公开(公告)号：US20220246392A1

公开(公告)日：2022-08-04

申请号：US17587935

申请日：2022-01-28

Applicant: Hitachi High-Tech Corporation

Inventor： Akio YAMAMOTO ,  Wen LI ,  Hiroshi OINUMA ,  Shunsuke MIZUTANI

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  H01J37/22

Abstract: Provided is a charged particle beam device and a charged particle beam device calibration method capable of correcting an influence of characteristic variation and noise with high accuracy. Control units execute a first calibration of correcting a characteristic variation between a plurality of channels in detectors and signal processing circuits by using a setting value of a control parameter for each of the plurality of channels in a state in which a primary electron beam is not emitted. The control units further execute a second calibration of correcting a characteristic variation between the plurality of channels in scintillators or the like by using the setting value of the control parameter for each of the plurality of channels in a state in which the primary electron beam is emitted.

公开(公告)号：US20230335373A1

公开(公告)日：2023-10-19

申请号：US18131891

申请日：2023-04-07

Applicant: Hitachi High-Tech Corporation

Inventor： Akio YAMAMOTO ,  Wen LI ,  Shunsuke MIZUTANI ,  Naoya ISHIGAKI

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J37/265 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: There is provided a technique capable of reducing deterioration of a back scattered electron (BSE) detector caused by a dark pulse. Charged particle beam apparatus includes: a plurality of BSE detectors configured to detect a BSE from a sample; and a controller. The controller acquires, within a period, a first peak time of a first peak included in an output signal from a first BSE detector among the plurality of BSE detectors, and a second peak time of a second peak included in an output signal from a second BSE detector other than the first BSE detector among the plurality of BSE detectors, determines, when the second peak is present where a time difference between the first peak time and the second peak time is within a threshold value, that the first peak is caused by the BSE, and determines, when the second peak is not present where the time difference is within the threshold value, that the first peak is caused by the dark pulse.

公开(公告)号：US20230059414A1

公开(公告)日：2023-02-23

申请号：US17795367

申请日：2020-02-05

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi OINUMA ,  Kazuki IKEDA ,  Wen LI ,  Masashi WADA

IPC: H01J37/26 ,  H01J37/24 ,  H01J37/28

Abstract: A method of setting a parameter of a charged particle beam device, for shortening the time required to adjust an ABCC parameter. An inverse conversion processing unit generates a simulator input signal corresponding to an electron emitted from a sample. A simulation detector uses an arithmetic model that simulates a detector and executes arithmetic processing on the simulator input signal in a state in which characteristic information is reflected in an arithmetic parameter. A simulated image conversion unit executes arithmetic processing corresponding to an image conversion unit and converts a signal from the simulation detector into a simulated image. An ABCC search unit searches for an ABCC parameter with respect to the simulation detector so that an evaluation value obtained from the simulated image becomes a specified reference value, and outputs the ABCC parameter as a search result to an ABCC control unit of the actual machine.

公开(公告)号：US20230036590A1

公开(公告)日：2023-02-02

申请号：US17872046

申请日：2022-07-25

Applicant: Hitachi High-Tech Corporation

Inventor： Wen LI ,  Shinichi MURAKAMI ,  Hiroyuki TAKAHASHI ,  Makoto SUZUKI ,  Wataru MORI

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/22 ,  H01J37/244

Abstract: A charged particle beam scanning module, a charged particle beam device, and a computer that can correct an INL error in a DAC circuit in real time. The charged particle beam scanning module includes a scanning controller configured to output a scanning digital signal of a charged particle beam, a DAC circuit configured to convert the scanning digital signal into a scanning analog signal and output the scanning analog signal, and an ADC circuit configured to convert the scanning analog signal into an evaluation digital signal. A sampling frequency at which the DAC circuit samples the scanning digital signal is a first frequency, and a sampling frequency at which the ADC circuit samples the scanning analog signal is a second frequency smaller than the first frequency. The scanning controller determines an output characteristic of the DAC circuit by evaluating the scanning digital signal and the evaluation digital signal.

公开(公告)号：US20220319795A1

公开(公告)日：2022-10-06

申请号：US17763840

申请日：2019-10-07

Applicant: Hitachi High-Tech Corporation

Inventor： Ryo KADOI ,  Wen LI ,  Naoya ISHIGAKI

IPC: H01J37/06 ,  H01J37/248 ,  H02M1/14 ,  H02M7/06 ,  H02M7/10

Abstract: The invention provides a power supply module and a charged particle beam device that are capable of reducing ripple noise. A high-voltage generation circuit 101 includes booster circuits CPa and CPb of two systems that are configured to be symmetrical to each other, and performs a boosting operation by using a capacitive element and a diode in the booster circuits CPa and CPb of the two systems. The high-voltage generation circuit is housed in a housing and a reference power supply voltage is applied thereto. A left electrode 102a is fixedly provided in the vicinity of one of the booster circuits CPa and CPb of the two systems in the housing, and a right electrode 102b is fixedly provided in the vicinity of the other of the booster circuits CPa and CPb of the two systems in the housing. A stray capacitance adjustment circuit 100a adjusts capacitance values of stray capacitances of the booster circuits CPa and CPb of the two systems by electrically controlling an electrical connection characteristic between the left electrode 102a and the reference power supply voltage 104 and an electrical connection characteristic between the right electrode 102b and the reference power supply voltage 104

公开(公告)号：US20240014002A1

公开(公告)日：2024-01-11

申请号：US18200232

申请日：2023-05-22

Applicant: Hitachi High-Tech Corporation

Inventor： Takayasu IWATSUKA ,  Hideto DOHI ,  Tomoyo SASAKI ,  Wen LI

IPC: H01J37/244 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/1475 ,  H01J37/28 ,  H01J2237/2448 ,  H01J2237/24521 ,  H01J2237/24455

Abstract: The charged particle beam apparatus includes a charged particle source generating a charged particle beam, a deflector deflecting the charged particle beam, a detector detecting secondary electrons emitted from an irradiation target in response to irradiation with the charged particle beam, and a processor system. The processor system (A) acquires a first time-series change in secondary electron detection-related quantity by repeatedly performing the following (A1) and (A2), (A1) directly or indirectly, maintains or changes the control amount applied to the deflector to a first control amount, and (A2) acquires the secondary electron detection-related quantity based on an output from the detector, and (B) acquires a time-series change in variation of the beam diameter of the charged particle beam based on the first time-series change.

公开(公告)号：US20230010272A1

公开(公告)日：2023-01-12

申请号：US17783788

申请日：2019-12-16

Applicant: Hitachi High-Tech Corporation

Inventor： Shinichi MURAKAMI ,  Tomoyo SASAKI ,  Yuuji KASAI ,  Yuzuru MIZUHARA ,  Wen LI

IPC: H01J37/04 ,  H01J37/28 ,  H01J37/24

Abstract: Provided is a charged particle beam device with low blanking noise and improved signal detection accuracy. As means therefor, a charged particle beam device is configured by: a stage where a sample is mountable; a charged particle gun performing charged particle emission to the sample; a voltage source; a first switching circuit to which a voltage is supplied from the voltage source; a second switching circuit having one end connected to a ground; a third switching circuit having one end connected to the ground; a fourth switching circuit to which a voltage is supplied from the voltage source; a first blanking electrode connected to the first switching circuit and the second switching circuit; a second blanking electrode facing the first blanking electrode and connected to the third switching circuit and the fourth switching circuit; and a control circuit controlling the first switching circuit, the second switching circuit, the third switching circuit, and the fourth switching circuit.

公开(公告)号：US20220189729A1

公开(公告)日：2022-06-16

申请号：US17603225

申请日：2019-04-24

Applicant: Hitachi High-Tech Corporation

Inventor： Tomoharu NAGASHIMA ,  Kazuki IKEDA ,  Wen LI ,  Masashi WADA ,  Hajime KAWANO

IPC: H01J37/22 ,  H01J37/28 ,  G06F3/04847 ,  G06F3/0482

Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.