公开(公告)号：US10269533B2

公开(公告)日：2019-04-23

申请号：US14911960

申请日：2014-09-18

Applicant: Hitachi High-Technologies Corporation

Inventor： Takashi Mizuo ,  Yusuke Tamba ,  Haruhiko Hatano ,  Kazutaka Nimura

IPC: B01D8/00 ,  F25B19/00 ,  H01J37/18 ,  F25B45/00 ,  H01J37/16 ,  H01J37/20

Abstract: In conventional structures, a space between a dual cooling tank is vacuum insulated, and a cooling part is cooled via a highly thermally conductive material connected to an inner container. Such structures are affected by heat infiltrating into the highly thermally conductive material and the cooling part. For instance, in cases when liquid nitrogen is used as a coolant, it takes approximately 30 minutes for the temperature to reach −120° C. Even in cases when a significant amount of time has been spent, the temperature only reaches approximately −150° C., and thus falls significantly short of the temperature of liquid nitrogen, namely −196° C. Accordingly, an anti-contamination trap and a vacuum application device according to the present invention are provided with a structure in which a device-internal cooling part in the vacuum application device is cooled, and are characterized by being provided with: a cooling tank filled with a coolant for cooling a cooling part; and a cooling pipe extending from the cooling tank to the vicinity of the cooling part. The anti-contamination trap and the vacuum application device are further characterized in that: the coolant is supplied to an end of the cooling part; and a tube for releasing air bubbles inside the cooling pipe is inserted so as to extend to the cooling part.

公开(公告)号：US10204761B2

公开(公告)日：2019-02-12

申请号：US15514539

申请日：2014-10-09

Applicant: Hitachi High-Technologies Corporation

Inventor： Takeshi Sunaoshi ,  Yasuhira Nagakubo ,  Kazutaka Nimura

IPC: H01J37/00 ,  H01J37/28 ,  H01J37/20 ,  H01J37/18

Abstract: Provided is an electron microscope with which a sample can be observed stably and with high accuracy. The electron microscope comprises: a sample stage; an electron optical system that scans an electron beam over a sample; a vacuum system that maintains the sample stage and the electron optical system in a vacuum; a secondary electron detector that detects secondary electrons emitted from the sample; transmitted electron detectors that detect transmitted electrons that have transmitted through the sample; and a control device that obtains a secondary electron image and a transmitted electron image on the basis of the secondary electrons and the transmitted electrons detected by the secondary electron detector and the transmitted electron detectors and stores the secondary electron image and the transmitted electron image. The sample stage is provided with cooling means for cooling the sample. The vacuum system is provided with a cold trap that sucks moisture from around the sample and a vacuum gauge that measures the degree of vacuum of the vacuum system.