公开(公告)号：US20220122804A1

公开(公告)日：2022-04-21

申请号：US17563186

申请日：2021-12-28

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22

Abstract: The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.

公开(公告)号：US20230036590A1

公开(公告)日：2023-02-02

申请号：US17872046

申请日：2022-07-25

Applicant: Hitachi High-Tech Corporation

Inventor： Wen LI ,  Shinichi MURAKAMI ,  Hiroyuki TAKAHASHI ,  Makoto SUZUKI ,  Wataru MORI

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/22 ,  H01J37/244

Abstract: A charged particle beam scanning module, a charged particle beam device, and a computer that can correct an INL error in a DAC circuit in real time. The charged particle beam scanning module includes a scanning controller configured to output a scanning digital signal of a charged particle beam, a DAC circuit configured to convert the scanning digital signal into a scanning analog signal and output the scanning analog signal, and an ADC circuit configured to convert the scanning analog signal into an evaluation digital signal. A sampling frequency at which the DAC circuit samples the scanning digital signal is a first frequency, and a sampling frequency at which the ADC circuit samples the scanning analog signal is a second frequency smaller than the first frequency. The scanning controller determines an output characteristic of the DAC circuit by evaluating the scanning digital signal and the evaluation digital signal.

公开(公告)号：US20200312615A1

公开(公告)日：2020-10-01

申请号：US16900176

申请日：2020-06-12

Applicant: Hitachi High-Tech Corporation

Inventor： Toshiyuki YOKOSUKA ,  Chahn LEE ,  Hideyuki KAZUMI ,  Hajime KAWANO ,  Shahedul HOQUE ,  Kumiko SHIMIZU ,  Hiroyuki TAKAHASHI

IPC: H01J37/28 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22

Abstract: The scanning charged particle beam microscope according to the present application is characterized in that, in acquiring an image of the FOV (field of view), interspaced beam irradiation points are set, and then, a deflector is controlled so that a charged particle beam scan is performed faster when the charged particle beam irradiates a position on the sample between each of the irradiation points than when the charged particle beam irradiates a position on the sample corresponding to each of the irradiation points (a position on the sample corresponding to each pixel detecting a signal). This allows the effects from a micro-domain electrification occurring within the FOV to be mitigated or controlled.