公开(公告)号：US20230059414A1

公开(公告)日：2023-02-23

申请号：US17795367

申请日：2020-02-05

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi OINUMA ,  Kazuki IKEDA ,  Wen LI ,  Masashi WADA

IPC: H01J37/26 ,  H01J37/24 ,  H01J37/28

Abstract: A method of setting a parameter of a charged particle beam device, for shortening the time required to adjust an ABCC parameter. An inverse conversion processing unit generates a simulator input signal corresponding to an electron emitted from a sample. A simulation detector uses an arithmetic model that simulates a detector and executes arithmetic processing on the simulator input signal in a state in which characteristic information is reflected in an arithmetic parameter. A simulated image conversion unit executes arithmetic processing corresponding to an image conversion unit and converts a signal from the simulation detector into a simulated image. An ABCC search unit searches for an ABCC parameter with respect to the simulation detector so that an evaluation value obtained from the simulated image becomes a specified reference value, and outputs the ABCC parameter as a search result to an ABCC control unit of the actual machine.

公开(公告)号：US20220246392A1

公开(公告)日：2022-08-04

申请号：US17587935

申请日：2022-01-28

Applicant: Hitachi High-Tech Corporation

Inventor： Akio YAMAMOTO ,  Wen LI ,  Hiroshi OINUMA ,  Shunsuke MIZUTANI

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  H01J37/22

Abstract: Provided is a charged particle beam device and a charged particle beam device calibration method capable of correcting an influence of characteristic variation and noise with high accuracy. Control units execute a first calibration of correcting a characteristic variation between a plurality of channels in detectors and signal processing circuits by using a setting value of a control parameter for each of the plurality of channels in a state in which a primary electron beam is not emitted. The control units further execute a second calibration of correcting a characteristic variation between the plurality of channels in scintillators or the like by using the setting value of the control parameter for each of the plurality of channels in a state in which the primary electron beam is emitted.