Optical apparatus and optical measurement method

    公开(公告)号:US10739267B2

    公开(公告)日:2020-08-11

    申请号:US15791887

    申请日:2017-10-24

    申请人: HITACHI, LTD.

    IPC分类号: G01N21/65 G01J3/44 G02B21/00

    摘要: Exemplary embodiments of the present disclosure relate to providing an optical apparatus that is capable of acquiring representative Raman spec trams with high reliability from hyper spectrum images of samples. An optical apparatus according to this disclosure: receives a specifying input that specifies a specific Raman spectrum bandwidth as a reference signal; and extracts a Raman spectrum for a measurement point where an intensity of the reference signal is at or above a reference intensity.