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    Laser beam generating apparatus and method
    2.
    发明授权
    Laser beam generating apparatus and method 有权
    激光束发生装置及方法

    公开(公告)号：US06240111B1

    公开(公告)日：2001-05-29

    申请号：US09289244

    申请日：1999-04-09

    申请人： Shigeo Kubota ,  Nobuhiko Umezu ,  Tatsuo Fukui ,  Hisashi Masuda ,  Koichi Tatsuki

    发明人： Shigeo Kubota ,  Nobuhiko Umezu ,  Tatsuo Fukui ,  Hisashi Masuda ,  Koichi Tatsuki

    IPC分类号： H01S310

    CPC分类号： G02F1/37

    摘要： A laser beam generating apparatus comprising a first laser beam source oscillating in a near infrared-ray region of, for example, an Nd:YAG laser to generate a laser beam, a second higher harmonic wave generator for generating, from the laser beam emitted from the first laser beam source, a second higher harmonic wave having a half wavelength of the laser beam emitted from the first laser beam source, a splitter for splitting the second higher harmonic wave, a second laser beam source which is supplied with a part of the second higher harmonic wave thus split is input to a Ti:Sapphire laser to be excited and oscillated, thereby generating a laser beam of substantially 700 nm in wavelength, a fourth higher harmonic wave generator for generating a fourth higher harmonic wave from the remaining part of the second higher harmonic wave thus split, a sum frequency mixing composed of a BBO crystal device to which the laser beam of substantially 700 nm in wavelength and the fourth higher harmonic wave are input, and a controller for controlling the temperature of the BBO crystal device to substantially 100K or less, thereby generating a laser beam of substantially 193 nm in wavelength as an output of the sum frequency mixing.

    摘要翻译： 一种激光束产生装置，包括：在例如Nd：YAG激光器的近红外线区域中振荡的第一激光束源，以产生激光束;第二高次谐波发生器，用于从从 第一激光束源，具有从第一激光束源发射的激光束的半波长的第二高次谐波，用于分离第二高次谐波的分离器，被提供有第一激光束的一部分的第二激光束源 将这样分割的第二高次谐波输入到激发和振荡的Ti：蓝宝石激光器中，从而产生大致为700nm的波长的激光束;第四高次谐波发生器，用于从剩余部分产生第四高次谐波 这样分裂的第二高次谐波，由BBO晶体器件组成的和频混频，其中波长大致为700nm的激光束和第四较高谐波 尼康波输入，以及用于将BBO晶体装置的温度控制在基本上为100K以下的控制器，由此产生大致193nm的波长的激光束作为和频混合的输出。

    Wavelength converter
    5.
    发明授权
    Wavelength converter 失效
    波长转换器

    公开(公告)号：US06249371B1

    公开(公告)日：2001-06-19

    申请号：US09264941

    申请日：1999-03-09

    申请人： Hisashi Masuda ,  Shigeo Kubota

    发明人： Hisashi Masuda ,  Shigeo Kubota

    IPC分类号： G02F135

    CPC分类号： G02F1/3534 ,  G02F1/37

    摘要： To obtain a laser beam the wavelength of 200 nm or less the repetition frequency of which is high, to reduce damage applied to mineral material such as synthetic fused silica, to extend the life of a stepper and others, to extend the life of laser parts without using toxic gas, to enhance the throughput of a stepper and others by enabling the compatibility of a high repetition frequency with the stability of a pulse, to realize an ultraviolet radiation source the whole of which is composed of a solid and to solve the problems of reliability, size, maintenance, a plumbing and others and sufficiently enhance reliability, the following procedure is taken. A second harmonic with the wavelength of 532 nm is acquired by converting the wavelength of a laser beam with the wavelength of 1.06 &mgr;m from a laser, a fourth harmonic with the wavelength of 266 nm is acquired by further converting the wavelength of the laser beam, a laser beam with the wavelength of approximately 700 nm is acquired by oscillating a titanium sapphire laser using a laser beam with the wavelength of 532 nm acquired by converting the wavelength of the above second harmonic or a laser beam from the above laser and a laser beam with the wavelength of approximately 190 nm is acquired by mixing the above laser beam and the laser beam with the wavelength of 266 nm on a nonlinear crystal in a laser to be a sum frequency.

    摘要翻译： 为了获得激光束的重复频率高的200nm或更小的激光束，减少施加到诸如合成熔凝石英等矿物材料的损伤，延长步进机等的使用寿命，延长激光部件的使用寿命 不使用有毒气体，通过实现高重复频率与脉冲稳定性的兼容性，提高步进机等的吞吐量，实现整体由固体组成的紫外线辐射源，解决问题 可靠性，尺寸，维护，管道等，并充分提高可靠性，采取以下步骤。 通过从激光器转换波长为1.06μm的激光束的波长来获得波长为532nm的二次谐波，通过进一步转换激光束的波长来获得波长为266nm的第四谐波， 通过使用通过转换上述二次谐波的波长或来自上述激光的激光束获得的波长为532nm的激光束振荡钛蓝宝石激光而获得波长为约700nm的激光束，以及激光束 通过将上述激光束和266nm波长的激光束混合在激光器中的非线性晶体上，获得约190nm的波长，作为和频。

    Wavelength conversion apparatus
    8.
    发明授权
    Wavelength conversion apparatus 失效
    波长转换装置

    公开(公告)号：US5936761A

    公开(公告)日：1999-08-10

    申请号：US863433

    申请日：1997-05-27

    申请人： Shigeo Kubota ,  Hisashi Masuda ,  Werner Wiechmann

    发明人： Shigeo Kubota ,  Hisashi Masuda ,  Werner Wiechmann

    IPC分类号： G02F1/37 ,  H01S3/109

    CPC分类号： G02F1/37

    摘要： A wavelength conversion device in which the fundamental wave is converged in a non-linear optical crystal for effecting wavelength conversion, and in which no significant peak is generated in the non-linear optical crystal even if the power of the input fundamental wave is high. The spot radius at the converging point of the fundamental wave is selected to be 0.0014 to 0.0023 cm, while the crystal length of the non-linear optical crystal is selected to be 0.5 to 1.2 cm. If this range is met, the light intensity distribution in the non-linear optical crystal becomes of the top hat type, such that no peak is generated.

    摘要翻译： 一种波长转换装置，其中基波收敛在非线性光学晶体中以实现波长转换，并且即使输入基波的功率高，在非线性光学晶体中也不产生显着的峰值。 选择基波的会聚点的光点半径为0.0014〜0.0023cm，非线性光学晶体的晶体长度选择为0.5〜1.2cm。 如果满足该范围，则非线性光学晶体中的光强度分布变为顶帽型，使得不产生峰。

    Optical recording medium and method of optically playing back same including recording medium structure operating as optical resonators emitting applied pumping light at a variable frequency
    9.
    发明授权
    Optical recording medium and method of optically playing back same including recording medium structure operating as optical resonators emitting applied pumping light at a variable frequency 失效
    光记录介质和光学回放方法，包括以可变频率发射施加的泵浦光的光谐振器操作的记录介质结构

    公开(公告)号：US5313449A

    公开(公告)日：1994-05-17

    申请号：US946611

    申请日：1992-09-18

    申请人： Yushi Kaneda ,  Shigeo Kubota ,  Hisashi Masuda

    发明人： Yushi Kaneda ,  Shigeo Kubota ,  Hisashi Masuda

    IPC分类号： G11B7/00 ,  G11B7/005 ,  G11B7/007 ,  G11B7/24

    CPC分类号： G11B7/0052 ,  G11B7/24

    摘要： An optical recording medium, typically an optical disc, has a recording region of a laser medium extending thicknesswise thereof, and a reference region positioned radially inwardly of the recording region for emitting reference light. The recording region has pits and lands formed on a surface thereof as representing recorded information. The pits and lands having respective first surfaces parallel to corresponding second surfaces on an opposite surface of the recording region. The first and second surfaces provide different thicknesses of the recording region. When pumping light emitted from a semiconductor laser, for example, is applied to the recording region, the recording region operates as optical resonators between the first and second surfaces for emitting laser signal light of a variable frequency depending on the recorded information. The optical resonators have respective optical axes extending thicknesswise of the recording region.

    摘要翻译： 通常为光盘的光学记录介质具有其厚度方向延伸的激光介质的记录区域和位于记录区域的径向内侧的用于发射参考光的参考区域。 记录区域具有形成在其表面上的表示记录信息的凹坑和平台。 所述凹坑和平台具有平行于所述记录区域的相对表面上的对应的第二表面的相应的第一表面。 第一和第二表面提供不同厚度的记录区域。 当泵浦从半导体激光器发出的光被施加到记录区域时，记录区域作为第一和第二表面之间的光谐振器起作用，用于根据所记录的信息发射可变频率的激光信号光。 光谐振器具有沿记录区域的厚度方向延伸的相应的光轴。