公开(公告)号：US20220189729A1

公开(公告)日：2022-06-16

申请号：US17603225

申请日：2019-04-24

Applicant: Hitachi High-Tech Corporation

Inventor： Tomoharu NAGASHIMA ,  Kazuki IKEDA ,  Wen LI ,  Masashi WADA ,  Hajime KAWANO

IPC: H01J37/22 ,  H01J37/28 ,  G06F3/04847 ,  G06F3/0482

Abstract: When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.

公开(公告)号：US20230059414A1

公开(公告)日：2023-02-23

申请号：US17795367

申请日：2020-02-05

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi OINUMA ,  Kazuki IKEDA ,  Wen LI ,  Masashi WADA

IPC: H01J37/26 ,  H01J37/24 ,  H01J37/28

Abstract: A method of setting a parameter of a charged particle beam device, for shortening the time required to adjust an ABCC parameter. An inverse conversion processing unit generates a simulator input signal corresponding to an electron emitted from a sample. A simulation detector uses an arithmetic model that simulates a detector and executes arithmetic processing on the simulator input signal in a state in which characteristic information is reflected in an arithmetic parameter. A simulated image conversion unit executes arithmetic processing corresponding to an image conversion unit and converts a signal from the simulation detector into a simulated image. An ABCC search unit searches for an ABCC parameter with respect to the simulation detector so that an evaluation value obtained from the simulated image becomes a specified reference value, and outputs the ABCC parameter as a search result to an ABCC control unit of the actual machine.