公开(公告)号：US12283452B2

公开(公告)日：2025-04-22

申请号：US18285457

申请日：2021-04-15

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi Morita ,  Takashi Kubo ,  Minoru Sakamaki ,  Shuhei Ishikawa ,  Shunichi Watanabe

IPC: H01J37/07 ,  H01J37/09 ,  H01J37/16 ,  H01J37/24 ,  H01J37/295

Abstract: Provided is a charged particle beam apparatus capable of realizing a highly reliable insulating structure. This charged particle beam apparatus emits a charged particle beam from a charged particle beam emission device onto a sample, detects charged particles generated from the sample, and creates a sample image or processes the sample. The charged particle beam emission device is provided with a charged particle source and a shield arranged in an interior of a metal housing that is filled with an insulating gas, and an acceleration electrode arranged below the charged particle source, power being supplied to the acceleration electrode via the shield.