公开(公告)号：US20210110992A1

公开(公告)日：2021-04-15

申请号：US17061671

申请日：2020-10-02

Applicant: HITACHI, LTD.

Inventor： Yoshio TAKAHASHI ,  Tetsuya AKASHI

IPC: H01J37/22 ,  H01J37/244

Abstract: In an image collection system using a transmission electron microscope, a useless collection time to be spent collecting images in each of which particles overlap each other or no particle is contained, and a date volume are reduced. The image collection system includes: a control unit that moves an observation field of view in the transmission electron microscope and overlaps each other electron waves that propagate through spatially different portions within the observation field of view; a photographing unit that acquires the overlapped electron waves as an observation image; and a determination unit that determines whether a particle is present within the observation field of view.

公开(公告)号：US20190027338A1

公开(公告)日：2019-01-24

申请号：US16029751

申请日：2018-07-09

Applicant: HITACHI, LTD.

Inventor： Akira SUGAWARA ,  Yoshio TAKAHASHI ,  Tetsuya AKASHI ,  Toshiaki TANIGAKI

IPC: H01J37/20 ,  H01J37/244 ,  H01J37/22 ,  H01J37/04 ,  G03H5/00

Abstract: Continuous and automatic acquisition of electron beam holograms is made possible by using a sample holding mechanism that includes a sample end region that has a linear shape that is suited for electron beam holography, separates a thin-film rectangular window with an extreme-thin support film that supports a sample being disposed and a rectangular hole that has a linear-shaped edge and through which a reference wave is transmitted from each other, and configures a part of a layer that is thicker than the support film.

公开(公告)号：US20240021406A1

公开(公告)日：2024-01-18

申请号：US18107150

申请日：2023-02-08

Applicant: Hitachi, Ltd.

Inventor： Yoshio TAKAHASHI ,  Tetsuya AKASHI ,  Toshiaki TANIGAKI

IPC: H01J37/26 ,  H01J37/22

CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J2237/2614

Abstract: There is provided a phase-image processing apparatus and a phase-image processing method capable of highly accurately correcting a phase singularity included in a phase image. A phase-image processing apparatus that applies image processing to a phase image includes: a fringe pattern-creating unit that creates a plurality of fringe patterns based on a first interference fringe image corresponding to a first phase image including a phase singularity; a patch image-creating unit that creates a patch image based on the fringe pattern; an interference fringe image correcting unit that pastes the patch image to an area of the first interference fringe image corresponding to the phase singularity, corrects the first interference fringe image, and creates a second interference fringe image; and a phase image correcting unit that creates a second phase image from the second interference fringe image.

公开(公告)号：US20130313432A1

公开(公告)日：2013-11-28

申请号：US13900589

申请日：2013-05-23

Applicant: Hitachi, Ltd. ,  RIKEN

Inventor： Toshiaki TANIGAKI ,  Shinji AIZAWA ,  Tsuyoshi MATSUDA ,  Ken HARADA ,  Yoshio TAKAHASHI

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J37/295 ,  H01J2237/026 ,  H01J2237/1514 ,  H01J2237/2614

Abstract: In an interference electron microscope, a first electron biprism is disposed between an acceleration tube and an illumination-lens system, a mask is disposed between the acceleration tube and the first electron biprism, and the first electron biprism is arranged in a shadow that the mask forms. Current densities of first and second electron beams on a parabolic surface of an objective lens system where a sample is positioned are controlled by a control system by an optical action of the illumination-lens system, the mask is imaged on the parabolic surface of the objective lens system, and an electro-optical length between the first electron biprism and the parabolic surface of the objective lens where the sample is positioned is controlled without generating Fresnel fringes on a sample surface from the mask and the first electron biprism.

Abstract translation: 在干涉电子显微镜中，第一电子双棱镜设置在加速管与照明透镜系统之间，掩模设置在加速管与第一电子双棱镜之间，第一电子双棱镜被布置成荫罩 形式。 通过照明透镜系统的光学作用由控制系统控制样品所在的物镜系统的抛物面上的第一和第二电子束的电流密度，掩模被成像在物镜的抛物面上 透镜系统，并且控制样品所在的第一电子双棱镜和物镜的抛物线表面之间的电光长度，而不在掩模和第一电子双棱镜的样品表面上产生菲涅尔条纹。

公开(公告)号：US20160035535A1

公开(公告)日：2016-02-04

申请号：US14810673

申请日：2015-07-28

Applicant: Hitachi, Ltd.

Inventor： Tomokazu SHIMAKURA ,  Yoshio TAKAHASHI ,  Hideo KASHIMA

IPC: H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J2237/20214

Abstract: An object of the present invention is to provide a sample holder that can carry out a series of observations in which a rotational series image at arbitrary angles, namely, from −180° to +180° around the x-axis of an observation region and a rotational series image at arbitrary angles, namely, from −180° to +180° around the y-axis are obtained without taking a sample out of a sample chamber.A sample holder includes a power unit, a power separator, a rotational movement transmission mechanism, and a linear movement transmission mechanism. The power separator separates one movement of the power unit to be distributed to the rotational movement transmission mechanism and the linear movement transmission mechanism. The rotational movement transmission mechanism provides a rotational movement around a second rotational axis. The linear movement transmission mechanism provides a linear movement around the second rotational axis.

Abstract translation: 本发明的目的是提供一种可以进行一系列观察的样本保持器，其中以观察区域的x轴为中心的-180°至+ 180°的任意角度的旋转系列图像，以及 在从样本室取出样本的情况下，获得任意角度的旋转系列图像，即围绕y轴的-180°至+ 180°。 样品架包括动力单元，动力分离器，旋转运动传递机构和线性运动传递机构。 功率分离器将要分配的动力单元的一个运动分离到旋转运动传递机构和线性运动传递机构。 旋转运动传递机构围绕第二旋转轴线提供旋转运动。 线性运动传递机构围绕第二旋转轴线提供线性运动。