satoh
发明人： Masakatsu Saitoh , Shinji Furuichi , Takashi Satoh
CPC分类号： G01P15/18 , G01P1/023 , G01P15/0802 , G01P15/123 , G01P2015/084
摘要： An acceleration sensor in which a regulation plate is fixed with adhesive onto a support frame of a sensor chip of the sensor to limit the movement of a mass portion of the sensor chip within a predetermined gap range. In the acceleration sensor, the adhesion area of the adhesive can be controlled to a predetermined value to prevent a variation of the sensitivity due to the variation of the adhesion area. The sensor chip comprises the mass portion, the frame surrounding the mass portion and having on an upper surface of the frame a plurality of the recesses to fill adhesive into, elastic support arms bridging the mass portion and the frame, and strain gauges formed on the elastic support arms. The regulation plate is fixed with paste onto the frame with the predetermined gap with an upper surface of the mass portion. The paste contains hard plastic balls, of a diameter larger than the predetermined gap, mixed with adhesive. The adhesive is preferably of silicon-rubber resin.
摘要翻译： 一种加速度传感器，其中调节板用粘合剂固定到传感器的传感器芯片的支撑框架上，以将传感器芯片的质量部分的运动限制在预定的间隙范围内。 在加速度传感器中，可以将粘合剂的粘合面积控制在预定值，以防止粘附面积变化引起的灵敏度变化。 传感器芯片包括质量部分，围绕质量部分的框架，并且在框架的上表面上具有多个凹部以将粘合剂填充到桥接质量部分和框架的弹性支撑臂中，以及形成在其上的应变计 弹性支撑臂。 调节板用浆料固定到具有与质量部分的上表面的预定间隙的框架上。 该糊料包含直径大于预定间隙的硬塑料球，与粘合剂混合。 粘合剂优选为硅橡胶树脂。
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公开(公告)号：US20070028687A1
公开(公告)日：2007-02-08
申请号：US11481003
申请日：2006-07-06
IPC分类号： G01P15/00
CPC分类号： G01P15/123 , G01P1/023 , G01P15/18 , G01P2015/0842
摘要： An acceleration sensor, which has realized such a high impact-resistance that a weight bottom surface of an acceleration sensor element does not directly collide with an inner bottom plate of a protection case made of ceramic, glass or silicon to avoid edges and corners of the weight bottom surface of the acceleration sensor element chipping, even when an excessive acceleration or impact is applied to the acceleration sensor. The acceleration sensor comprises the acceleration sensor element having in a center a weight that works as a pendulum when acceleration is applied, and the protection case housing the acceleration sensor element. The inner bottom plate of the protection case works as a regulation plate to prevent the weight from excessively swing downwards. An impact buffer material of a metal layer or a resin layer is provided on the weight bottom surface or the inner bottom plate of the protection case.
摘要翻译： 实现了加速度传感器元件的重量底面不直接与由陶瓷，玻璃或硅制成的保护壳体的内底板直接碰撞的高抗冲击性的加速度传感器，以避免边缘和角部 即使当对加速度传感器施加过大的加速度或冲击时，加速度传感器元件的重量底部表面也会破裂。 加速度传感器包括加速度传感器元件，该加速度传感器元件具有在施加加速度时用作摆锤的重量的中心，并且保护壳体容纳加速度传感器元件。 保护壳的内底板作为调节板，以防止重量向下摆动。 金属层或树脂层的冲击缓冲材料设置在保护壳体的重量底面或内底板上。
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公开(公告)号：US07562575B2
公开(公告)日：2009-07-21
申请号：US11481003
申请日：2006-07-06
IPC分类号： G01P3/00
CPC分类号： G01P15/123 , G01P1/023 , G01P15/18 , G01P2015/0842
摘要： An acceleration sensor, which has realized such a high impact-resistance that a weight bottom surface of an acceleration sensor element does not directly collide with an inner bottom plate of a protection case made of ceramic, glass or silicon to avoid edges and corners of the weight bottom surface of the acceleration sensor element chipping, even when an excessive acceleration or impact is applied to the acceleration sensor. The acceleration sensor comprises the acceleration sensor element having in a center a weight that works as a pendulum when acceleration is applied, and the protection case housing the acceleration sensor element. The inner bottom plate of the protection case works as a regulation plate to prevent the weight from excessively swing downwards. An impact buffer material of a metal layer or a resin layer is provided on the weight bottom surface or the inner bottom plate of the protection case.
摘要翻译： 实现了加速度传感器元件的重量底面不直接与由陶瓷，玻璃或硅制成的保护壳体的内底板直接碰撞的高抗冲击性的加速度传感器，以避免边缘和角部 即使当对加速度传感器施加过大的加速度或冲击时，加速度传感器元件的重量底部表面也会破裂。 加速度传感器包括加速度传感器元件，该加速度传感器元件具有在施加加速度时用作摆锤的重量的中心，并且保护壳体容纳加速度传感器元件。 保护壳的内底板作为调节板，以防止重量向下摆动。 金属层或树脂层的冲击缓冲材料设置在保护壳体的重量底面或内底板上。
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公开(公告)号：US20090223292A1
公开(公告)日：2009-09-10
申请号：US12375476
申请日：2007-09-18
申请人： Hiroyuki Hatano , Atsushi Mieno , Masakatsu Saitoh , Yoshio Ikeda
发明人： Hiroyuki Hatano , Atsushi Mieno , Masakatsu Saitoh , Yoshio Ikeda
IPC分类号： G01P15/12
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/123 , G01P2015/084
摘要： Provided is a piezo-resistor type acceleration sensor in which an offset voltage does not fluctuate even when excessive impact/acceleration is applied. In the acceleration sensor, metal wires on top surfaces of a flexible portion and a weight are arranged in grooves formed on the flexible portion top surface/weight top surface. The acceleration sensor has a structure in which the metal wires do not hit an upper regulation plate even when the weight collides with the upper regulation plate, and the offset voltage fluctuation can be avoided.
摘要翻译： 提供了一种压电阻型加速度传感器，其中即使施加过大的冲击/加速度，偏移电压也不会波动。 在加速度传感器中，柔性部分的顶表面上的金属线和重物布置在形成在柔性部分顶表面/重量上表面上的槽中。 加速度传感器具有这样的结构，其中即使当重量与上调节板碰撞时，金属丝也不会撞击上调节板，并且可以避免偏移电压波动。
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公开(公告)号：US20100218607A1
公开(公告)日：2010-09-02
申请号：US12670964
申请日：2008-06-25
申请人： Atsushi Kazama , Masakatsu Saitoh , Ryoji Okada , Takanori Aono
发明人： Atsushi Kazama , Masakatsu Saitoh , Ryoji Okada , Takanori Aono
IPC分类号： G01P15/12
CPC分类号： G01P15/18 , G01P15/123 , G01P2015/0842 , H01L24/45 , H01L2224/32145 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48145 , H01L2224/48247 , H01L2224/73265 , H01L2924/1461 , H01L2924/181 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2924/20752 , H01L2924/00012
摘要： An acceleration sensor whose characteristics including sensitivity are less likely to change relative to disturbance force applied to a sensor chip. The acceleration sensor has a support frame, a weight supported within the support frame via flexible beams, semiconductor piezoresistance elements provided on the beams, and wiring interconnecting the piezoresistance elements. The acceleration sensor detects acceleration from changes in resistance of the piezoresistance elements. Stress damping sections are provided on those portions of the beams which exclude the portions where the piezoresistance elements are provided. Each stress damping section is symmetrical with respect to the point of intersection between the length center line of the beam and the width center line of the beam. When disturbance force is applied to a sensor element in the direction in which the entire each of the beams extends, the stress damping sections absorbs the disturbance force. Because stress imposed in the direction in which the entire each of the beams extends becomes minimally changeable, and the deformability of the beam also becomes difficult to change, and this reduces the change in the sensitivity of the acceleration sensor caused by disturbance force.
摘要翻译： 包括灵敏度的特性的加速度传感器相对于施加到传感器芯片的干扰力不太可能改变。 加速度传感器具有支撑框架，通过柔性梁支撑在支撑框架内的重物，设置在梁上的半导体压阻元件和互连压阻元件的布线。 加速度传感器根据压阻元件的电阻变化来检测加速度。 应力阻尼部分设置在梁的那些部分上，排除了设置压电元件的部分。 每个应力阻尼部分相对于梁的长度中心线和梁的宽度中心线之间的交点相对称。 当扰动力沿着每个梁的整个方向延伸的方向施加到传感器元件时，应力阻尼部分吸收扰动力。 由于施加在整个梁的整个延伸方向上的应力最小可变化，并且梁的变形性也变得难以改变，并且这减小了由扰动力引起的加速度传感器的灵敏度的变化。
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公开(公告)号：US08474318B2
公开(公告)日：2013-07-02
申请号：US12670964
申请日：2008-06-25
申请人： Atsushi Kazama , Masakatsu Saitoh , Ryoji Okada , Takanori Aono
发明人： Atsushi Kazama , Masakatsu Saitoh , Ryoji Okada , Takanori Aono
IPC分类号： G01P15/12
CPC分类号： G01P15/18 , G01P15/123 , G01P2015/0842 , H01L24/45 , H01L2224/32145 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48145 , H01L2224/48247 , H01L2224/73265 , H01L2924/1461 , H01L2924/181 , H01L2924/3025 , H01L2924/00014 , H01L2924/00 , H01L2924/20752 , H01L2924/00012
摘要： An acceleration sensor having a support frame, a weight supported within the support frame via flexible beams, semiconductor piezoresistance elements provided on the beams, and wiring interconnecting the piezoresistance elements. The acceleration sensor detects acceleration from changes in resistance of the piezoresistance elements. Stress damping sections are provided on those portions of the beams which exclude the portions where the piezoresistance elements are provided. Each stress damping section is symmetrical with respect to the point of intersection between the length center line of the beam and the width center line of the beam.
摘要翻译： 一种加速度传感器，其具有支撑框架，通过柔性梁支撑在支撑框架内的重物，设置在梁上的半导体压阻元件和互连压阻元件的布线。 加速度传感器根据压阻元件的电阻变化来检测加速度。 应力阻尼部分设置在梁的那些部分上，排除了设置压电元件的部分。 每个应力阻尼部分相对于梁的长度中心线和梁的宽度中心线之间的交点相对称。
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公开(公告)号：US20060236761A1
公开(公告)日：2006-10-26
申请号：US11356238
申请日：2006-02-17
申请人： Hideki Inoue , Munetoshi Unuma , Yasunori Abe , Masakatsu Saitoh
发明人： Hideki Inoue , Munetoshi Unuma , Yasunori Abe , Masakatsu Saitoh
CPC分类号： G01P3/22 , G01P15/0891 , G01P15/18 , G01P2015/084 , G11B19/04 , H04M2250/12
摘要： A free fall detection device capable of detecting a fall accompanied by rotation is provided. A fall accompanied by rotation is detected based on a waveform of an acceleration signal output from the acceleration detection unit and an angular velocity signal output from the angular velocity detection unit. A gravity center acceleration of the device to be protected is calculated from the acceleration detected by the acceleration detection unit and from the angular velocity detected by the angular velocity detection unit. Even when the device being protected rotates as it falls, the fall of the device can be detected from the detected acceleration or angular velocity. Further, by calculating the gravity center acceleration not affected by the rotation, it is possible to detect a fall of the device with high precision even if the device rotates as it falls.
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