公开(公告)号：US10724856B2

公开(公告)日：2020-07-28

申请号：US16330003

申请日：2016-09-01

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Atsuko Yamaguchi ,  Kazuhisa Hasumi ,  Hitoshi Namai

IPC: G06T7/00 ,  G01B15/04 ,  G01N23/2251 ,  H01J37/28 ,  H01L21/66 ,  H01L27/088

Abstract: To provide an image analysis apparatus capable of easily extracting an edge of an upper layer pattern formed intersecting with a lower layer pattern so as not to be affected by the lower layer pattern, the image analysis apparatus includes a calculation unit that calculates an analysis range including a region where the lower layer pattern intersects with the upper layer pattern and a region where the lower pattern is not formed, a calculation unit that averages a plurality of signal profiles, a calculation unit that calculates a maximum value and a minimum value of a signal intensity, a calculation unit that calculates a threshold level difference using the maximum value and the minimum value, and a calculation unit that calculates the edge of the upper layer pattern on the signal profile.

公开(公告)号：US20170040230A1

公开(公告)日：2017-02-09

申请号：US15303813

申请日：2015-03-31

Applicant: Hitachi High-Technologies Corporation

Inventor： Atsuko Yamaguchi ,  Osamu Inoue ,  Hiroki Kawada

IPC: H01L21/66 ,  H01J37/285 ,  H01J37/244 ,  H01L21/033

CPC classification number: H01L22/12 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/2809 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01L21/0332 ,  H01L21/0335 ,  H01L21/0337 ,  H01L21/0338 ,  H01L22/00

Abstract: Provided is a charged particle beam device which can specify a position of an initial core with high accuracy even when fine line and space patterns are formed by an SADP in plural times. The charged particle beam device includes a detector (810) which detects secondary charged particles discharged from a sample (807) when a charged particle beam is emitted to the sample having a plurality of patterns of line shape, a display unit (817) which displays image data of a surface of the sample on the basis of a signal of the secondary charged particles, a calculation unit (812) which calculates an LER value with respect to the plurality of the patterns of line shape from the image data, and a determination unit (816) which compares the values to determine a position of the initial core.

Abstract translation: 提供一种带电粒子束装置，即使在多次由SADP形成细线和空间图案时，也能够高精度地指定初始芯的位置。 带电粒子束装置包括：检测器（810），当检测器（810）将带电粒子束发射到具有多个线状图案的样品时，检测从样品（807）排出的二次带电粒子;显示单元（817），其显示 基于所述二次带电粒子的信号的所述样本的表面的图像数据，计算单元（812），其根据所述图像数据计算相对于所述多个线状图案的LER值，以及判定 单元（816），其比较该值以确定初始核心的位置。

公开(公告)号：US09000366B2

公开(公告)日：2015-04-07

申请号：US13855977

申请日：2013-04-03

Applicant: Hitachi High-Technologies Corporation

Inventor： Atsuko Yamaguchi ,  Yasunari Sohda ,  Tatsuya Maeda ,  Osamu Nasu ,  Hiroki Kawada

IPC: H01J37/26 ,  G01N23/00

CPC classification number: H01J37/265 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/2817

Abstract: In order that a displacement between patterns of different heights, formed on a sample in a plurality of different pattern-forming steps, can be measured at fixed throughput and with high accuracy, correspondence between parameters of lenses and beam deflector of an electron optical system and an angle of incidence of a beam upon the sample is recorded as data, then a correction value for the amount of displacement or edge positions is calculated, and a true amount of displacement is calculated from the correction value and an image under observation.

Abstract translation: 为了在多个不同的图案形成步骤中形成在样品上的不同高度的图案之间的位移可以以固定的生产量和高精度测量，透镜的参数和电子光学系统的光束偏转器之间的对应关系，以及 将样本上的光束的入射角记录为数据，然后计算位移量或边缘位置的校正值，并根据校正值和观察图像计算真实的位移量。

公开(公告)号：US09824938B2

公开(公告)日：2017-11-21

申请号：US15303813

申请日：2015-03-31

Applicant: Hitachi High-Technologies Corporation

Inventor： Atsuko Yamaguchi ,  Osamu Inoue ,  Hiroki Kawada

IPC: H01J37/28 ,  H01L21/66 ,  H01J37/244 ,  H01J37/285 ,  H01L21/033

CPC classification number: H01L22/12 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/221 ,  H01J2237/24592 ,  H01J2237/2809 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01L21/0332 ,  H01L21/0335 ,  H01L21/0337 ,  H01L21/0338 ,  H01L22/00

Abstract: Provided is a charged particle beam device which can specify a position of an initial core with high accuracy even when fine line and space patterns are formed by an SADP in plural times. The charged particle beam device includes a detector (810) which detects secondary charged particles discharged from a sample (807) when a charged particle beam is emitted to the sample having a plurality of patterns of line shape, a display unit (817) which displays image data of a surface of the sample on the basis of a signal of the secondary charged particles, a calculation unit (812) which calculates an LER value with respect to the plurality of the patterns of line shape from the image data, and a determination unit (816) which compares the values to determine a position of the initial core.

公开(公告)号：US09658063B2

公开(公告)日：2017-05-23

申请号：US14897609

申请日：2014-05-27

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Atsuko Yamaguchi ,  Hiroki Kawada

IPC: G01B15/04 ,  H01J37/22

CPC classification number: G01B15/04 ,  G01B2210/56 ,  H01J37/222 ,  H01J2237/22 ,  H01J2237/24592 ,  H01J2237/28 ,  H01J2237/2809 ,  H01J2237/2817

Abstract: The present invention pertains to a method and device for quantitatively evaluating the degree and characteristics of wiggling, which is a phenomenon that occurs in electronic device fabrication processes and consists of the deformation in the same shape of the left and right edges of fine line patterns, and takes advantage of the fact that this wiggling is included in measured values for line edge variation but not line width variation by acquiring the differences between these values. Further, the present invention is configured so as to calculate line center positions and use the distribution of the deviation from the average line center position as an indicator. Additionally, the present invention is configured to quantify wiggling characteristics by outputting a coefficient of wiggling correlation between lines or a wiggling component synchronized between lines as an indicator.