公开(公告)号：US20210183611A1

公开(公告)日：2021-06-17

申请号：US16951472

申请日：2020-11-18

Applicant: Hitachi High-Tech Corporation

Inventor： Yuki TOMIZAWA ,  Kazunari ASAO ,  Kazuyuki HIRAO

IPC: H01J37/22 ,  H01J37/21 ,  H01J37/28 ,  H01J37/285 ,  G06T5/00

Abstract: There are provided: a method for image adjustment using a charged particle beam device, and a charged particle beam system, capable of appropriately adjusting a contrast and brightness as well as a focus for a measurement region present in a deep portion of a sample even when a depth of the measurement region is unknown.
A method for image adjustment performed by a computer system controlling a charged particle beam device includes: by the computer system, specifying a measurement region from a captured image of a sample; performing centering processing based on the specified measurement region; extracting the measurement region in a field of view that has undergone the centering processing or the image that has undergone the centering processing; adjusting a contrast and brightness for the extracted measurement region; and adjusting a focus for the measurement region in which the contrast and brightness have been adjusted.

公开(公告)号：US20210055098A1

公开(公告)日：2021-02-25

申请号：US16887885

申请日：2020-05-29

Applicant: Hitachi High-Tech Corporation

Inventor： Takuma YAMAKI ,  Takuma YAMAMOTO ,  Yasunori GOTO ,  Tomohiro TAMORI ,  Kazunari ASAO

IPC: G01B15/00 ,  G01N23/2251 ,  G01N23/203

Abstract: Overlay shift amount measurement with high accuracy becomes possible. A charged particle beam system includes a computer system that measures an overlay shift amount between a first layer of a sample and a second layer lower than the first layer based on output of a detector. The computer system generates first images with respect to the first layer and second images with respect to the second layer based on the output of the detector, generates a first added image by adding the first images by a first added number of images, and generates a second added image by adding the second image by a second added number of images greater than the first added number of images. An overlay shift amount between the first layer and the second layer is measured based on the first added image and the second added image.