公开(公告)号：US20140103208A1

公开(公告)日：2014-04-17

申请号：US14002141

申请日：2012-02-29

申请人： Hiroyuki Noda ,  Mitsuru Onuma ,  Isao Nagaoki ,  Shuichi Mamishin

发明人： Hiroyuki Noda ,  Mitsuru Onuma ,  Isao Nagaoki ,  Shuichi Mamishin

IPC分类号： H01J37/22

CPC分类号： H01J37/224 ,  H01J37/16 ,  H01J37/244 ,  H01J37/26

摘要： This electron microscope (20) comprises: a first imaging device (291); a second imaging device (240) that can be moved away from transmitted light (P); and another detection device (260). The second imaging device is disposed in an observation chamber (230) above the first imaging device, and an attachment portion (231) of the other detection device is disposed at a position rotated 90 degrees from the attachment position of the second imaging device on the same plane on which the second imaging device is disposed. Thus, the second imaging means and the other detector can be attached compactly to the observation chamber disposed on the table surface of a mount housing, whereby an electron microscope can be provided in which workability of the devices and effective use of the table surface are achieved.

摘要翻译： 该电子显微镜（20）包括：第一成像装置（291）; 可以远离透射光（P）移动的第二成像装置（240）; 和另一检测装置（260）。 第二成像装置设置在第一成像装置上方的观察室（230）中，另一检测装置的安装部（231）设置在与第二成像装置的安装位置相对旋转90度的位置 设置有第二成像装置的同一平面。 因此，第二成像装置和另一个检测器可以紧凑地附接到设置在安装壳体的台面上的观察室，由此可以提供电子显微镜，其中可以实现装置的可操作性和桌面的有效使用 。