公开(公告)号：US11139139B2

公开(公告)日：2021-10-05

申请号：US17252124

申请日：2018-06-28

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi Morita ,  Shinichi Kato ,  Hiroyuki Ito

IPC: H01J37/07 ,  H01J37/248

Abstract: Provided are a charged particle beam generator and a charged particle beam device that can improve insulation reliability as a result of reducing the high electric field generated around a connection section for a conductor. The charged particle beam generator 100 has: a plug 151 that guides high voltage from outside to a charged particle source that is in a vacuum; and a socket 251 having the charged particle source attached thereto. An electric field reduction ring 161 that electrically connects to one of a plurality of conductors that guide high voltage is embedded inside the tip of the plug 151. The plurality of conductors that guide the high voltage are arranged so as to penetrate the electric field reduction ring 161.