公开(公告)号：US10269533B2

公开(公告)日：2019-04-23

申请号：US14911960

申请日：2014-09-18

Applicant: Hitachi High-Technologies Corporation

Inventor： Takashi Mizuo ,  Yusuke Tamba ,  Haruhiko Hatano ,  Kazutaka Nimura

IPC: B01D8/00 ,  F25B19/00 ,  H01J37/18 ,  F25B45/00 ,  H01J37/16 ,  H01J37/20

Abstract: In conventional structures, a space between a dual cooling tank is vacuum insulated, and a cooling part is cooled via a highly thermally conductive material connected to an inner container. Such structures are affected by heat infiltrating into the highly thermally conductive material and the cooling part. For instance, in cases when liquid nitrogen is used as a coolant, it takes approximately 30 minutes for the temperature to reach −120° C. Even in cases when a significant amount of time has been spent, the temperature only reaches approximately −150° C., and thus falls significantly short of the temperature of liquid nitrogen, namely −196° C. Accordingly, an anti-contamination trap and a vacuum application device according to the present invention are provided with a structure in which a device-internal cooling part in the vacuum application device is cooled, and are characterized by being provided with: a cooling tank filled with a coolant for cooling a cooling part; and a cooling pipe extending from the cooling tank to the vicinity of the cooling part. The anti-contamination trap and the vacuum application device are further characterized in that: the coolant is supplied to an end of the cooling part; and a tube for releasing air bubbles inside the cooling pipe is inserted so as to extend to the cooling part.

公开(公告)号：US10784074B2

公开(公告)日：2020-09-22

申请号：US15777121

申请日：2016-11-29

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takeshi Sunaoshi ,  Yoshihisa Orai ,  Haruhiko Hatano ,  Takashi Mizuo

IPC: F25B19/00 ,  F25B9/00 ,  B01D8/00 ,  A61B18/02 ,  H01J37/20 ,  H01J37/28

Abstract: The invention is directed to a charged particle beam apparatus that enables temperature maintenance in a cooling unit provided inside a vacuum application apparatus using a refrigerant. The charged particle beam apparatus includes a cooling tank that contains a refrigerant for cooling a cooling unit, a cooling pipe that supplies the refrigerant from the cooling tank to the cooling unit, and a unit that leads the refrigerant to liquefy when the refrigerant is biased to a solid.

公开(公告)号：US09543112B2

公开(公告)日：2017-01-10

申请号：US14410235

申请日：2013-06-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasuhira Nagakubo ,  Takashi Mizuo

IPC: G21K5/10 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/20207

Abstract: In an existing specimen cryo holder, a change in the orientation of a specimen would lead to tilting of a dewar together with the specimen and hence to bubbling of a cooling source contained in the dewar. In view of this, a specimen cryo holder, including a mechanism capable of cooling a specimen while keeping the posture of a dewar in a fixed direction even when the specimen is tilted into a direction suitable for processing or observation thereof, is provided. Also provided is a dewar in which a vacuum maintenance mechanism is mounted to an outer vessel so that an inner vessel holding a cooling source therein is vacuum-insulated from the outside air.

Abstract translation: 在现有的样品冷冻保持器中，样品的取向的变化将导致杜瓦瓶与样品一起倾斜，并因此产生包含在杜瓦瓶中的冷却源的起泡。 鉴于此，提供了一种样本冷冻保持器，其包括即使当试样倾斜到适合于其加工或观察的方向时，也能够将保持在固定方向上的杜瓦的姿势的样品冷却的机构。 还提供了一种杜瓦瓶，其中真空维护机构安装到外部容器，使得其中容纳冷却源的内部容器与外部空气真空绝缘。