Method for detecting information of an electric potential on a sample and charged particle beam apparatus
    3.
    发明授权
    Method for detecting information of an electric potential on a sample and charged particle beam apparatus 有权
    用于检测样品和带电粒子束装置的电位信息的方法

    公开(公告)号:US08766182B2

    公开(公告)日:2014-07-01

    申请号:US13924213

    申请日:2013-06-21

    Abstract: An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.

    Abstract translation: 本发明的目的是提供一种方法和装置,用于使用带电粒子束测量样品表面上的电位,同时抑制由带电粒子束施加引起的样品上的电位变化,或检测补偿 用于由样品带电引起的装置的状况改变的值。 为了实现上述目的,本发明提供了一种向样品施加电压使得带电粒子束不能到达样品的方法和装置(以下称为“镜像状态”),其中 将带电粒子束施加到样品的状态,以及使用通过该电压施加获得的信号检测与样品上的电位有关的信息。

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