公开(公告)号：US20230036590A1

公开(公告)日：2023-02-02

申请号：US17872046

申请日：2022-07-25

Applicant: Hitachi High-Tech Corporation

Inventor： Wen LI ,  Shinichi MURAKAMI ,  Hiroyuki TAKAHASHI ,  Makoto SUZUKI ,  Wataru MORI

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/22 ,  H01J37/244

Abstract: A charged particle beam scanning module, a charged particle beam device, and a computer that can correct an INL error in a DAC circuit in real time. The charged particle beam scanning module includes a scanning controller configured to output a scanning digital signal of a charged particle beam, a DAC circuit configured to convert the scanning digital signal into a scanning analog signal and output the scanning analog signal, and an ADC circuit configured to convert the scanning analog signal into an evaluation digital signal. A sampling frequency at which the DAC circuit samples the scanning digital signal is a first frequency, and a sampling frequency at which the ADC circuit samples the scanning analog signal is a second frequency smaller than the first frequency. The scanning controller determines an output characteristic of the DAC circuit by evaluating the scanning digital signal and the evaluation digital signal.