公开(公告)号：US20230411111A1

公开(公告)日：2023-12-21

申请号：US18142119

申请日：2023-05-02

Applicant: Hitachi High-Tech Corporation

Inventor： Tetsuro KADOWAKI ,  Takeyoshi OHASHI ,  Takuma YAMAMOTO

IPC: H01J37/21 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/21 ,  H01J37/1478 ,  H01J2237/24578 ,  H01J2237/216 ,  H01J2237/24585 ,  H01J37/28

Abstract: The present disclosure makes it possible to shorten the time required for measurement of a sample and to measure the sample with high throughput. A charged particle beam apparatus includes a storage device that stores a correction value table corresponding to a recipe and a computer system that executes measurement on a plurality of measurement points of a sample according to a measurement order determined in the recipe. The computer system stores, when executing the recipe on a first sample, an adjustment result of one or more imaging conditions in the correction value table at each of a plurality of measurement points of the first sample, and adjusts, when executing the recipe on a second sample different from the first sample, the imaging condition based on the adjustment result of the one or more imaging conditions stored in the correction value table at each of the plurality of measurement points.