Flat cooling structure of integrated circuit
    2.
    发明授权
    Flat cooling structure of integrated circuit 失效
    集成电路平面冷却结构

    公开(公告)号:US5023695A

    公开(公告)日:1991-06-11

    申请号:US349411

    申请日:1989-05-08

    IPC分类号: H01L23/473

    CPC分类号: H01L23/4735 H01L2224/16

    摘要: A circuit assembly with circulation of coolant. A plurality of chips of integrated circuit are arranged on a substrate separately from each other in rows and columns. A circulating unit disposed on the substrate and having a planar shape circulates coolant therethrough. The circulating unit has within its bottom side a plurality of cells arranged in rows and columns correspondingly to the plurality of chips. Each individual cell is thermally connected to the corresponding individual chip so as to receive therefrom heat generated thereby. The circulating unit includes a distributor for distributing to the respective cells the circulated coolant effective to absorb the heat received in the respective cells.