公开(公告)号：US12283452B2

公开(公告)日：2025-04-22

申请号：US18285457

申请日：2021-04-15

Applicant: Hitachi High-Tech Corporation

Inventor： Hiroshi Morita ,  Takashi Kubo ,  Minoru Sakamaki ,  Shuhei Ishikawa ,  Shunichi Watanabe

IPC: H01J37/07 ,  H01J37/09 ,  H01J37/16 ,  H01J37/24 ,  H01J37/295

Abstract: Provided is a charged particle beam apparatus capable of realizing a highly reliable insulating structure. This charged particle beam apparatus emits a charged particle beam from a charged particle beam emission device onto a sample, detects charged particles generated from the sample, and creates a sample image or processes the sample. The charged particle beam emission device is provided with a charged particle source and a shield arranged in an interior of a metal housing that is filled with an insulating gas, and an acceleration electrode arranged below the charged particle source, power being supplied to the acceleration electrode via the shield.

公开(公告)号：US10903037B2

公开(公告)日：2021-01-26

申请号：US16572999

申请日：2019-09-17

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Keigo Kasuya ,  Shuhei Ishikawa ,  Kenji Tanimoto ,  Hajime Kawano ,  Hideo Todokoro ,  Souichi Katagiri ,  Takashi Doi ,  Soichiro Matsunaga

IPC: H01J37/075 ,  H01J37/28

Abstract: An object of the invention is to stably supply an electron beam from an electron gun, that is, to prevent variation in intensity of the electron beam. The invention provides a charged particle beam device that includes an electron gun having an electron source, an extraction electrode to which a voltage used for extracting electrons from the electron source is applied, and an acceleration electrode to which a voltage used for accelerating the electrons extracted from the electron source is applied, a first heating unit that heats the extraction electrode, and a second heating unit that heats the acceleration electrode.